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    • 1. 发明授权
    • Method and apparatus for fabricating quantum dot functional structure, quantum dot functional structure, and optically functioning device
    • 用于制造量子点功能结构,量子点功能结构和光学功能器件的方法和装置
    • US06648975B2
    • 2003-11-18
    • US09784300
    • 2001-02-16
    • Nobuyasu SuzukiToshiharu MakinoYuka YamadaTakehito YoshidaTakafumi SetoNobuhiro Aya
    • Nobuyasu SuzukiToshiharu MakinoYuka YamadaTakehito YoshidaTakafumi SetoNobuhiro Aya
    • C23C1400
    • B82Y30/00B22F9/12B22F2998/00B22F2999/00B82Y10/00C23C14/06C23C14/228C23C14/28H01L33/0054B22F1/0018B22F2202/11
    • The present invention is to fabricate a quantum dot functional structure having ultra-fine particles homogeneously distributed in a transparent medium by efficiently fabricating high-purity ultra-fine particles having a single particle diameter and uniform structure and depositing the ultra-fine particles onto a substrate in conjunction with the transparent medium. For these purposes, an apparatus for fabricating a quantum dot functional structure is provided. The apparatus comprises: an ultra-fine particle generating chamber for generating high-purity ultra-fine particles by exciting a semiconductor target with pulsed laser light in a low-pressure rare gas atmosphere, and then by allowing the semiconductor target to be detached or ejected by ablation reaction and condensed and grown in the gas; an ultra-fine particle classifying chamber for classifying the ultra-file particles; a depositing chamber for depositing the high-purity semiconductor ultra-fine particles and the transparent medium by exciting a transparent medium target with excimer laser light at the same time or alternately when the high-purity semiconductor ultra-fine particles are collected onto the substrate, and by collecting the substance generated through ablation reaction onto the substrate; and a carrier gas exhaust system.
    • 本发明通过有效地制造具有单一粒径和均匀结构的高纯度超细颗粒,并将超细颗粒沉积到基底上,制造均匀分布在透明介质中的超细颗粒的量子点功能结构 与透明介质一起使用。 为了这些目的,提供了一种用于制造量子点功能结构的装置。 该装置包括:超细颗粒发生室,用于通过在低压稀有气体气氛中用脉冲激光激发半导体靶,然后通过使半导体靶被分离或喷射而产生高纯度超细颗粒 通过消融反应并在气体中冷凝和生长; 用于对超微粒子进行分类的超细粒子分级室; 用于通过同时激发具有准分子激光的透明介质靶或者当高纯度半导体超细颗粒被收集到基板上时交替沉积高纯度半导体超细颗粒和透明介质的沉积室, 并通过将通过消融反应产生的物质收集到基底上; 和载气排气系统。
    • 6. 发明授权
    • Particle counting method and particle counter
    • 粒子计数法和粒子计数器
    • US07145320B2
    • 2006-12-05
    • US10762308
    • 2004-01-23
    • Takehito YoshidaNobuyasu SuzukiToshiharu MakinoYuka Yamada
    • Takehito YoshidaNobuyasu SuzukiToshiharu MakinoYuka Yamada
    • G01N27/00G01N27/62
    • G01N15/0656
    • A particle counter counts particles in aerosol having a particle size of from 2 nm to 50 nm in an operating pressure range from an atmospheric pressure through a reduced pressure to a low vacuum and calculate a particle size distribution. The particle counter charges particles in the aerosol and applies an electrostatic field thereto, and mixes the aerosol with a non-charged sheath gas flow shaped like a laminar flow whereby the respective particles separate into traces depending on their particle size where they can be counted. Further, by using an electron multiplier for exciting cluster ions to detect the charged particles and operating it as a high-pass filter, even if the number density of the particles is small, it is possible to effectively count the particles.
    • 颗粒计数器在从大气压至减压至低真空的操作压力范围内,计算粒径为2nm至50nm的气溶胶中的颗粒,并计算出粒度分布。 颗粒计数器对气溶胶中的颗粒进行充电并对其施加静电场,并将气溶胶与形成为层流的非充电鞘气流混合,由此各个颗粒根据颗粒尺寸分离成痕迹,在那里它们可以被计数。 此外,通过使用电子倍增器激发簇离子来检测带电粒子并将其作为高通滤波器进行操作,即使粒子的数量密度小,也可以有效地计数粒子。