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    • 2. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08791507B2
    • 2014-07-29
    • US13846514
    • 2013-03-18
    • Panasonic Corporation
    • Kazuyuki NakanishiMasaki Tamaru
    • H01L27/118
    • H01L27/0207
    • A layout of a semiconductor device is capable of reliably reducing a variation in gate length due to the optical proximity effect, and enables flexible layout design to be implemented. Gate patterns (G1, G2, G3) of a cell (C1) are arranged at the same pitch, and terminal ends (e1, e2, e3) of the gate patterns are located at the same position in the Y direction, and have the same width in the X direction. A gate pattern (G4) of a cell (C2) has protruding portions (4b) protruding toward the cell (C1) in the Y direction, and the protruding portions (4b) form opposing terminal ends (eo1, eo2, eo3). The opposing terminal ends (eo1, eo2, eo3) are arranged at the same pitch as the gate patterns (G1, G2, G3), are located at the same position in the Y direction, and have the same width in the X direction.
    • 半导体器件的布局能够可靠地降低由于光学邻近效应引起的栅极长度的变化,并且能够实现灵活的布局设计。 单元(C1)的栅极图案(G1,G2,G3)以相同的间距排列,并且栅极图案的末端(e1,e2,e3)位于与Y方向相同的位置, 相同宽度的X方向。 电池(C2)的栅极图案(G4)具有在Y方向朝向电池单元(C1)突出的突出部分(4b),并且突出部分(4b)形成相对的末端(eo1,eo2,eo3)。 相对的末端(eo1,eo2,eo3)以与栅极图案(G1,G2,G3)相同的间距配置在与Y方向相同的位置,并且在X方向上具有相同的宽度。