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1. 发明授权

US07933009B2 Method and apparatus for verifying proper substrate positioning 有权
标题翻译：用于验证适当的基板定位的方法和装置
公开(公告)号：US07933009B2
公开(公告)日：2011-04-26
申请号：US11829748
申请日：2007-07-27
申请人： Oleg Serebryanov , Alexander Lerner , Aaron Hunter , Joseph M. Ranish
发明人： Oleg Serebryanov , Alexander Lerner , Aaron Hunter , Joseph M. Ranish
IPC分类号： G01J1/00 , G01B11/14
CPC分类号： H01L21/681 , H01L21/67259
摘要： Embodiments of methods and apparatus for detecting the proper position of a substrate in a chamber are provided herein. In some embodiments, a substrate position detection apparatus includes a substrate support having a plurality of lift pins for supporting a substrate in an elevated position thereover; a light source for directing a beam of light upon a reflective upper surface of the substrate; and a light sensor for detecting a reflected beam of light from the upper surface of the substrate upon the substrate being aligned in a predetermined elevated position.
摘要翻译：本文提供了用于检测腔室中基底的适当位置的方法和装置的实施例。在一些实施例中，基板位置检测装置包括具有多个提升销的基板支撑件，用于将基板支撑在其上的升高位置; 用于将光束引导到所述基板的反射上表面上的光源; 以及光传感器，用于在基板在预定的升高位置对准时检测来自基板的上表面的反射光束。

2. 发明授权

US08503497B2 Protection device for solid state laser 有权
标题翻译：固态激光器保护装置
公开(公告)号：US08503497B2
公开(公告)日：2013-08-06
申请号：US13323278
申请日：2011-12-12
申请人： Oleg Serebryanov , Alexander Goldin , Abhilash J. Mayur , Leonid M. Tertitski
发明人： Oleg Serebryanov , Alexander Goldin , Abhilash J. Mayur , Leonid M. Tertitski
IPC分类号： H01S3/00
CPC分类号： H01S3/0014 , B23K26/0626 , B23K26/354 , H01S3/10038
摘要： Embodiments provide systems, devices, and methods for controlling a laser. The system includes a controller to control a laser, a ramp generator to ramp down laser power, the ramp generator electrically coupled with the controller and coupleable with the laser, and a hardware protection system electrically coupled with the ramp generator, wherein the ramp generator monitors signals sent from the controller and the hardware protection system to the ramp generator to detect signal failure and ramps down the laser power upon signal failure detection. The method includes sending a control status signal from a controller for a laser to a ramp generator, monitoring the control status signal for missing pulses, sending a hardware interlock status signal from a hardware protection system to the ramp generator, monitoring the hardware interlock status signal for signal failure, and ramping down laser power upon detection of missing pulses or signal failure.
摘要翻译：实施例提供了用于控制激光器的系统，装置和方法。该系统包括控制激光器的控制器，降低激光功率的斜坡发生器，与控制器电耦合并与激光器耦合的斜坡发生器以及与斜坡发生器电耦合的硬件保护系统，其中斜坡发生器监视从控制器和硬件保护系统发送到斜坡发生器的信号，以在信号故障检测时检测信号故障并降低激光功率。该方法包括将控制状态信号从用于激光的控制器发送到斜坡发生器，监视用于丢失脉冲的控制状态信号，从硬件保护系统向斜坡发生器发送硬件互锁状态信号，监视硬件互锁状态信号用于信号故障，并且在检测到丢失的脉冲或信号故障时降低激光功率。

