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    • 3. 发明授权
    • Activating catalytic solution for electroless plating and method of
electroless plating
    • 化学镀活性催化剂和化学镀方法
    • US5874125A
    • 1999-02-23
    • US39091
    • 1998-03-13
    • Osamu KanohAtsuo Senda, deceased
    • Osamu KanohAtsuo Senda, deceased
    • C23C18/14C23C18/16C23C18/30H05K3/10H05K3/18B05D5/12
    • C23C18/1612C23C18/1608C23C18/30H05K3/105H05K3/185
    • There is provided a method of forming a conductive film having a predetermined pattern in hybrid ICs, high frequency dielectric filters and the like which makes it possible to safely and efficiently perform a series of the steps of preparing an activating catalytic solution for forming a photoreactive film on a base, forming the photoreactive film through the application of the activating catalytic solution, producing an activating catalyst by exposing particular regions of the photoreactive film, developing by flushing away the photoreactive film in unexposed regions, and immersing the base in an electroless plating bath without using an organic solvent and which allows the formation of a plating film having high electrical conductivity and high strength of adherence. A hydrophilic activating catalytic solution is used which is obtained by dissolving copper oxalate, a palladium salt such as palladium chloride into an alkaline solution such as ammonia. Since the activating catalytic solution itself does not include any organic solvent, the photoreactive film can be flushed away in unexposed regions using water at the developing step, which allows immediate immersion into an electroless plating bath.
    • 提供了在混合IC中形成具有预定图案的导电膜的方法,高频介质滤波器等,这使得可以安全有效地执行一系列制备用于形成光反应膜的活化催化剂溶液的步骤 在基体上通过施加活化催化剂溶液形成光反应膜,通过暴露光反应膜的特定区域产生活化催化剂,通过冲洗未曝光区域中的光反应膜,将基底浸入化学镀浴中 不使用有机溶剂,并且能够形成具有高导电性和高粘附强度的镀膜。 使用通过将草酸铜,钯盐如氯化钯溶解在碱性溶液如氨中而获得的亲水活化催化剂溶液。 由于活化催化剂本身不包括任何有机溶剂,因此可以在显影步骤中使用水在未曝光区域冲洗光反应膜,这使得立即浸入化学镀浴中。
    • 6. 发明授权
    • Method for producing monolithic electronic parts
    • 单片电子零件的制造方法
    • US06255037B1
    • 2001-07-03
    • US08842432
    • 1997-04-24
    • Osamu KanohYasushi YoshidaAtsuo SendaYukio Sakabe
    • Osamu KanohYasushi YoshidaAtsuo SendaYukio Sakabe
    • G03F700
    • H01G4/308
    • Inexpensive methods for producing small-sized monolithic electronic parts with improved functions by which an electroconductive film can be formed uniformly, thin, and in fine patterns on a ceramic green sheet, a carrier film, or a resin film, for example. A plurality of such ceramic green sheets, etc., each having the electroconductive film formed thereon, are laminated to give a ceramic laminate, which is then sintered. The electroconductive film is formed on each ceramic green sheet, etc., by the steps of: applying a hydrophilic liquid containing an activating catalyst comprising copper oxide, a palladium salt and an alkaline solution, for example, to thereby form a photosensitive film comprising said liquid containing said activating catalyst, exposing the photosensitive predetermined regions to thereby deposit palladium catalyst on said regions, washing out the non-exposed regions of the photosensitive film with water or a liquid consisting essentially of water, and dipping the ceramic green sheet having palladium catalyst deposited thereon in an electroless plating bath to thereby form the intended electroconductive film by electroless plating.
    • 用于制造具有改进功能的小尺寸单片电子部件的廉价方法,通过该方法可以在例如陶瓷生片,载体膜或树脂膜上均匀,薄且精细地形成导电膜。 将多个形成有导电膜的陶瓷生片等层叠,得到陶瓷层叠体,然后烧结。 导电膜通过以下步骤形成在每个陶瓷生片上:例如,施加含有包含氧化铜,钯盐和碱性溶液的活化催化剂的亲水性液体,从而形成包含所述 含有所述活化催化剂的液体,曝光光敏预定区域,从而在所述区域上沉积钯催化剂,用水或基本上由水组成的液体冲洗感光膜的未曝光区域,并浸渍具有钯催化剂的陶瓷生片 在化学镀浴中沉积,从而通过无电镀形成预期的导电膜。