专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20060283245A1 VIBRATORY GYROSCOPE 审中-公开
标题翻译：振动陀螺仪
公开(公告)号：US20060283245A1
公开(公告)日：2006-12-21
申请号：US11423281
申请日：2006-06-09
申请人： Nobuaki KONNO , Masahiro Tsugai , Jun Fujita
发明人： Nobuaki KONNO , Masahiro Tsugai , Jun Fujita
IPC分类号： G01P15/08
CPC分类号： G01C19/5719
摘要： According to one of the aspects of the present invention, a vibratory gyroscope includes a pair of proof masses having the same inertia mass, each of the proof masses having a first axis. The proof masses are arranged symmetrically in relation to a second axis. Also, the vibratory gyroscope includes a pair of drive elements, each of which has a driving axis extending in parallel to the second axis and supports respective one of the proof masses to allow oscillation thereof about the first axis. Further, the vibratory gyroscope includes a supporting element with an anchor element for supporting the drive elements to allow oscillation thereof about the driving axes. Finally, the vibratory gyroscope includes a main body having an inner space for receiving the supporting element, in which the main body is in contact with the anchor element of the supporting element and spaced away from the proof masses and the drive elements.
摘要翻译：根据本发明的一个方面，振动陀螺仪包括具有相同惯性质量的一对校验块，每个校验块具有第一轴。证明质量体相对于第二轴对称地布置。此外，振动陀螺仪还包括一对驱动元件，每一个驱动元件具有平行于第二轴线延伸的驱动轴，并支撑相应的一个检验质量块，以允许围绕第一轴线的振荡。此外，振动陀螺仪包括支撑元件，该支撑元件具有用于支撑驱动元件的锚定元件，以允许绕驱动轴线的摆动。最后，振动陀螺仪包括主体，其具有用于接收支撑元件的内部空间，主体与支撑元件的锚定元件接触并与检测块和驱动元件隔开。

2. 发明授权

US06494094B1 Angular rate sensor 失效
标题翻译：角速度传感器
公开(公告)号：US06494094B1
公开(公告)日：2002-12-17
申请号：US09562288
申请日：2000-05-01
申请人： Masahiro Tsugai , Nobuaki Konno , Hiroyuki Fujita
发明人： Masahiro Tsugai , Nobuaki Konno , Hiroyuki Fujita
IPC分类号： G01P904
CPC分类号： G01C19/5719
摘要： A conventional angular rate sensor has a problem that the displacement amplitude of a drive gimbal frame is limited due to the Pulled-in phenomenon where the drive gimbal frame is attached to drive electrodes, thereby decreasing its sensor sensitivity. In an angular rate sensor, a drive frame and a driven frame are separately provided. A bending oscillation of the drive frame is transmitted to the driven frame through link beams, causing the rotational oscillation of the driven frame. The displacement amplitude of a rotational oscillation of the driven frame is not limited to provide high sensor sensitivity.
摘要翻译：传统的角速度传感器存在由于驱动万向架结合到驱动电极上的拉入现象而导致驱动万向架的位移幅度受到限制的问题，从而降低了传感器灵敏度。在角速率传感器中，分别提供驱动框架和从动框架。驱动框架的弯曲振动通过连接梁传递到从动框架，导致从动框架的旋转振动。驱动框架的旋转振荡的位移幅度不限于提供高传感器灵敏度。

