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1. 发明授权

US09856140B2 Substrate plate for MEMS devices 有权
公开(公告)号：US09856140B2
公开(公告)日：2018-01-02
申请号：US14512105
申请日：2014-10-10
申请人： OCE-TECHNOLOGIES B.V.
发明人： Maikel A. J. Huygens , René J. Van Der Meer , Reinier Pannekoek , Alex N. Westland
IPC分类号： G01R31/02 , B81C99/00 , B81B7/00 , B81C1/00 , G01R31/26 , H05K1/11 , B41J2/14 , B41J2/16 , H05K1/02
CPC分类号： B81C99/004 , B41J2/14233 , B41J2/161 , B41J2/1632 , B41J2/1635 , B41J2002/14241 , B41J2002/14459 , B41J2002/14491 , B81B7/007 , B81B2201/052 , B81B2207/03 , B81C1/00301 , G01R31/02 , G01R31/2601 , H05K1/0268 , H05K1/111 , H05K2201/09372
摘要： A substrate plate is provided for at least one MEMS device to be mounted thereon. The MEMS device has a certain footprint on the substrate plate, and the substrate plate has a pattern of electrically conductive leads to be connected to electric components of the MEMS device. The pattern forms contact pads within the footprint of the MEMS device and includes at least one lead structure that extends on the substrate plate outside of the footprint of the MEMS device and connects a number of the contact pads to an extra contact pad. The lead structure is a shunt bar that interconnects a plurality of contact pads of the MEMS device and is arranged to be removed by means of a dicing cut separating the substrate plate into a plurality of chip-sized units. At least a major part of the extra contact pad is formed within the footprint of one of the MEMS devices.

2. 发明授权

US09056471B2 Method of forming a nozzle of a fluid ejection device 有权
标题翻译：形成流体喷射装置的喷嘴的方法
公开(公告)号：US09056471B2
公开(公告)日：2015-06-16
申请号：US14039587
申请日：2013-09-27
申请人： OCE TECHNOLOGIES B.V.
发明人： David D. L. Wijngaards , Alex N. Westland , Hendrikus J. M. Freriks , René J. Van Der Meer , Maikel A. J. Huygens , Hubertus M. J. M. Boesten
IPC分类号： B41J2/14 , B44C1/22 , B41J2/16
CPC分类号： B41J2/1629 , B41J2/162
摘要： A method of forming a nozzle of a fluid ejection device, the nozzle having a straight mouth portion and a cavity portion, wherein the mouth portion is formed in a bottom surface of the substrate, and, after passivating the walls of the mouth portion, a wet etch process is applied from the bottom surface of the substrate for forming a part of the cavity portion with walls that diverge from the mouth portion, characterized in that a wet etch process is also applied from a top surface of the substrate for forming a part of the cavity portion which diverges towards the bottom surface and merges with the part that is etched from the bottom surface.
摘要翻译：一种形成流体喷射装置的喷嘴的方法，所述喷嘴具有直嘴部分和空腔部分，其中所述嘴部形成在所述基板的底表面中，并且在钝化所述口部的壁之后，从衬底的底表面施加湿蚀刻工艺，以形成具有从口部分开的壁的腔部分的一部分，其特征在于，还从衬底的顶表面施加湿蚀刻工艺以形成部件的空腔部分朝向底表面分叉并与从底表面蚀刻的部分合并。

3. 发明授权

US08807711B2 Ink jet print head with piezoelectric actuator 有权
标题翻译：具有压电执行器的喷墨打印头
公开(公告)号：US08807711B2
公开(公告)日：2014-08-19
申请号：US13839762
申请日：2013-03-15
申请人： OCE-Technologies B.V.
发明人： Igor O. Shklyarevskiy , Alex N. Westland
IPC分类号： B41J2/045 , B41J2/14
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2002/14241
摘要： An ink jet print head, having a pressure generation chamber arranged for being in communication with a print head nozzle and an actuator membrane for delimiting the pressure generation chamber. The actuator membrane has a substrate and a piezoelectric actuator provided on the substrate, said piezoelectric actuator having a lower electrode, an upper electrode and at least one piezoelectric layer arranged between the lower electrode and the upper electrode; the substrate and the upper electrode are arranged on opposite sides of the piezoelectric layer, and the upper electrode has a Titanium-Tungsten film.
摘要翻译：一种喷墨打印头，具有布置成与打印头喷嘴连通的压力产生室和用于限定压力产生室的致动器膜。致动器膜具有基板和设置在基板上的压电致动器，所述压电致动器具有下电极，上电极和布置在下电极和上电极之间的至少一个压电层; 基板和上电极配置在压电层的相对侧，上电极具有钛 - 钨膜。

