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1. 发明授权

US06981410B2 Flow sensor and method of manufacturing the same 有权
标题翻译：流量传感器及其制造方法
公开(公告)号：US06981410B2
公开(公告)日：2006-01-03
申请号：US10434563
申请日：2003-05-09
申请人： Koji Seki , Nobuhiko Zushi , Shinichi Ike , Seishi Nakano , Tarou Nakata , Shoji Kamiunten
发明人： Koji Seki , Nobuhiko Zushi , Shinichi Ike , Seishi Nakano , Tarou Nakata , Shoji Kamiunten
IPC分类号： G01F1/68
CPC分类号： G01F1/692 , G01F1/6845 , G01F1/6847
摘要： A flow sensor includes a substrate, an electrical insulating film, and a flow velocity detection mechanism. In the substrate, a diaphragm portion having a first surface in contact with a measurement target fluid and a thick fixing portion surrounding the diaphragm portion are integrally formed. The electrical insulating film is formed on a second surface of the diaphragm portion which is on a side opposite to the first surface. The flow velocity detection mechanism is arranged on the electrical insulating film. A method of manufacturing a flow sensor is also disclosed.
摘要翻译：流量传感器包括基板，电绝缘膜和流速检测机构。在基板中，与测量对象流体接触的第一表面的膜片部分和围绕隔膜部分的厚的固定部分一体地形成。电绝缘膜形成在隔膜部分的与第一表面相对的一侧的第二表面上。流速检测机构设置在电绝缘膜上。还公开了一种制造流量传感器的方法。

2. 发明授权

US06536274B1 Flow velocity detector 有权
标题翻译：流速检测器
公开(公告)号：US06536274B1
公开(公告)日：2003-03-25
申请号：US09762989
申请日：2001-04-16
申请人： Nobuhiko Zushi , Shoji Kamiunten
发明人： Nobuhiko Zushi , Shoji Kamiunten
IPC分类号： G01F168
CPC分类号： G01F1/6845 , G01F1/692
摘要： A flow velocity detector, wherein an upstream side temperature sensor (3U1) and a downstream side temperature sensor (3D1) are disposed on both sides of a heater (2-1) with the recessed and projected direction of the heater (2-1) in comb tooth-shape positioned approximately in parallel with the flow direction A of a detected fluid, whereby heat from the heater (2-1) first heats the crank-shaped connection parts (J) of the temperature sensors (3U1, 3D1) in comb tooth shape, respectively, and then transfers through straight line parts (S) along the crank-shapes in the direction approximately in parallel with the flow direction of the detected fluid.
摘要翻译：一种流量检测器，其中上游侧温度传感器（3U1）和下游侧温度传感器（3D1）在加热器（2-1）的两侧设置有加热器（2-1）的凹入和突出方向，在梳齿形状与检测流体的流动方向A大致平行的位置处，来自加热器（2-1）的热量首先将温度传感器（3U1，3D1）的曲柄形连接部（J）加热到梳齿形状，然后沿着与所检测流体的流动方向大致平行的方向沿着曲柄形状传递直线部分（S）。

3. 发明授权

US07185539B2 Flow sensor 有权
标题翻译：流量传感器
公开(公告)号：US07185539B2
公开(公告)日：2007-03-06
申请号：US10570672
申请日：2004-08-26
申请人： Shinichi Ike , Nobuhiko Zushi
发明人： Shinichi Ike , Nobuhiko Zushi
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： In a flow sensor (1) including an anticorrosion metallic diaphragm; an insulating film formed on one surface of the metallic diaphragm; and a flow rate measuring sensor formed on the insulating film, the other surface of the metallic diaphragm being in contact with a fluid under measure, between the insulating film (122) on which sensor devices (25) are formed and the metallic diaphragm, a buffer layer (121) having an intermediate linear expansion coefficient between the linear expansion coefficient of the insulating film (122) and the linear expansion coefficient of an anticorrosion metal is interposed. Thereby, the sensitivity and response of the flow sensor are improved, and also the heat resistance is improved, by which the flow sensor is made especially suitable for measuring the flow rate of a corrosive fluid.
摘要翻译：在包括防腐金属隔膜的流量传感器（1）中; 形成在所述金属隔膜的一个表面上的绝缘膜; 和形成在绝缘膜上的流量测量传感器，金属隔膜的另一个表面与被测量的流体接触，在其上形成有传感器装置（25）的绝缘膜（122）和金属隔膜之间，具有绝缘膜（122）的线膨胀系数与耐腐蚀金属的线膨胀系数之间的中间线膨胀系数的缓冲层（121）。因此，提高了流量传感器的灵敏度和响应性，并且提高了耐热性，通过该传感器，流量传感器特别适合于测量腐蚀性流体的流量。