3. 发明授权

US06584840B2 Angular velocity sensor 失效
标题翻译：角速度传感器
公开(公告)号：US06584840B2
公开(公告)日：2003-07-01
申请号：US09978666
申请日：2001-10-18
申请人： Masahiro Tsugai , Nobuaki Konno , Eiji Yoshikawa , Hiroyuki Fujita
发明人： Masahiro Tsugai , Nobuaki Konno , Eiji Yoshikawa , Hiroyuki Fujita
IPC分类号： G01C1900
CPC分类号： G01C19/5719
摘要： A sensitive angular velocity sensor is provided without increasing an inter-electrode gap for inducing a torsional vibration. An angular velocity sensor which employs an electrostatic drive system for inducing drive vibration by using inter-electrode electrostatic attraction includes a pair of inertial mass members which are connected to each other through a connection frame having a length such that the inertial mass members are point-symmetrical with respect to a central point of the connection frame and which are held along a plane direction of a substrate, a pair of elastic beams which are connected to each other at an interval in opposite directions along a longitudinal direction from the central point of the connection frame on opposite sides of the connection frame, a pair of drive plates which are connected to the ends of the elastic beams, which have an electrode constituting an electrostatic attraction generating structure together with a drive electrode on the substrate, and which are supported such that the drive plates can be moved in at least one direction along the plane direction of the substrate to torsionally vibrate the inertial mass members about the central point of the connection frame.
摘要翻译：提供灵敏的角速度传感器，而不增加用于引起扭转振动的电极间间隙。使用静电驱动系统的角速度传感器，其通过使用电极间静电吸引而引起驱动振动的方法包括：一对惯性质量部件，其通过具有长度使得惯性质量部件为点状的连接框架彼此连接，相对于连接框架的中心点对称并且沿着基板的平面方向保持的一对弹性梁，沿着从中心点沿相反方向以相反方向彼此连接的一对弹性梁连接框架的连接框架，连接到弹性梁的端部的一对驱动板，其具有与基板上的驱动电极一起构成静电引力产生结构的电极，并且被支撑为驱动板可以沿着基板的平面方向在至少一个方向上移动使惯性质量构件围绕连接框架的中心点扭转振动。

4. 发明授权

US06259548B1 Micro-mirror device 失效
标题翻译：微镜装置
公开(公告)号：US06259548B1
公开(公告)日：2001-07-10
申请号：US09401947
申请日：1999-09-23
申请人： Masahiro Tsugai , Nobuaki Konno , Hiroyuki Fujita , Makoto Mita , Hiroshi Toshiyoshi , Yoshio Mita
发明人： Masahiro Tsugai , Nobuaki Konno , Hiroyuki Fujita , Makoto Mita , Hiroshi Toshiyoshi , Yoshio Mita
IPC分类号： G02B2608
CPC分类号： B81B3/004 , B81B2201/042 , G02B26/0841
摘要： A micro-mirror device includes a mirror forming substrate on which a mirror is disposed. A pair of torsion beams are disposed on opposing sides of the mirror forming substrate. An anchor projects from a supporting substrate, supporting the ends of the torsion beams. A driving frame surrounds at least one side of the torsion beams and is connected to the mirror forming substrate through a link beam. A drive force generator drives the driving frame.
摘要翻译：微镜装置包括其上配置有反射镜的反射镜形成基板。一对扭转梁设置在反射镜形成基板的相对侧上。锚固件从支撑基底突出，支撑扭转梁的端部。驱动框架围绕扭转梁的至少一侧，并且通过连杆梁连接到反射镜形成基板。驱动力发生器驱动驱动框架。

5. 发明授权

US6125700A Vibrating type angular velocity sensor 失效
标题翻译：振动式角速度传感器
公开(公告)号：US6125700A
公开(公告)日：2000-10-03
申请号：US648
申请日：1997-12-30
申请人： Masahiro Tsugai , Nobuaki Konno , Yoshiaki Hirata
发明人： Masahiro Tsugai , Nobuaki Konno , Yoshiaki Hirata
IPC分类号： G01C19/56 , G01C19/5762 , G01C19/5769 , G01P15/08 , G01P9/04
CPC分类号： G01C19/5719 , G01P15/0802 , G01P2015/0814
摘要： A vibrating type angular velocity sensor is comprised of: a driving vibrator element 8 supported by a first beam 9 fixed by an anchor portion 3 on a substrate, and driven by a driving comb electrode 12 along an X-axial direction parallel to the substrate; a detecting vibrator element 10 supported by a second beam 11 on the driving vibrator element and being vibratable along a Y-axial direction; and detection electrodes 14 and 15 of an electric capacitance provided with separated from the detecting vibrator element, and the detection electrodes along the X-axial direction, whereby an angular velocity while setting a Z-axial direction perpendicular to the substrate as an axis is detected. Furthermore, the driving vibrator element is fixed on the substrate by way of two sets of the anchor portions arranged at positions symmetrical to each other with respect to the detecting vibrator element. Also, one of the detection electrodes is arranged on the detecting vibrator element, and the other of the detection electrodes is arranged on the driving vibrator element with separated from each other by an equi-interval space.
摘要翻译：振动型角速度传感器包括：驱动振子元件8，由第一梁9支撑，第一梁9由锚固部分3固定在基板上，并由平行于基板的X轴方向由驱动梳电极12驱动; 检测振动元件10，由驱动振子上的第二光束11支撑，并沿着Y轴方向振动; 检测电极14和15设置有与检测振动元件分离的电容，检测电极沿着X轴方向，从而检测将垂直于基板的Z轴方向设定为轴的角速度。此外，驱动振动元件通过布置在相对于检测振动器元件彼此对称的位置的两组锚定部固定在基板上。此外，检测电极之一布置在检测振动器元件上，另一个检测电极通过等间隔空间彼此分离地布置在驱动振动器元件上。

