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1. 发明授权

US5597956A Capacitor type acceleration sensor 失效
标题翻译：电容式加速度传感器
公开(公告)号：US5597956A
公开(公告)日：1997-01-28
申请号：US516933
申请日：1995-08-18
申请人： Nobuhiro Ito , Tomio Shibano , Kaneo Yaji
发明人： Nobuhiro Ito , Tomio Shibano , Kaneo Yaji
IPC分类号： G01P15/125 , G01P15/13 , G01R27/26 , G01P15/00
CPC分类号： G01P15/131 , G01P15/125
摘要： A capacitor type acceleration sensor is disclosed. In this sensor, an acceleration sensing element 1 has two variable capacitors C1 and C2 that are constructed with a couple of fixed electrodes and a movable electrode located between the fixed electrodes. Electrostatic power generation/feedback means 15 applies to the fixed- and movable-electrode pairs such an electrostatic power as to set the movable electrode at a preset reference position in accordance with the output signal of capacitance-difference detector means 10. The electrostatic power is outputted as an output signal of the capacitor type acceleration sensor. In the capacitor type acceleration sensor, another fixed capacitor Cx of which the capacitance value Cx is larger than the maximum capacitance-difference between the variable capacitors C1 and C2 of which the capacitance values vary in accordance with an acceleration, is connected in parallel with the variable capacitor C2. The capacitance (C2+Cx) is larger than the capacitance of the variable capacitor C1, irrespective of the direction of acceleration.
摘要翻译：公开了一种电容式加速度传感器。在该传感器中，加速度感测元件1具有两个可变电容器C1和C2，它们由一对固定电极和位于固定电极之间的可动电极构成。根据电容差检测装置10的输出信号，静电发电/反馈装置15适用于固定电极对和可动电极对等静电电力，以将可动电极设定在预设的基准位置。静电功率作为电容式加速度传感器的输出信号输出。在电容式加速度传感器中，电容值Cx大于电容值根据加速度而变化的可变电容器C1和C2之间的最大电容差的另一固定电容器Cx与可变电容器C2。无论加速方向如何，电容（C2 + Cx）大于可变电容器C1的电容。

2. 发明授权

US6122962A Angular velocity detection element and angular velocity measuring device 失效
标题翻译：角速度检测元件和角速度测量装置
公开(公告)号：US6122962A
公开(公告)日：2000-09-26
申请号：US31980
申请日：1998-02-26
申请人： Shogo Yoshino , Mamoru Ishibe , Tomio Shibano
发明人： Shogo Yoshino , Mamoru Ishibe , Tomio Shibano
IPC分类号： G01C19/56 , G01C19/5755 , G01P9/04
CPC分类号： G01C19/5719
摘要： The angular velocity detection element includes: a substrate; a pair of spaced support bodies arranged on the substrate and having support-side electrodes that face each other; a movable body, disposed between the support bodies, having a pair of movable-side electrodes facing the support-side electrodes; and a vibration generator for vibrating the movable body in one direction. The support-side electrodes mounted on the support bodies and the movable-side electrodes that are mounted on the movable body are arranged such that the movable-side electrodes face the support-side electrodes. A pair of displacement detectors detect the displacement of the movable body in one direction when the vibration generator imparts a vibration in one direction to the movable body, and a pair of angular velocity detectors detect, as an angular velocity, a displacement perpendicular to the one direction in which the movable body vibrates when the angular velocity acts on the movable body.
摘要翻译：角速度检测元件包括：基板; 一对间隔开的支撑体，其布置在所述基板上并且具有彼此面对的支撑侧电极; 可移动体，设置在所述支撑体之间，具有面对所述支撑侧电极的一对可动侧电极; 以及用于在一个方向上振动可动体的振动发生器。安装在支撑体上的支撑侧电极和安装在可移动体上的可动侧电极被布置成使得可动侧电极面对支撑侧电极。一对位移检测器在振动发生器向可移动体向一个方向施加振动时检测可移动体在一个方向上的位移，并且一对角速度检测器检测作为角速度垂直于该移动体的位移当角速度作用在可移动体上时可移动体振动的方向。

3. 发明授权

US6070463A Angular velocity sensor 失效
标题翻译：角速度传感器
公开(公告)号：US6070463A
公开(公告)日：2000-06-06
申请号：US814834
申请日：1997-03-11
申请人： Kazufumi Moriya , Tomoyasu Hasegawa , Eiichi Takata , Tomio Shibano , Tetsuo Osawa
发明人： Kazufumi Moriya , Tomoyasu Hasegawa , Eiichi Takata , Tomio Shibano , Tetsuo Osawa
IPC分类号： G01C19/56 , G01C19/5755 , G01P9/04 , G01P3/02
CPC分类号： G01C19/5719
摘要： A downsized angular velocity sensor is disclosed in which the detection sensitivity is improved. An oscillator oscillatably supported by support beams along two horizontal axes is formed of two rod-like members extending along the Y axis and an interconnecting portion. A hollow region is formed between each of the rod-like members and the interconnecting portion. Displacement detecting sections are disposed in the hollow regions. The displacement detecting sections are each constructed of an antenna-like electrode array, so that a greater amount of change in capacitance generated between the antenna-like electrodes can be obtained.
摘要翻译：公开了一种小型角速度传感器，其中提高了检测灵敏度。沿着两个水平轴由支撑梁振荡地支撑的振荡器由沿着Y轴延伸的两个杆状构件和互连部分形成。在每个棒状构件和互连部分之间形成中空区域。位移检测部分设置在中空区域中。位移检测部分由天线状电极阵列构成，从而可以获得在天线状电极之间产生的更大量的电容变化。

