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    • 1. 发明授权
    • Probe and method of making same
    • 探针及其制作方法
    • US08012331B2
    • 2011-09-06
    • US11876180
    • 2007-10-22
    • Oug-Ki LeeJung-Hoon Lee
    • Oug-Ki LeeJung-Hoon Lee
    • C25D5/02
    • G01R1/06744G01R1/06711G01R1/07307G01R1/07342G01R3/00
    • Disclosed herein are a probe and a method of making the same, and more particularly to a probe having a minute pitch, with which a probe card corresponding to arrangement of pads formed with a massed shape or other various shapes on a wafer is made, and a method of making the same. The probe having a prescribed thickness and formed in the shape of a flat plate. The probe comprises a body part bent at the middle thereof so that the body part is elastically tensioned or compressed when a tension force or a compression force is applied to the body part at the upper and lower ends thereof, a connection part integrally formed with the lower end of the body part, the connection part being fixed to a substrate, and a tip part integrally formed with the upper end of the body part, the tip part contacting a pad of an element.
    • 本文公开了一种探针及其制造方法,更具体地说,涉及一种具有微小间距的探针,其中形成了与晶片上形成有组合形状或其它各种形状的焊盘布置对应的探针卡,以及 制作相同的方法。 探针具有规定的厚度并形成为平板状。 探头包括在其中间弯曲的主体部分,使得当在其上端和下端处对主体部分施加张力或压缩力时,主体部分被弹性张紧或压缩;与主体部分的上端和下端一体形成的连接部, 主体部分的下端,连接部分固定到基底,以及与主体部分的上端一体形成的尖端部分,尖端部分接触元件的垫。
    • 2. 发明申请
    • PROBE AND METHOD OF MAKING SAME
    • 探索和制作方法
    • US20080035487A1
    • 2008-02-14
    • US11876180
    • 2007-10-22
    • Oug-Ki LeeJung-Hoon Lee
    • Oug-Ki LeeJung-Hoon Lee
    • C25D5/00
    • G01R1/06744G01R1/06711G01R1/07307G01R1/07342G01R3/00
    • Disclosed herein are a probe and a method of making the same, and more particularly to a probe having a minute pitch, with which a probe card corresponding to arrangement of pads formed with a massed shape or other various shapes on a wafer is made, and a method of making the same. The probe having a prescribed thickness and formed in the shape of a flat plate. The probe comprises a body part bent at the middle thereof so that the body part is elastically tensioned or compressed when a tension force or a compression force is applied to the body part at the upper and lower ends thereof, a connection part integrally formed with the lower end of the body part, the connection part being fixed to a substrate, and a tip part integrally formed with the upper end of the body part, the tip part contacting a pad of an element.
    • 本文公开了一种探针及其制造方法,更具体地说,涉及一种具有微小间距的探针,其中形成了与晶片上形成有组合形状或其它各种形状的焊盘布置对应的探针卡,以及 制作相同的方法。 探针具有规定的厚度并形成为平板状。 探头包括在其中间弯曲的主体部分,使得当在其上端和下端处对主体部分施加张力或压缩力时,主体部分被弹性张紧或压缩;与主体部分的上端和下端一体形成的连接部, 主体部分的下端,连接部分固定到基底,以及与主体部分的上端一体形成的尖端部分,尖端部分接触元件的垫。
    • 3. 发明授权
    • Probe and method of making same
    • 探针及其制作方法
    • US07285966B2
    • 2007-10-23
    • US10549335
    • 2004-03-16
    • Oug-Ki LeeJung-Hoon Lee
    • Oug-Ki LeeJung-Hoon Lee
    • G01R31/02
    • G01R1/06744G01R1/06711G01R1/07307G01R1/07342G01R3/00
    • Disclosed herein are a probe and a method of making the same, and more particularly to a probe having a minute pitch, with which a probe card corresponding to arrangement of pads formed with a massed shape or other various shapes on a wafer is made, and a method of making the same. The probe having a prescribed thickness and formed in the shape of a flat plate. The probe comprises a body part bent at the middle thereof so that the body part is elastically tensioned or compressed when a tension force or a compression force is applied to the body part at the upper and lower ends thereof, a connection part integrally formed with the lower end of the body part, the connection part being fixed to a substrate, and a tip part integrally formed with the upper end of the body part, the tip part contacting a pad of an element.
