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    • 10. 发明授权
    • Surface acoustic wave device and method for fabricating same
    • 表面声波装置及其制造方法
    • US5111100A
    • 1992-05-05
    • US637058
    • 1991-01-03
    • Osamu NoguchiKazuyoshi Sugai
    • Osamu NoguchiKazuyoshi Sugai
    • H03H3/08H03H9/02
    • H03H3/08H03H9/02566
    • A surface acoustic wave device is disclosed, by which it is possible to improve characteristics of a system suitable for suppressing narrow frequency band interference, which is useful for a spread spectrum communication system, and to increase the signal intensity at the detecting portion without changing characteristics of the filter portion.In a surface acoustic wave element, in a p conductivity type Si epitaxial layer 2 formed on a p+ conductivity type Si monocrystal substrate 1 the epitaxial layer on the siganl detecting portion is formed so as to be thinner than the other portion by means of a buried layer.In this way, even with a same intensity of the input signal at the transducer, the loss of SAW is reduced and as the result the intensity of the detected signal is increased.By the present invention it is possible to increase the signal intensity at the detecting portion without changing characteristics of the filter portion.
    • 公开了一种表面声波装置,通过该表面声波装置,可以改善适用于抑制窄频带干扰的系统的特性,这对于扩频通信系统是有用的,并且在不改变特性的情况下增加检测部分处的信号强度 的过滤器部分。 在表面声波元件中,在p +导电型Si单晶衬底1上形成的p型导电型Si外延层2中,通过掩模层形成siganl检测部分上的外延层比另一部分薄 。 以这种方式,即使在换能器处具有相同强度的输入信号,SAW的损耗也减小,结果是检测到的信号的强度增加。 通过本发明,可以在不改变过滤器部分的特性的情况下增加检测部分处的信号强度。