3. 发明授权

US07030387B2 Continuous moisture getter for solid state detector 失效
标题翻译：用于固态检测器的持续吸湿剂
公开(公告)号：US07030387B2
公开(公告)日：2006-04-18
申请号：US10274190
申请日：2002-10-18
申请人： Oleg Serebryanov , Michael Petrillo , Sorin Cora
发明人： Oleg Serebryanov , Michael Petrillo , Sorin Cora
IPC分类号： G01T1/24 , G01N23/00
CPC分类号： G01T1/1648
摘要： A nuclear camera system (10) includes a gantry (22, 23) disposed about an examination region (17) having detector heads (15 a,b,c) mounted to the gantry. The detector heads (15) include an enclosure (30, 34, 54, 56) defining a volume (61). A plurality of solid state detectors (40) are arranged in an array (36) within the enclosure volume. A first cold plate (46) is in thermally conductive contact with the plurality of solid state detectors. A first Peltier cooler (50) is in thermally conductive contact with the first cold plate, the first Peltier cooler provides for cooling the plurality of detectors in the array. A second cold plate (47) is located within the enclosure and is thermally insulated from first cold plate. A second Peltier cooler (52) is in thermally conductive contact with the second cold plate, the second Peltier cooler for removing moisture from the volume (61). A heat sink (56) is in thermally conductive contact with the first and second Peltier coolers. A sensor (64, 66, 68, 75) is in operative relationship with the detector head. The sensor (75) provides a signal indicative of an environmental condition within the interior volume of the detector head. A controller (24) is controllably connected to the sensor. The controller determines a modification, modification in response to the sensor signal, to a selected environmental condition within the interior volume of the detector head and provides a control instruction for the modification. An actuator (52, 66, 73) is in operative relationship with the interior volume of the detector and is controllably connected to the controller. The actuator implements a control instruction from the controller for modifying the selected condition within the detector head.
摘要翻译：核相机系统（10）包括设置在具有安装到台架的检测器头（15a，b，c）的检查区域（17）周围的台架（22,23）。检测器头（15）包括限定容积（61）的外壳（30,34,54,56）。多个固态检测器（40）被布置在外壳体内的阵列（36）中。第一冷板（46）与多个固态检测器导热接触。第一珀尔帖冷却器（50）与第一冷板导热接触，第一珀尔帖冷却器用于冷却阵列中的多个检测器。第二冷板（47）位于外壳内并与第一冷板热绝缘。第二珀尔帖冷却器（52）与第二冷板导热接触，第二珀尔帖冷却器用于从体积（61）中除去水分。散热片（56）与第一和第二珀耳帖冷却器导热接触。传感器（64,66,68,75）与检测器头处于操作关系。传感器（75）提供指示检测器头部的内部空间内的环境状况的信号。控制器（24）可控地连接到传感器。控制器将响应于传感器信号的修改修改为在检测器头的内部体积内的选定环境条件，并提供用于修改的控制指令。致动器（52,66,73）与检测器的内部容积具有操作关系，并且可控地连接到控制器。致动器实现来自控制器的控制指令，用于修改检测器头内的选定状态。

4. 发明授权

US08878461B2 Lamp failure detector 有权
标题翻译：灯泡故障检测器
公开(公告)号：US08878461B2
公开(公告)日：2014-11-04
申请号：US13174608
申请日：2011-06-30
申请人： Oleg Serebryanov , Alexander Goldin
发明人： Oleg Serebryanov , Alexander Goldin
IPC分类号： H05B37/02 , H05B37/03
CPC分类号： H05B37/036 , H05B37/038
摘要： Apparatus and methods for detecting lamp failure in a rapid thermal processing (RTP) tool are provided. Lamp failure detection systems are provided that can accommodate DC and/or AC voltages. The systems sample voltage signals along a circuit path formed by at least two serially connected lamps, calculate a voltage drop across the first lamp of the at least two serially connected lamps based on the sampled voltage signals, and determine whether a lamp failure has occurred based on a relationship between the voltage drop across the first lamp and a total voltage applied to the circuit path.
摘要翻译：提供了一种用于在快速热处理（RTP）工具中检测灯泡故障的装置和方法。提供可以适应直流和/或交流电压的灯故障检测系统。所述系统沿着由至少两个串联连接的灯形成的电路路径采样电压信号，基于所采样的电压信号计算出至少两个串联灯的第一灯两端的电压降，并确定是否已经发生灯故障关于第一灯上的电压降与施加到电路路径的总电压之间的关系。

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