4. 发明授权

US09925769B2 MEMS chip and method of manufacturing a MEMS chip 有权
公开(公告)号：US09925769B2
公开(公告)日：2018-03-27
申请号：US15174275
申请日：2016-06-06
申请人： OCE-TECHNOLOGIES B.V.
发明人： Hans Reinten , Hendrik J. Stolk , Alex N. Westland
IPC分类号： B41J2/14 , H01L23/00 , B41J2/16 , B81C1/00
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2002/14362 , B81C1/00269 , B81C2201/0143 , B81C2203/032 , H01L24/03
摘要： A MEMS chip having at least two chip components bonded together by means of an adhesive layer that is applied to at least one of two mating bonding surfaces of the two components, wherein a pattern of finely distributed micro-cavities is formed in at least one of the two mating bonding surfaces, said micro-cavities being arranged to accommodate a major part of the adhesive.

5. 发明授权

US09216577B2 Droplet ejection device 有权
标题翻译：滴液喷射装置
公开(公告)号：US09216577B2
公开(公告)日：2015-12-22
申请号：US14563501
申请日：2014-12-08
申请人： OCE-TECHNOLOGIES B.V.
发明人： Hendrik J. Stolk , Alex N. Westland , Hans Reinten
IPC分类号： B41J2/14
CPC分类号： B41J2/1433 , B41J2002/14475 , B41J2202/07
摘要： A droplet ejection device includes a pressure chamber; a nozzle orifice arranged in fluid connection with the pressure chamber; an actuator system for generating a pressure wave in a liquid present in the pressure chamber; and an obstruction member arranged in the pressure chamber in a position opposite to the nozzle orifice. The obstruction member comprises a first surface facing the nozzle orifice and rigidly coupled to a wall of the pressure chamber via a support. The support is arranged near the first surface of the obstruction member. The droplet ejection device according to the present invention may further comprise a structured nozzle inflow means which provides a gradual transition from the hollow shaped liquid passage to the nozzle orifice. The droplet ejection device prevents or at least mitigates air entrapment in dead volumes present in the interior of the droplet ejection device.
摘要翻译：液滴喷射装置包括压力室; 布置成与所述压力室流体连接的喷嘴孔; 用于在存在于压力室中的液体中产生压力波的致动器系统; 以及阻塞构件，其布置在所述压力室中与所述喷嘴孔相对的位置。阻塞构件包括面向喷嘴孔口的第一表面，并且经由支撑件刚性地联接到压力室的壁。支撑件设置在阻塞构件的第一表面附近。根据本发明的液滴喷射装置还可以包括结构化的喷嘴流入装置，其提供从中空形状的液体通道到喷嘴孔的逐渐过渡。液滴喷射装置防止或至少减轻存在于液滴喷射装置内部的死体积中的空气滞留。

6. 发明授权

US08899732B2 Inkjet print head having a pivotably supported membrane and method for manufacturing such a print head 有权
标题翻译：具有可枢转支撑的膜的喷墨打印头和用于制造这种打印头的方法
公开(公告)号：US08899732B2
公开(公告)日：2014-12-02
申请号：US14279583
申请日：2014-05-16
申请人： OCE-Technologies B.V.
发明人： Hans Reinten , Alex N. Westland , René´ J. Van Der Meer
IPC分类号： B41J2/045 , B41J2/14 , B41J2/16
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2/1607 , B41J2002/14241 , B41J2002/1437 , Y10T29/49401
摘要： A print head comprises a pressure chamber in fluid communication with a nozzle and an actuator structure in operative communication with the pressure chamber for generating a pressure wave in the pressure chamber. The actuator structure comprises a membrane, wherein a first surface of the membrane forms a flexible wall of the pressure chamber and a piezo actuator, wherein the piezo actuator is arranged on a second surface of the membrane, the second surface being opposite of the first surface, such that the membrane is deformed at the position of the piezo actuator upon actuation of the piezo actuator. In the print head, the membrane is pivotably clamped between a first structure layer and a second structure layer such that the membrane pivots at the location of clamping upon deformation of the membrane due to actuation of the piezo actuator.
摘要翻译：打印头包括与喷嘴流体连通的压力室和与压力室可操作地连通的致动器结构，用于在压力室中产生压力波。致动器结构包括膜，其中膜的第一表面形成压力室的柔性壁和压电致动器，其中压电致动器布置在膜的第二表面上，第二表面与第一表面相对使得当压电致动器致动时，膜在压电致动器的位置处变形。在打印头中，膜可枢转地夹紧在第一结构层和第二结构层之间，使得膜由于压电致动器的致动而在膜的变形时在夹紧位置枢转。

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