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    • 2. 发明授权
    • Magnetic recording head and method for manufacturing
    • 磁记录头及制造方法
    • US07333301B2
    • 2008-02-19
    • US10650832
    • 2003-08-29
    • Kimitoshi EtohNobuo YoshidaMoriaki FuyamaMakoto MorijiriKenichi MeguroIchiro OodakeKazue KudoYohji MaruyamaKatsuro Watanabe
    • Kimitoshi EtohNobuo YoshidaMoriaki FuyamaMakoto MorijiriKenichi MeguroIchiro OodakeKazue KudoYohji MaruyamaKatsuro Watanabe
    • G11B5/127
    • B82Y25/00B82Y10/00G11B5/3136G11B5/3909G11B5/3912Y10T29/49044
    • A thin-film magnetic head having little temperature rise in the element, good heat dissipation and a short magnetic path length (narrow coil pitch) and manufacturing method for same is provided. To form the coil of the thin-film magnetic head, a lower coil is first formed and after forming alumina and an inorganic compound containing alumina, a trench is formed for the upper coil by reactive ion etching. The lower coil allows uniform etching at this time and functions as a film to prevent loading effects occurring during reactive ion etching. This trench is then plated in copper and chemical mechanical planarization performed to form the upper layer coil as the dual-layer coil of the present invention. Heat from the coil is efficiently radiated towards the substrate by alumina and an inorganic compound containing alumina with good heat propagation. The ratio of alumina or inorganic compound containing alumina in the lower coil can be selected by reactive ion etching so that an upper coil trench functioning as an etching stopper can be securely formed to allow forming a stable coil film thickness and a short magnetic path length.
    • 提供元件温度上升较小,散热好,磁路长度短(窄线圈间距)及其制造方法的薄膜磁头。 为了形成薄膜磁头的线圈,首先形成下线圈,在形成氧化铝和含有氧化铝的无机化合物之后,通过反应离子蚀刻形成用于上部线圈的沟槽。 此时,下线圈允许均匀刻蚀,起到膜的作用,以防止在反应离子蚀刻期间发生的负载效应。 然后将该沟槽镀铜并进行化学机械平面化以形成上层线圈作为本发明的双层线圈。 来自线圈的热量通过氧化铝和含有良好热传播的氧化铝的无机化合物有效地朝向基板辐射。 可以通过反应离子蚀刻来选择下层线圈中的氧化铝或含有氧化铝的无机化合物的比例,从而可以可靠地形成用作蚀刻停止层的上部线圈沟槽,以形成稳定的线圈膜厚度和短的磁路长度。
    • 8. 发明申请
    • MAGNETIC HEAD HAVING A THERMAL FLY-HEIGHT CONTROL (TFC) STRUCTURE UNDER A FLAT LOWER SHIELD
    • 具有平坦下降的高温控制(TFC)结构的磁头
    • US20130141813A1
    • 2013-06-06
    • US13310428
    • 2011-12-02
    • Takashi WagatsumaYukimasa OkadaIchiro OodakeAtsushi Kato
    • Takashi WagatsumaYukimasa OkadaIchiro OodakeAtsushi Kato
    • G11B5/02G11B5/127B05D5/12
    • G11B5/607G11B5/3133
    • In one embodiment, a method includes forming a conducting material above an insulating film, applying a mask to portions of the conducting material in a shape of a TFC structure, removing exposed portions of the conducting material to form the TFC structure, depositing an insulating film above the TFC structure, and planarizing the insulating film to form a planar upper surface of the insulating film. In another embodiment, a magnetic head includes a TFC structure positioned between insulating films and a magnetic element positioned above the TFC structure, the TFC structure configured for providing localized thermal protrusion of the magnetic head on a media facing surface thereof, wherein an upper surface of an upper of the insulating films is planar, the magnetic element includes at least one of a main magnetic pole and a read sensor, and the TFC structure is configured for providing thermal protrusion of the magnetic element.