    • 本文公开了一种探针及其制造方法,更具体地说,涉及一种具有微小间距的探针,其中形成了与晶片上形成有组合形状或其它各种形状的焊盘布置对应的探针卡,以及 制作相同的方法。 探针具有规定的厚度并形成为平板状。 探头包括在其中间弯曲的主体部分,使得当在其上端和下端处对主体部分施加张力或压缩力时,主体部分被弹性张紧或压缩;与主体部分的上端和下端一体形成的连接部, 主体部分的下端,连接部分固定到基底,以及与主体部分的上端一体形成的尖端部分,尖端部分接触元件的垫。
    • 4. 发明授权
    • Probe positioning and bonding device and probe bonding method
    • 探头定位和接合装置和探头接合方法
    • US07592565B2
    • 2009-09-22
    • US10549418
    • 2004-03-16
    • Oug-Ki LeeJung-Hoon Lee
    • Oug-Ki LeeJung-Hoon Lee
    • B23K26/00
    • G01R3/00B23K26/0861G01R1/06711G01R1/07342G01R31/2887
    • Disclosed herein are a probe positioning and bonding device and a probe bonding method, and more particularly a probe positioning and bonding device used to fix probes to prescribed positions on a substrate so that a probe card used for semiconductor integrated circuit testing equipment is manufactured, and a probe bonding method using the same. The probe positioning and bonding device comprises a stage unit disposed on a working table, a microscope disposed above the stage unit while being supported by means of a first supporting member disposed on the working table, a probe fixing unit disposed above the stage unit and below the microscope while being supported by means of a second supporting member disposed on the working table, and a light source unit supported by means of a third supporting member disposed on the working table. The light source unit is disposed toward the upper part of the stage unit.
    • 这里公开了探针定位和接合装置和探针接合方法,更具体地,涉及用于将探针固定到基板上的规定位置的探针定位和接合装置,从而制造用于半导体集成电路检测设备的探针卡,以及 使用其的探针接合方法。 探针定位和接合装置包括设置在工作台上的台单元,设置在平台单元上方的显微镜,同时由设置在工作台上的第一支撑构件支撑;探针固定单元,设置在平台单元上方和下方 显微镜同时由设置在工作台上的第二支撑构件支撑,以及由设置在工作台上的第三支撑构件支撑的光源单元。 光源单元朝向台单元的上部设置。
    • 5. 发明申请
    • Probe and method of making same
    • 探针及其制作方法
    • US20060171425A1
    • 2006-08-03
    • US10549335
    • 2004-03-16
    • Oug-Ki LeeJung-Hoon Lee
    • Oug-Ki LeeJung-Hoon Lee
    • H01S3/00
    • G01R1/06744G01R1/06711G01R1/07307G01R1/07342G01R3/00
    • Disclosed herein are a probe and a method of making the same, and more particularly to a probe having a minute pitch, with which a probe card corresponding to arrangement of pads formed with a massed shape or other various shapes on a wafer is made, and a method of making the same. The probe having a prescribed thickness and formed in the shape of a flat plate. The probe comprises a body part bent at the middle thereof so that the body part is elastically tensioned or compressed when a tension force or a compression force is applied to the body part at the upper and lower ends thereof, a connection part integrally formed with the lower end of the body part, the connection part being fixed to a substrate, and a tip part integrally formed with the upper end of the body part, the tip part contacting a pad of an element.
