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    • 1. 发明授权
    • Charged particle guide apparatus and image viewing apparatus for charged
particle microscope using the same
    • 带电粒子引导装置和使用其的带电粒子显微镜的图像观察装置
    • US5811805A
    • 1998-09-22
    • US702183
    • 1996-08-23
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • H01J37/22H01J37/244H01J37/26
    • H01J37/22H01J37/244
    • An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.
    • 即使当结构以高速率变化时,也可以测量试样的原子结构,磁性结构,电结构等的移动速度或振动频率的电子显微镜图像观察装置。 该装置包括用于发射带电粒子的带电粒子源,用于用带电粒子束照射样本的照明电子透镜系统,用于放大由透射时散射的带电粒子形成的样本的图像的图像放大/投影透镜系统 通过样本并将放大图像投影到图像形成平面上,至少一个带电粒子提取装置,设置在图像放大/投影透镜系统的图像形成平面上,用于从带电粒子束的预定部分中取出带电粒子 投影到图像形成平面上的至少一个带电粒子检测器,用于检测通过带电粒子提取装置取出的带电粒子;以及信号处理装置,用于处理从带电粒子检测器输出的信号。
    • 8. 发明授权
    • Magnetic head flying slider assembly
    • 磁头浮动滑块组件
    • US4796126A
    • 1989-01-03
    • US904818
    • 1986-09-08
    • Hiroshi TsuchiyaYoshiakira KarakamaSadanori NagaikeHiroyasu NakajimaKousaku Chida
    • Hiroshi TsuchiyaYoshiakira KarakamaSadanori NagaikeHiroyasu NakajimaKousaku Chida
    • G11B5/31G11B5/60G11B21/21G11B5/187
    • G11B5/3106G11B5/6005
    • A thin film magnetic head comprises a flying slider and a thin film transducer. The flying slider is formed as a polygonal body having a first face constituting a flying face and a second face normal to the first face, on which second face the thin film magnetic transducer is formed. The flying slider is made of a material containing Al.sub.2 O.sub.3 -TiC as the main constituent thereof and on the flying face of the slider is formed Al.sub.2 O.sub.3 -TiO.sub.2. The flying face exhibits an improved sliding property, while enabling use of the excellent features of Al.sub.2 O.sub.3 -TiC in forming the thin film element as well as in machining the flying slider. The slider can be produced by subjecting the flying face of the slider made of a material containing Al.sub.2 O.sub.3 -TiC to a gas phase reaction with an oxygen containing gas. Alternatively, a portion of the flying face can be removed and a layer of Al.sub.2 O.sub.3 -TiO.sub.2 deposited upon the surface of the flying face.
    • 薄膜磁头包括飞行滑块和薄膜换能器。 飞行滑块形成为具有构成飞面的第一面和与第一面垂直的第二面的多边形体,第二面形成有薄膜磁换能器。 飞行滑块由以Al2O3-TiC为主要成分的材料制成,滑块的飞面形成Al2O3-TiO2。 飞面具有改善的滑动性能,同时能够在形成薄膜元件以及加工飞行滑块中使用Al2O3-TiC的优异特征。 可以通过使由含有Al 2 O 3 -TiC的材料制成的滑块的飞面与含氧气体进行气相反应来制造滑块。 或者,可以去除飞面的一部分并且沉积在飞面表面上的Al 2 O 3 -TiO层。