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1. 发明授权

US07894052B2 Optical defect inspection apparatus 有权
标题翻译：光学缺陷检查装置
公开(公告)号：US07894052B2
公开(公告)日：2011-02-22
申请号：US12705031
申请日：2010-02-12
申请人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
发明人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译：从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。每个平面镜的表面由激光照射而劣化，反射率降低。为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。因此，可以延长每个平面镜的使用寿命而不移动光轴。

2. 发明申请

US20090147246A1 OPTICAL DEFECT INSPECTION APPARATUS 有权
标题翻译：光学缺陷检测装置
公开(公告)号：US20090147246A1
公开(公告)日：2009-06-11
申请号：US12275746
申请日：2008-11-21
申请人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
发明人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译：从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。每个平面镜的表面由激光照射而劣化，反射率降低。为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。因此，可以在不移动光轴的情况下延长每个平面镜的使用寿命。

3. 发明申请

US20100141936A1 OPTICAL DEFECT INSPECTION APPARATUS 有权
标题翻译：光学缺陷检测装置
公开(公告)号：US20100141936A1
公开(公告)日：2010-06-10
申请号：US12705031
申请日：2010-02-12
申请人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
发明人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译：从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。每个平面镜的表面由激光照射而劣化，反射率降低。为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。因此，可以延长每个平面镜的使用寿命而不移动光轴。

4. 发明申请

US20110102781A1 OPTICAL DEFECT INSPECTION APPARATUS 审中-公开
标题翻译：光学缺陷检测装置
公开(公告)号：US20110102781A1
公开(公告)日：2011-05-05
申请号：US12985006
申请日：2011-01-05
申请人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
发明人： Noriyuki AIZAWA , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译：从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。每个平面镜的表面由激光照射而劣化，反射率降低。为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。因此，可以延长每个平面镜的使用寿命而不移动光轴。

5. 发明授权

US07746461B2 Optical defect inspection apparatus 有权
标题翻译：光学缺陷检查装置
公开(公告)号：US07746461B2
公开(公告)日：2010-06-29
申请号：US12275746
申请日：2008-11-21
申请人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
发明人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takahashi , Yusuke Miyazaki , Shingo Tanaka
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译：从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。每个平面镜的表面由激光照射而劣化，反射率降低。为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。因此，可以延长每个平面镜的使用寿命而不移动光轴。

6. 发明申请

US20070211241A1 Optical defect inspection apparatus 审中-公开
标题翻译：光学缺陷检查装置
公开(公告)号：US20070211241A1
公开(公告)日：2007-09-13
申请号：US11709873
申请日：2007-02-23
申请人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Yuuichiro Iijima , Kazuo Takahashi , Yusuke Miyazaki , Masayuki Hachiya , Koichi Asami , Shingo Tanaka
发明人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Yuuichiro Iijima , Kazuo Takahashi , Yusuke Miyazaki , Masayuki Hachiya , Koichi Asami , Shingo Tanaka
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. The useful life of each plane mirror can be prolonged without displacing the optical axis itself by overcoming the problem that when the laser beam is employed as the light source and a thin beam with a high illumination density is illuminated to the same position on each of the first and second plane mirrors for a long time, the surface of the plane mirror is deteriorated, the reflectance is reduced, and the light quantity cannot be held at a required level.
摘要翻译：从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。每个平面镜的表面由激光照射而劣化，反射率降低。为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。可以延长每个平面镜的使用寿命而不会使光轴本身移位，克服了当激光束被用作光源并且具有高照明密度的薄光束被照射到每个平面镜上的相同位置第一和第二平面镜长时间，平面镜的表面劣化，反射率降低，并且光量不能保持在要求的水平。

