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    • 2. 发明授权
    • Semiconductor package
    • 半导体封装
    • US5068156A
    • 1991-11-26
    • US584092
    • 1990-09-18
    • Toshikazu Ogata
    • Toshikazu Ogata
    • H01L23/40H01L23/373H01L23/492
    • H01L23/4924H01L23/3735H01L2924/0002Y10T428/12528Y10T428/12535Y10T428/12611
    • A semiconductor package in which a ceramic substrate is joined to a copper stud by brazing. Between the substrate and the stud, first and second members are each fixed in place with a brazing material. The first member has a thermal expansion coefficient intermediate those of the copper stud and the ceramic substrate for reducing the thermal stress generated in the ceramic substrate. The second member prevents the ceramic substrate from being deformed by thermal stress. If the first member is, e.g., a Cu-W alloy used as the neck on the copper stud, it is possible to reduce the compressive stress generated in the ceramic substrate during cooling after the brazing. Further, the influence on the substrate by bimetallic deformation as a result of the combination of the copper stud and the Cu-W alloy is mitigated by a flexible second member, e.g., a copper foil. Thus, the ceramic substrate is brazed without involving any substantial stress thereon.
    • 一种半导体封装,其中通过钎焊将陶瓷基板连接到铜螺柱。 在基板和螺柱之间,第一和第二构件各自用钎焊材料固定就位。 第一部件具有与铜螺柱和陶瓷基板的热膨胀系数相等的热膨胀系数,用于降低在陶瓷基板中产生的热应力。 第二部件防止陶瓷基体由于热应力而变形。 如果第一构件是例如在铜螺柱上用作颈部的Cu-W合金,则可以减少在钎焊之后的冷却期间在陶瓷衬底中产生的压应力。 此外,通过铜柱和Cu-W合金的组合的结合,双金属变形对基板的影响通过诸如铜箔的柔性第二构件来减轻。 因此,陶瓷衬底被钎焊而不会对其施加任何显着的应力。