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1. 发明授权

US07830495B2 Lithographic apparatus and position sensor 有权
标题翻译：平版印刷设备和位置传感器
公开(公告)号：US07830495B2
公开(公告)日：2010-11-09
申请号：US11822867
申请日：2007-07-10
申请人： Olaf Hubertus Wilhelmus Van Bruggen , Marcel Koenraad Marie Baggen , Johannes Roland Dassel , Remko Wakker , Stoyan Nihtianov , Frank Auer , Frits Van Der Meulen , Patrick David Vogelsang , Martinus Cornelis Reijnen , Tom Van Zutphen
发明人： Olaf Hubertus Wilhelmus Van Bruggen , Marcel Koenraad Marie Baggen , Johannes Roland Dassel , Remko Wakker , Stoyan Nihtianov , Frank Auer , Frits Van Der Meulen , Patrick David Vogelsang , Martinus Cornelis Reijnen , Tom Van Zutphen
IPC分类号： G03B27/42 , G01B7/14
CPC分类号： G03F7/70758 , G01D5/145 , G01D5/2451 , G03F7/70775
摘要： A lithographic apparatus having a stationary magnet motor to drive a support such as a substrate support or a patterning device support, may be provided with a measurement system to measure a position of the support in question, e.g., to provide a safety system to prevent a collision of the support with another part. The measurement system may be configured to measure a magnetic field strength of an alternating magnetic field generated by the magnet assembly of the stationary magnet motor, and/or measure generation of eddy currents in a metallic layer shielding the magnet assembly in combination with an inductance measurement of an electromagnet generating the alternating magnetic field causing the eddy currents, and/or measure light using an optical position sensitive sensor such as a CCD metric or linear photodiode positioned in a light plane emitted by an emitter.
摘要翻译：具有用于驱动诸如衬底支撑件或图案形成装置支撑件的支撑件的固定磁体电动机的光刻设备可以设置有测量系统以测量所讨论的支撑件的位置，例如提供安全系统以防止支撑与另一部分的碰撞。测量系统可以被配置为测量由固定磁体电动机的磁体组件产生的交变磁场的磁场强度，和/或测量金属层中产生的涡流，屏蔽磁体组件与电感测量产生导致涡流的交变磁场的电磁体，和/或使用位于由发射器发射的光平面中的CCD度量或线性光电二极管的光学位置敏感传感器来测量光。

2. 发明申请

US20090015246A1 Lithographic apparatus and position sensor 有权
标题翻译：平版印刷设备和位置传感器
公开(公告)号：US20090015246A1
公开(公告)日：2009-01-15
申请号：US11822867
申请日：2007-07-10
申请人： Olaf Hubertus Wilhelmus Van Bruggen , Frank Auer , Marcel Koenraad Marie Baggen , Frits Van Der Meulen , Patrick David Vogelsang , Martinus Cornelis Reijnen , Johannes Roland Dassel , Stoyan Nihtianov , Remko Wakker , Tom Van Zutphen
发明人： Olaf Hubertus Wilhelmus Van Bruggen , Frank Auer , Marcel Koenraad Marie Baggen , Frits Van Der Meulen , Patrick David Vogelsang , Martinus Cornelis Reijnen , Johannes Roland Dassel , Stoyan Nihtianov , Remko Wakker , Tom Van Zutphen
IPC分类号： G03B27/42 , G01B7/14
CPC分类号： G03F7/70758 , G01D5/145 , G01D5/2451 , G03F7/70775
摘要： A lithographic apparatus having a stationary magnet motor to drive a support such as a substrate support or a patterning device support, may be provided with a measurement system to measure a position of the support in question, e.g., to provide a safety system to prevent a collision of the support with another part. The measurement system may be configured to measure a magnetic field strength of an alternating magnetic field generated by the magnet assembly of the stationary magnet motor, and/or measure generation of eddy currents in a metallic layer shielding the magnet assembly in combination with an inductance measurement of an electromagnet generating the alternating magnetic field causing the eddy currents, and/or measure light using an optical position sensitive sensor such as a CCD metric or linear photodiode positioned in a light plane emitted by an emitter.
摘要翻译：具有用于驱动诸如衬底支撑件或图案形成装置支撑件的支撑件的固定磁体电动机的光刻设备可以设置有测量系统以测量所讨论的支撑件的位置，例如提供安全系统以防止支撑与另一部分的碰撞。测量系统可以被配置为测量由固定磁体电动机的磁体组件产生的交变磁场的磁场强度，和/或测量金属层中产生的涡流，屏蔽磁体组件与电感测量产生导致涡流的交变磁场的电磁体，和/或使用位于由发射器发射的光平面中的CCD度量或线性光电二极管的光学位置敏感传感器来测量光。

3. 发明授权

US5822514A Method and device for processing signals in a protection system 失效
标题翻译：用于在保护系统中处理信号的方法和装置
公开(公告)号：US5822514A
公开(公告)日：1998-10-13
申请号：US676194
申请日：1996-07-17
申请人： Hendrik Christian Steinz , Johannes Roland Dassel
发明人： Hendrik Christian Steinz , Johannes Roland Dassel
IPC分类号： G06F11/18 , G05B9/02 , G05B23/02 , G06F11/16 , G06F11/00
CPC分类号： G06F11/1497
摘要： A method and system for processing signals in a protection system involves executing operations on signals that are complimentary to each other, such that the results of the operations determines whether the operations can be continued. Logic operations are performed and controlled variables, and complimentary operations are performed and controlled by state machines which trigger one another, to configure the system as a "house of cards" architecture, such that the entire correct functioning of the system of cooperating state machines is disabled when something goes wrong with one of the state machines. The complimentary operations executed are logic transformations, belonging to the class of LAOS/LOAS transformation, and each time one logic transformation is executed on logic variables during one operation, the logic operations complimentary to the transformation is executed on the inverted variables during the other operation, in order that the operating result in the cycles is the inverse of the corresponding other operating result in the cycles.
摘要翻译： PCT No.PCT / NL95 / 00354 Sec。 371日期：1996年7月17日 102（e）日期1996年7月17日PCT提交1995年10月16日PCT公布。公开号WO96 / 16369 日期1996年5月30日在保护系统中处理信号的方法和系统涉及对彼此互补的信号执行操作，使得操作结果确定操作是否可以继续。执行逻辑操作和控制变量，并且互补操作由彼此触发的状态机执行和控制，将系统配置为“卡的房屋”架构，使得协作状态机系统的整个正确功能是一个状态机出现问题时禁用。执行的补充操作是属于LAOS / LOAS变换类的逻辑变换，并且每次在一个操作期间对逻辑变量执行一个逻辑变换时，在其他操作期间对反转的变量执行与变换相互补充的逻辑运算，以便循环中的运行结果与循环中相应的其他运行结果相反。

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