7. 发明申请

US20120182547A1 OPTICAL DEFECT INSPECTION APPARATUS 失效
标题翻译：光学缺陷检测装置
公开(公告)号：US20120182547A1
公开(公告)日：2012-07-19
申请号：US13433035
申请日：2012-03-28
申请人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takashi , Yusuke Miyazaki , Shingo Tanaka , Yuuichiro Iijima , Masayuki Hachiya , Rieko Hachiya , Koichi Asami
发明人： Noriyuki Aizawa , Hiroyuki Kawakami , Kazuhiro Zama , Kazuo Takashi , Yusuke Miyazaki , Shingo Tanaka , Yuuichiro Iijima , Masayuki Hachiya , Rieko Hachiya , Koichi Asami
IPC分类号： G01N21/89 , B66C1/42
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/9513 , G01N2021/95676 , H01L22/12
摘要： A laser beam oscillated from a laser source is folded in its path by first and second plane mirrors and enters a beam expander. The surface of each plane mirror is deteriorated with illumination by the laser beam and the reflectance is reduced. To avoid a light quantity of the laser beam entering the beam expander from being reduced below a reference value, when the laser beam is illuminated over a certain time, a position on each of the first and second plane mirrors at which the laser beam is illuminated is changed by a structure for rotating and/or translating a reflecting surface of each plane mirror on a plane, which includes the plane mirror, while an optical axis is kept same. Thus, the useful life of each plane mirror can be prolonged without displacing the optical axis.
摘要翻译：从激光源振荡的激光束在其路径中被第一和第二平面镜折叠并进入光束扩展器。每个平面镜的表面由激光照射而劣化，反射率降低。为了避免进入光束扩展器的激光束的光量减小到低于参考值，当在一定时间内照射激光束时，激光束被照亮的第一和第二平面镜中的每一个上的位置通过用于在包括平面镜的平面上旋转和/或平移每个平面镜的反射表面的结构改变，同时光轴保持相同。因此，可以延长每个平面镜的使用寿命而不移动光轴。

8. 发明授权

US07723709B2 Substrate holding apparatus, and inspection or processing apparatus 有权
标题翻译：基板保持装置，检查或处理装置
公开(公告)号：US07723709B2
公开(公告)日：2010-05-25
申请号：US11896291
申请日：2007-08-30
申请人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
IPC分类号： G01N21/86 , G01V8/00
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译：为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。

9. 发明授权

US07925390B2 Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space 有权
标题翻译：迷你环境仪器，检测仪器，制造设备及空间清洁方法
公开(公告)号：US07925390B2
公开(公告)日：2011-04-12
申请号：US11882063
申请日：2007-07-30
申请人： Takahiro Jingu , Yusuke Miyazaki , Kazuhiro Zama
发明人： Takahiro Jingu , Yusuke Miyazaki , Kazuhiro Zama
IPC分类号： B01L1/04 , G05D16/00
CPC分类号： F24F3/161 , F24F11/30 , F24F11/77 , F24F2110/00 , F24F2110/40
摘要： An outer dust collecting filter covers a casing an intake port and an outer fan flows air from an external environment into the casing via the outer dust collecting filter. A clean chamber has an intake port within the casing, an inner dust collecting filter for covering the intake port, and an inner fan for flowing the air within the casing. A control unit controls fan rotating speeds so that a measured pressure within the casing becomes higher at a set value than a measured pressure in the external environment, and a measured pressure within the clean chamber becomes higher at a set value than the measured pressure within the casing.
摘要翻译：外部集尘过滤器覆盖壳体进气口，外部风扇经由外部集尘过滤器将空气从外部环境流入外壳。清洁室具有壳体内的进气口，用于覆盖进气口的内部集尘过滤器和用于使空气在壳体内流动的内部风扇。控制单元控制风扇转速，使得壳体内的测量压力在外部环境中的测量压力的设定值以上变化，并且清洁室内的测量压力变得高于设定值内的测量压力套管。

10. 发明申请

US20100196127A1 SUBSTRATE HOLDING APPARATUS, AND INSPECTION OR PROCESSING APPARATUS 有权
标题翻译：基板控制装置，检查或处理装置
公开(公告)号：US20100196127A1
公开(公告)日：2010-08-05
申请号：US12754927
申请日：2010-04-06
申请人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
发明人： Kazuhiro Zama , Koichi Asami , Yusuke Miyazaki
IPC分类号： H01L21/68
CPC分类号： G01N21/9501 , G01N21/9506 , H01L21/68728
摘要： In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.
摘要翻译：为了实现基板的高精度定位和强压，本发明提供了一种基板保持装置，其包括：旋转台，其具有支撑基板的外周侧表面的下侧的倾斜面，该床在基板的法线与基板一起作为旋转轴; 位置限制单元，与旋转床一起旋转，并且在旋转之前通过在基板的外周侧表面的上侧按压圆周上的多个点将基板限制在旋转床上的预定位置; 以及与旋转床一起旋转的按压单元，并且通过在旋转期间按压基板的外周侧面的上侧的多个点，将基板压靠在倾斜面上。

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