6. 发明授权

US06201284B1 Multi-axis acceleration sensor and manufacturing method thereof 失效
标题翻译：多轴加速度传感器及其制造方法
公开(公告)号：US06201284B1
公开(公告)日：2001-03-13
申请号：US09025247
申请日：1998-02-18
申请人： Yoshiaki Hirata , Masahiro Tsugai , Nobuaki Konno
发明人： Yoshiaki Hirata , Masahiro Tsugai , Nobuaki Konno
IPC分类号： H01L2982
CPC分类号： G01P15/18 , G01P15/0802 , G01P15/125 , G01P2015/082
摘要： A movable electrode structure is formed in a single sensor element, and this movable electrode structure can be displaced along two axes within a plane, and one axis outside the plane. A detecting fixed electrode is provided via a constant space with each of these detecting axes, and a change in capacitances between the movable electrodes and the fixed electrodes is detected. As a result, the acceleration components of the two axes, or the three axes are detected. The dynamic characteristic of the sensor is controlled based on the mass of the variable electrode, the structure and length of the beam for supporting the movable electrode, and also the ratio of the length to the section of this beam.
摘要翻译：可移动电极结构形成在单个传感器元件中，并且该可动电极结构可以在平面内的两个轴线以及平面外的一个轴线上移位。通过这些检测轴中的每一个经由恒定空间设置检测固定电极，并且检测可动电极和固定电极之间的电容的变化。结果，检测到两个轴的加速度分量或三个轴。传感器的动态特性基于可变电极的质量，用于支撑可动电极的光束的结构和长度以及长度与该光束的截面的比例来控制。

7. 发明授权

US06955086B2 Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US06955086B2
公开(公告)日：2005-10-18
申请号：US10739069
申请日：2003-12-19
申请人： Eiji Yoshikawa , Masahiro Tsugai , Nobuaki Konno , Yoshiaki Hirata
发明人： Eiji Yoshikawa , Masahiro Tsugai , Nobuaki Konno , Yoshiaki Hirata
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： An acceleration sensor includes first and second fixed electrodes on a substrate, and a movable electrode located above the first and second fixed electrodes, with respect to the substrate, and facing them. The movable electrode is elastically supported on the substrate by a first elastic supporting body and is movable. A mass, which is elastically supported on the substrate by a second elastic supporting body, moves in response to an acceleration in a direction perpendicular to the substrate. A linking portion links the movable electrode and the mass at a position spaced from an axis of movement of the movable electrode by a distance. Acceleration is measured based on changes in a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the second fixed electrode and the movable electrode. Thus, a highly impact resistant and highly reliable acceleration sensor is obtained.
摘要翻译：加速度传感器包括基板上的第一固定电极和第二固定电极以及相对于基板位于第一和第二固定电极上方并面向它们的可动电极。可移动电极通过第一弹性支撑体弹性支撑在基板上并且可移动。通过第二弹性支撑体弹性地支撑在基板上的质量响应于垂直于基板的方向的加速度而移动。连接部分在与可移动电极的运动轴线间隔一定距离的位置处连接可移动电极和质量块。基于第一固定电极和可动电极之间的第一电容的变化和第二固定电极与可动电极之间的第二电容来测量加速度。因此，获得了高度耐冲击和高度可靠的加速度传感器。