4. 发明授权

US5895852A Angular velocity sensor 失效
标题翻译：角速度传感器
公开(公告)号：US5895852A
公开(公告)日：1999-04-20
申请号：US786236
申请日：1997-01-21
申请人： Kazufumi Moriya , Tomoyasu Hasegawa , Eiichi Takata , Tomio Shibano , Tetsuo Osawa
发明人： Kazufumi Moriya , Tomoyasu Hasegawa , Eiichi Takata , Tomio Shibano , Tetsuo Osawa
IPC分类号： B81B3/00 , G01C19/56 , G01C19/5755 , G01P3/44
CPC分类号： G01C19/5719
摘要： In an angular velocity sensor for sensing angular velocities about two axes or an X-axis and a Y-axis which are perpendicular to each other, a frame-shaped oscillator 26 is disposed to the respective support portions 24 fixed on a substrate 22 through support beams 25 and a columnar electrode 33 is disposed in the oscillator 26 by being fixed to the substrate 22 . X-axis displacement sensing units 31, 31 are formed on the right and left sides of the oscillator 26 and Y-axis displacement sensing units 32, 32 are formed to the forward and rearward sides thereof. When an oscillation drive signal is imposed between the oscillator 26 and the columnar electrode 33, an electrostatic attracting force is generated therebetween and the oscillator 26 is oscillated in a Z-axis direction. When an angular velocity .OMEGA.Y is imposed about the Y-axis at this time, the oscillator 26 is displaced to the X-axis by a Coriolis force and the displacement can be sensed by the X-axis displacement sensing units 31, whereas when an angular velocity .OMEGA.X is imposed about the X-axis, the oscillator 26 is displaced to the Y-axis by a Coriolis force and the displacement can be sensed by the Y-axis displacement sensing units 32, so that the angular velocities about the two axes or the X-axis and the Y-axis can be sensed, respectively.
摘要翻译：在用于感测围绕彼此垂直的两个轴或X轴和Y轴的角速度的角速度传感器中，框架形振荡器26通过支撑件设置到固定在基板22上的各个支撑部分24 光束25和柱状电极33通过固定到基板22而设置在振荡器26中。 X轴位移检测单元31,31形成在振动器26的左右两侧，并且Y轴位移检测单元32,32形成在其前侧和后侧。当在振荡器26和柱状电极33之间施加振荡驱动信号时，在其间产生静电吸引力，振荡器26在Z轴方向上振荡。此时，当关于Y轴施加角速度OMEGA Y时，振荡器26通过科里奥利力移位到X轴，并且位移可以由X轴位移检测单元31感测，而当关于X轴施加角速度OMEGA X，振荡器26通过科里奥利力移位到Y轴，并且可以通过Y轴位移检测单元32感测位移，使得围绕两轴的角速度可以分别检测轴或X轴和Y轴。

5. 发明授权

US5612494A Capacitance-type electrostatic servo acceleration sensor 失效
标题翻译：电容式静电伺服加速度传感器
公开(公告)号：US5612494A
公开(公告)日：1997-03-18
申请号：US575884
申请日：1995-12-20
申请人： Tomio Shibano
发明人： Tomio Shibano
IPC分类号： G01P15/125 , G01P15/13 , G01R27/26 , G01D15/125
CPC分类号： G01P15/131 , G01P15/125 , G01P2015/0828 , G01R27/2605
摘要： A capacitance-type electrostatic servo acceleration sensor capable of detecting applied acceleration with high sensitivity and with low error without needing an accurate oscillator. The sensor makes use of a PAM (pulse amplitude-modulation) circuit for performing pulse amplitude-modulation in proportion to the acceleration. The sensor is equipped with a capacitance-detecting portion having a movable electrode and a pair of fixed electrodes located on opposite sides of the movable electrode. The movable electrode is displaced in response to the acceleration. A comparator is formed by an operational amplifier, and a servomechanism is formed. The electrically obtained open gain of this operational amplifier is set sufficiently greater than the mechanically obtained gain of the capacitance-detecting portion. A measurement mode period and a force-balanced mode period are repeated alternately. During the measurement mode period, the movable electrode is not constrained by the servomechanism, and a voltage corresponding to the acceleration is applied to a sample-and-hold amplifier. During the force-balanced mode period, the movable electrode is constrained by the servomechanism according to the output from the sample-and-hold amplifier which corresponds to the acceleration, and the movable electrode is short-circuited to ground.
摘要翻译：一种电容型静电伺服加速度传感器，能够高灵敏度，低误差地检测加速度，而不需要精确的振荡器。传感器利用PAM（脉冲幅度调制）电路，与加速度成比例地进行脉冲幅度调制。该传感器具有电容检测部，该电容检测部具有位于可动电极的相对侧上的可动电极和一对固定电极。可移动电极响应于加速度而移位。比较器由运算放大器形成，并且形成伺服机构。该运算放大器的电气获得的开放增益被设定为充分大于电容检测部分的机械获得的增益。交替重复测量模式周期和力平衡模式周期。在测量模式期间，可动电极不受伺服机构约束，对应于加速度的电压被施加到取样保持放大器。在力平衡模式期间，根据与加速度相对应的取样保持放大器的输出，可动电极受到伺服机构约束，可动电极短路到地。

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