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1. 发明公开

US20240234083A9 BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, AND ADJUSTMENT METHOD FOR BEAM DETECTOR 审中-公开
公开(公告)号：US20240234083A9
公开(公告)日：2024-07-11
申请号：US18461180
申请日：2023-09-05
申请人： NuFlare Technology, Inc.
发明人： Yasutaka SATO , Hironori MIZOGUCHI , Toru HINATA , Toshiki KIMURA , Kiminobu AKENO
IPC分类号： H01J37/244 , H01J37/09 , H01J37/317
CPC分类号： H01J37/244 , H01J37/09 , H01J37/3174 , H01J2237/0451 , H01J2237/1501 , H01J2237/24564
摘要： In one embodiment, a beam detector includes a first aperture plate including a first passage hole, a second aperture plate including a second passage hole that allows a single detection target beam passing through the first passage hole to pass therethrough, and a sensor detecting a beam current of the detection target beam passing through the second passage hole. The second aperture plate includes an electrically conductive material, a plurality of third passage holes are formed around the second passage hole, and the plurality of third passage holes allow light to pass therethrough.

2. 发明公开

US20240136148A1 BEAM DETECTOR, MULTI-CHARGED-PARTICLE-BEAM IRRADIATION APPARATUS, AND ADJUSTMENT METHOD FOR BEAM DETECTOR 审中-公开
公开(公告)号：US20240136148A1
公开(公告)日：2024-04-25
申请号：US18461180
申请日：2023-09-04
申请人： NuFlare Technology, Inc.
发明人： Yasutaka SATO , Hironori MIZOGUCHI , Toru HINATA , Toshiki KIMURA , Kiminobu AKENO
IPC分类号： H01J37/244 , H01J37/09 , H01J37/317
CPC分类号： H01J37/244 , H01J37/09 , H01J37/3174 , H01J2237/0451 , H01J2237/1501 , H01J2237/24564
摘要： In one embodiment, a beam detector includes a first aperture plate including a first passage hole, a second aperture plate including a second passage hole that allows a single detection target beam passing through the first passage hole to pass therethrough, and a sensor detecting a beam current of the detection target beam passing through the second passage hole. The second aperture plate includes an electrically conductive material, a plurality of third passage holes are formed around the second passage hole, and the plurality of third passage holes allow light to pass therethrough.

3. 发明申请

US20150325407A1 CHARGED PARTICLE BEAM WRITING APPARATUS, AND METHOD FOR DETECTING IRREGULARITIES IN DOSE OF CHARGED PARTICLE BEAM 有权
标题翻译：充电颗粒光束写字装置，以及用于检测充电颗粒光束剂量不正常的方法
公开(公告)号：US20150325407A1
公开(公告)日：2015-11-12
申请号：US14709200
申请日：2015-05-11
申请人： NUFLARE TECHNOLOGY, INC.
发明人： Hironori MIZOGUCHI , Hideo INOUE
IPC分类号： H01J37/244 , H01J37/317
CPC分类号： H01J37/244 , H01J37/045 , H01J37/3174 , H01J2237/24514 , H01J2237/24535 , H01J2237/31776
摘要： A charged particle beam writing apparatus includes a first limiting aperture member, in which a first opening is formed, to block a charged particle beam having been blanking-controlled to be beam “off”, and to let a part of the charged particle beam having been blanking-controlled to be beam “on” pass through the first opening, a first detector to detect a first electron amount irradiating the first limiting aperture member, in a state were beam “on” and beam “off” are repeated, a first integration processing unit to generate a first integrated signal by integrating components in a band sufficiently lower than a band of a repetition cycle of beam “on” and beam “off”, in a first detected signal detected for obtaining the first electron amount, and a first irregularity detection unit to detect irregularity in a dose amount of the charged particle beam by using the first integrated signal.
摘要翻译：一种带电粒子束写入装置包括：第一限制孔径构件，其中形成有第一开口，以阻挡被消隐控制的带电粒子束以使其“离开”，并且使带电粒子束的一部分具有被消隐控制为通过第一开口的光束“开”，用于检测在第一限制光圈部件中照射第一限制光圈部件的第一检测器处于反光的状态，并且反射光束“关”，第一检测器积分处理单元，用于通过在被检测以获得第一电子量的第一检测信号中积分足够低于波束“开”的重复周期的波段和波束“截止”的波段的分量的分量来产生第一积分信号，以及第一不规则检测单元，通过使用第一积分信号来检测带电粒子束的剂量的不均匀性。

4. 发明申请

US20160093466A1 METHOD FOR CORRECTING DRIFT OF ACCELERATING VOLTAGE, METHOD FOR CORRECTING DRIFT OF CHARGED PARTICLE BEAM, AND CHARGED PARTICLE BEAM WRITING APPARATUS 有权
标题翻译：用于校正加速电压的方法，用于校正充电颗粒束的转移的方法和充电的粒子束写入装置
公开(公告)号：US20160093466A1
公开(公告)日：2016-03-31
申请号：US14838848
申请日：2015-08-28
申请人： NuFlare Technology, Inc.
发明人： Hironori MIZOGUCHI
IPC分类号： H01J37/244 , H01J37/24 , H01J37/317 , H01J37/21
CPC分类号： H01J37/3174 , H01J37/21 , H01J37/241 , H01J37/28 , H01J37/304 , H01J2237/3045 , H01J2237/30461 , H01J2237/31776
摘要： A method for correcting a drift of an accelerating voltage includes measuring, after a position of a focus of a charged particle beam has been adjusted based on a first adjustment value and a predetermined time period has passed, a second adjustment value when the position of the focus of the charged particle beam is newly adjusted, calculating a deviation amount between the first adjustment value and the second adjustment value, calculating, using a correlation stored in a storage device, a correction value of an accelerating voltage to be applied to a beam source which emits the charged particle beam, where the correction value corresponds to the deviation amount, and correcting the accelerating voltage to be applied to the beam source, by using the correlation value.
摘要翻译：一种用于校正加速电压的漂移的方法包括：在基于第一调整值和预定时间段已经调整带电粒子束的焦点的位置之后，测量第二调整值，当位置重新调整带电粒子束的焦点，计算第一调整值和第二调整值之间的偏差量，使用存储在存储装置中的相关性来计算要施加到光束源的加速电压的校正值其发射带电粒子束，其中校正值对应于偏差量，并且通过使用相关值来校正要施加到束源的加速电压。

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