4. 发明授权

US07383726B2 Package structure of sensor and flow sensor having the same 有权
标题翻译：传感器和流量传感器的封装结构相同
公开(公告)号：US07383726B2
公开(公告)日：2008-06-10
申请号：US11703581
申请日：2007-02-07
申请人： Shinichi Ike , Nobuhiko Zushi , Takeshi Nishi
发明人： Shinichi Ike , Nobuhiko Zushi , Takeshi Nishi
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692
摘要： The package structure may includes: a sensor chip having a detecting device formed on a front surface of a substrate; through electrodes that are arranged at predetermined positions of the substrate around the detecting device, electrically insulated at circumferences thereof, pierce the substrate from the front surface to a rear surface, are connected with lead patterns of the detecting device on the front surface side, and connected with signal fetching means for the outside on the rear surface side; a flow path body on which the sensor chip is mounted and which has a flow path (a conduction path) for a fluid being formed on a surface facing the detecting device and sealing means.
摘要翻译：封装结构可以包括：传感器芯片，其具有形成在基板的前表面上的检测装置; 通过布置在检测装置周围的基板的预定位置处的电极，其周边电绝缘，将基板从前表面穿透到后表面，与前表面侧的检测装置的引线图案相连，与后表面侧的外部的信号取出装置连接; 流路主体，传感器芯片安装在该流路主体上，并且在面向检测装置的表面和密封装置上具有形成流体的流动路径（导电路径）。

5. 发明申请

US20070227260A1 Package structure of sensor and flow sensor having the same 有权
标题翻译：传感器和流量传感器的封装结构相同
公开(公告)号：US20070227260A1
公开(公告)日：2007-10-04
申请号：US11703581
申请日：2007-02-07
申请人： Shinichi Ike , Nobuhiko Zushi , Takeshi Nishi
发明人： Shinichi Ike , Nobuhiko Zushi , Takeshi Nishi
IPC分类号： G01F1/00
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692
摘要： Please replace the current Abstract with the following new Abstract. The package structure may includes: a sensor chip having a detecting device formed on a front surface of a substrate; through electrodes that are arranged at predetermined positions of the substrate around the detecting device, electrically insulated at circumferences thereof, pierce the substrate from the front surface to a rear surface, are connected with lead patterns of the detecting device on the front surface side, and connected with signal fetching means for the outside on the rear surface side; a flow path body on which the sensor chip is mounted and which has a flow path (a conduction path) for a fluid being formed on a surface facing the detecting device and sealing means.
摘要翻译：请用以下摘要取代当前的摘要。封装结构可以包括：传感器芯片，其具有形成在基板的前表面上的检测装置; 通过布置在检测装置周围的基板的预定位置处的电极，其周边电绝缘，将基板从前表面穿透到后表面，与前表面侧的检测装置的引线图案相连，与后表面侧的外部的信号取出装置连接; 流路主体，传感器芯片安装在该流路主体上，并且在面向检测装置的表面和密封装置上具有形成流体的流动路径（导电路径）。

6. 发明申请

US20060288773A1 Flow sensor 有权
标题翻译：流量传感器
公开(公告)号：US20060288773A1
公开(公告)日：2006-12-28
申请号：US10570672
申请日：2004-08-26
申请人： Shinichi Ike , Nobuhiko Zushi
发明人： Shinichi Ike , Nobuhiko Zushi
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： In a flow sensor (1) including an anticorrosion metallic diaphragm; an insulating film formed on one surface of the metallic diaphragm; and a flow rate measuring sensor formed on the insulating film, the other surface of the metallic diaphragm being in contact with a fluid under measure, between the insulating film (122) on which sensor devices (25) are formed and the metallic diaphragm, a buffer layer (121) having an intermediate linear expansion coefficient between the linear expansion coefficient of the insulating film (122) and the linear expansion coefficient of an anticorrosion metal is interposed. Thereby, the sensitivity and response of the flow sensor are improved, and also the heat resistance is improved, by which the flow sensor is made especially suitable for measuring the flow rate of a corrosive fluid.
摘要翻译：在包括防腐金属隔膜的流量传感器（1）中; 形成在所述金属隔膜的一个表面上的绝缘膜; 和形成在绝缘膜上的流量测量传感器，金属隔膜的另一个表面与被测量的流体接触，在其上形成有传感器装置（25）的绝缘膜（122）和金属隔膜之间，具有绝缘膜（122）的线膨胀系数与耐腐蚀金属的线膨胀系数之间的中间线膨胀系数的缓冲层（121）。因此，提高了流量传感器的灵敏度和响应性，并且提高了耐热性，通过该传感器，流量传感器特别适合于测量腐蚀性流体的流量。

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