    • 在一个实施例中,一种方法包括在绝缘膜的上方形成导电材料,以TFC结构的形式对导电材料的部分施加掩模,去除导电材料的暴露部分以形成TFC结构,沉积绝缘膜 在TFC结构之上,并且平坦化绝缘膜以形成绝缘膜的平面上表面。 在另一个实施例中,磁头包括定位在绝缘膜和位于TFC结构之上的磁性元件之间的TFC结构,该TFC结构被配置用于在其面向介质的表面上提供磁头的局部热突出,其中, 绝缘膜的上部是平面的,磁性元件包括主磁极和读取传感器中的至少一个,并且TFC结构被配置为提供磁性元件的热突起。
    • 9. 发明授权
    • Magnetic head having a thermal fly-height control (TFC) structure under a flat lower shield
    • 在平面下屏蔽下具有热飞高控制(TFC)结构的磁头
    • US08760787B2
    • 2014-06-24
    • US13310428
    • 2011-12-02
    • Takashi WagatsumaYukimasa OkadaIchiro OodakeAtsushi Kato
    • Takashi WagatsumaYukimasa OkadaIchiro OodakeAtsushi Kato
    • G11B5/02
    • G11B5/607G11B5/3133
    • In one embodiment, a method includes forming a conducting material above an insulating film, applying a mask to portions of the conducting material in a shape of a TFC structure, removing exposed portions of the conducting material to form the TFC structure, depositing an insulating film above the TFC structure, and planarizing the insulating film to form a planar upper surface of the insulating film. In another embodiment, a magnetic head includes a TFC structure positioned between insulating films and a magnetic element positioned above the TFC structure, the TFC structure configured for providing localized thermal protrusion of the magnetic head on a media facing surface thereof, wherein an upper surface of an upper of the insulating films is planar, the magnetic element includes at least one of a main magnetic pole and a read sensor, and the TFC structure is configured for providing thermal protrusion of the magnetic element.
    • 在一个实施例中,一种方法包括在绝缘膜的上方形成导电材料,以TFC结构的形式对导电材料的部分施加掩模,去除导电材料的暴露部分以形成TFC结构,沉积绝缘膜 在TFC结构之上,并且平坦化绝缘膜以形成绝缘膜的平面上表面。 在另一个实施例中,磁头包括定位在绝缘膜和位于TFC结构之上的磁性元件之间的TFC结构,该TFC结构被配置用于在其面向介质的表面上提供磁头的局部热突出,其中, 绝缘膜的上部是平面的,磁性元件包括主磁极和读取传感器中的至少一个,并且TFC结构被配置为提供磁性元件的热突起。
    • 10. 发明申请
    • LOW CLEARANCE MAGNETIC HEAD HAVING A CONTACT DETECTION SENSOR
    • 具有接触检测传感器的低间隙磁头
    • US20130077189A1
    • 2013-03-28
    • US13247931
    • 2011-09-28
    • Atsushi KatoHideaki TanakaIchiro OodakeTakao Yonekawa
    • Atsushi KatoHideaki TanakaIchiro OodakeTakao Yonekawa
    • G11B5/56G01R27/08
    • G11B5/607G11B5/6076
    • According to one embodiment, a magnetic data system includes a magnetic disk medium, a magnetic head having a writer element and/or a reader element, an exothermic resistor element for thermal fly-height control (TFC), a contact detection sensor having a resistor element and at least one contact detection electrode, and an insulating film on a medium facing side of the magnetic head to protect the contact detection sensor, the insulating film having a thickness greater than the contact detection electrode, a drive mechanism for passing the magnetic disk medium over the magnetic head, and a controller electrically coupled to the magnetic head for controlling operation of the magnetic head, wherein the controller adjusts magnetic spacing between the magnetic head and the magnetic disk medium via thermal distortion of the exothermic resistor element. The contact detection sensor may be used as a second TFC resistor element.
    • 根据一个实施例,磁数据系统包括磁盘介质,具有写入器元件和/或读取器元件的磁头,用于热飞跃高度控制的放热电阻器元件(TFC),具有电阻器的接触检测传感器 元件和至少一个接触检测电极,以及在磁头的面向介质侧的绝缘膜,以保护接触检测传感器,绝缘膜的厚度大于接触检测电极;驱动机构,用于使磁盘 介质在磁头上,以及控制器,其电耦合到磁头用于控制磁头的操作,其中控制器通过放热电阻器元件的热失真来调节磁头和磁盘介质之间的磁间隔。 接触检测传感器可以用作第二TFC电阻元件。