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1. 发明授权

US5566244A Method of inspecting a workpiece surface including a picturing system with a shortened focal plane 失效
标题翻译：检查包括具有缩短的焦平面的图形系统的工件表面的方法
公开(公告)号：US5566244A
公开(公告)日：1996-10-15
申请号：US341083
申请日：1994-11-17
申请人： Norihide Kato , Kenichiro Mori , Tomohide Shimizu
发明人： Norihide Kato , Kenichiro Mori , Tomohide Shimizu
IPC分类号： G01N21/88 , G01N21/95 , G06T7/00 , G06K9/00
CPC分类号： G06T7/0004 , G01N21/88 , G01N2021/8887 , G01N21/9515 , G01N2201/102 , G06T2207/30156
摘要： A workpiece surface is measured to detect a defective portion with a projection and a depression on the workpiece surface by using an optical inspecting apparatus having a projector for radiating a detecting light towards the workpiece surface and a picturing device for receiving a reflected light from the workpiece surface. A reflected light from the workpiece surface is pictured in a condition in which a focal surface of the picturing device is positioned away from the workpiece surface to the side of the picturing device relative to an entire region of that effective inspecting range of the workpiece surface from which the picturing device can receive the reflected light. The defective portion on the workpiece surface is detected from a dark portion which appears on the image of the picturing device.
摘要翻译：通过使用具有用于向工件表面照射检测光的投影仪的光学检查装置和用于接收来自工件的反射光的图形装置来测量工件表面以检测具有突出部和工件表面上的凹陷的缺陷部分表面。来自工件表面的反射光在图像设备的焦点表面相对于工件表面的有效检测范围的整个区域远离工件表面到图形设备侧的状态下被描绘该图像装置可以接收反射光。从出现在图案的图像上的暗部检测工件表面上的缺陷部分。

2. 发明授权

US5379347A Method of inspecting the surface of a workpiece 失效
标题翻译：检查工件表面的方法
公开(公告)号：US5379347A
公开(公告)日：1995-01-03
申请号：US988420
申请日：1992-12-09
申请人： Norihide Kato , Tomohide Shimizu , Kenichiro Mori
发明人： Norihide Kato , Tomohide Shimizu , Kenichiro Mori
IPC分类号： G01N21/95 , G06T7/00 , G06K9/20
CPC分类号： G06T7/0004 , G01N21/9515 , G06T2207/20004 , G06T2207/20036 , G06T2207/30156
摘要： A method of inspecting a curved surface of a workpiece by a surface inspecting apparatus provided with a projecting device for illuminating the workpiece surface to be inspected with detection light, a detecting device for receiving and detecting the light reflected from the workpiece surface, and a condensing optical system for causing the reflected light to converge on a light-receiving surface of the detecting device. According to the method, the surface inspecting apparatus is successively displaced along the workpiece surface and the reflected light is detected by the detecting device. Further, image data obtained from the detecting device is held and binary digitized. It is determined whether or not the workpiece surface to be inspected is planar. If it is not planar, then the digitized image data is processed for dilation and erosion. Thus, when the workpiece surface is curved, faulty or defective spots can be reliably detected. If the workpiece surface is planar, the time required to process an image can be shortened.
摘要翻译：一种通过表面检查装置检查工件的曲面的方法，该表面检查装置具有用于用检测光照亮待检查的工件表面的突出装置，用于接收和检测从工件表面反射的光的检测装置和冷凝光学系统，用于使反射光会聚到检测装置的光接收表面上。根据该方法，表面检查装置沿着工件表面连续移位，并且检测装置检测反射光。此外，从检测装置获得的图像数据被保持二进制数字化。确定待检查的工件表面是否是平面的。如果不是平面的，则数字化图像数据被处理用于扩张和侵蚀。因此，当工件表面弯曲时，可以可靠地检测到故障或缺陷点。如果工件表面是平面的，则可以缩短处理图像所需的时间。

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