    • 本文公开了一种探针及其制造方法,更具体地说,涉及一种具有微小间距的探针,其中形成了与晶片上形成有组合形状或其它各种形状的焊盘布置对应的探针卡,以及 制作相同的方法。 探针具有规定的厚度并形成为平板状。 探头包括在其中间弯曲的主体部分,使得当在其上端和下端处对主体部分施加张力或压缩力时,主体部分被弹性张紧或压缩;与主体部分的上端和下端一体形成的连接部, 主体部分的下端,连接部分固定到基底,以及与主体部分的上端一体形成的尖端部分,尖端部分接触元件的垫。
    • 7. 发明授权
    • Silicon wafer for probe bonding and probe bonding method using thereof
    • 用于探针接合的硅晶片和使用其的探针接合方法
    • US07804312B2
    • 2010-09-28
    • US11569839
    • 2005-06-14
    • Jung-Hoon Lee
    • Jung-Hoon Lee
    • G01R31/02
    • G01R3/00G01R1/07342
    • Disclosed herein are a silicon wafer for probe bonding and a probe bonding method using the same. The silicon wafer for probe bonding is improved in structure to facilitate probe bonding on a probe substrate. The probe bonding method involves bonding supporting beams on the silicon wafer to bumps on the probe substrate. The silicon wafer is formed at a surface thereof with probe tips and supporting beams on an end of each probe tip to have a redetermined arrangement pattern. The silicon wafer is further formed with openings from an upper surface to a lower surface thereof. A portion of each supporting beam opposite to the probe tips protrudes is exposed to the outside through the openings.
    • 这里公开了用于探针接合的硅晶片和使用该硅晶片的探针接合方法。 用于探针接合的硅晶片在结构上得到改善以便于在探针基底上的探针接合。 探针接合方法包括将硅晶片上的支撑束粘合到探针基板上的凸起。 硅晶片在其表面处形成有探针尖端和支撑梁,每个探针尖端的端部具有重新确定的布置图案。 硅晶片还形成有从上表面到下表面的开口。 与探针尖端相反的每个支撑梁的一部分突出通过开口暴露于外部。
    • 10. 发明申请
    • Electric motor driven valve assembly having stator sealing
    • 具有定子密封的电机驱动阀组件
    • US20060175565A1
    • 2006-08-10
    • US11346792
    • 2006-02-03
    • Roy NungesserBill FleischerAndrew KimJung-Hoon LeeSun-Tae Kim
    • Roy NungesserBill FleischerAndrew KimJung-Hoon LeeSun-Tae Kim
    • F16K31/02
    • F16K31/041F16K27/0254F16K27/029
    • An electrically driven stepmotor valve assembly including separable annular stator and rotor-valve assemblies. The rotor-like assembly having a cylindrical housing adapted to slip fit inside a central, domed, stator cavity, with alignable locking members on these assemblies permitting rotary interlocking upon the slip fit assembly thereof. A sealing arrangement, in the vicinity of the open end of the stator assembly, peripherally seals the stator and rotor-valve assemblies relative to each other, when assembled, with the rotor housing having a locating plate ring portion which, in turn, supports an elastic sealing member that fits into a groove in a bottom wall of the stator housing. A plurality of differing sealing arrangement designs and structures, including sealing member reinforcing structures, are set forth for the sealing of the interlocked stator and rotor-valve assemblies relative to each other.
    • 一种电驱动步进电机阀组件,包括可分离的环形定子和转子 - 阀组件。 转子类组件具有圆柱形壳体,其适于滑动配合在中心圆顶定子腔体内,在这些组件上具有对准的锁定构件,允许在其滑动配合组件上进行旋转互锁。 在组装时,在定子组件的开口端附近的密封装置周向地密封定子和转子 - 阀组件,转子壳体具有定位板环部分,该定位板环部分依次支撑 弹性密封构件,其配合到定子壳体的底壁中的槽中。 提出了多个不同的密封装置设计和结构,包括密封构件加强结构,用于相互之间的互锁的定子和转子 - 阀组件的密封。