8. 发明授权

US5980762A Method of micromachining a semiconductor 失效
标题翻译：微加工半导体的方法
公开(公告)号：US5980762A
公开(公告)日：1999-11-09
申请号：US806150
申请日：1997-02-25
申请人： Hiroshi Otani , Masahiro Tsugai
发明人： Hiroshi Otani , Masahiro Tsugai
IPC分类号： H01L29/84 , B81B1/00 , B81B3/00 , B81C1/00 , G01P15/08 , G01P15/125 , H01L21/306 , H01L21/302
CPC分类号： B81C1/00626 , G01P15/0802 , G01P15/125 , H01L21/30608 , B81B2201/0235 , B81C2201/0133 , B81C2201/0142
摘要： A method of micromachining a silicon wafer that simultaneously forms narrow gaps having a width of 10 .mu.m or less and wider gap portions using an anistropic etching solution. The etching solution contains KOH in a concentration of 35% or less and the penetration etching is carried out such that the etching of the opposing walls and the face of the silicon wafer occur at the same rate. A method of manufacturing a capacitance-type acceleration detector in a silicon wafer using the aforementioned etching method.
摘要翻译：一种微晶加工硅晶片的方法，其同时形成宽度为10μm或更小的窄间隙，并且使用有机蚀刻溶液形成较宽的间隙部分。蚀刻溶液含有浓度为35％以下的KOH，进行贯通蚀刻，使得相对的壁和硅晶片的表面以相同的速率进行蚀刻。使用上述蚀刻方法制造硅晶片中的电容式加速度检测器的方法。

9. 发明授权

US06278283B1 Capacitance detecting circuit 有权
标题翻译：电容检测电路
公开(公告)号：US06278283B1
公开(公告)日：2001-08-21
申请号：US09164628
申请日：1998-10-01
申请人： Masahiro Tsugai
发明人： Masahiro Tsugai
IPC分类号： G01R2726
CPC分类号： G01R27/2605 , G01P2015/0828
摘要： A capacitance detecting circuit which can ensure flexibility in application without restriction imposed by a capacitance arrangement such as a single capacitance, differential capacitance, differential capacitance electrostatic servo and like arrangements, to a great advantage includes an operational amplifier having an inverting input terminal and an output terminal between which a feedback capacitance component is connected, a capacitance sensor having an electrostatic capacitance subjected to change under action of an external force, a switch for electrically charging the capacitance component of the capacitance sensor by connecting a charge/discharge terminal of the capacitance component to a reference voltage at a first clock timing for discharging the feedback capacitance component and switching the charge/discharge terminal to the feedback capacitance component at a second clock timing to transfer electric charge, and a sample-and-hold circuit for converting the transferred electric charge to the sensor output voltage.
摘要翻译：能够确保应用灵活性的静电电容检测电路，具有反相输入端子和输出端的运算放大器，具有运算放大器，具有反相输入端子和输出端连接有反馈电容分量的端子，具有在外力作用下变化的静电电容的电容传感器，通过连接电容元件的充电/放电端子对电容传感器进行电荷充电的开关到第一时钟定时的参考电压，用于放电反馈电容分量，并且在第二时钟定时将充电/放电端子切换到反馈电容分量以传送电荷;以及采样和保持电路，用于转换转移的电三次充电到传感器输出电压。

10. 发明授权

US5534773A Method for compensating an offset voltage temperature drift in a semiconductor strain gage sensor 失效
标题翻译：补偿半导体应变计传感器偏移电压温度漂移的方法
公开(公告)号：US5534773A
公开(公告)日：1996-07-09
申请号：US264316
申请日：1994-06-23
申请人： Masahiro Tsugai , Mikio Bessho , Takashi Sesekura
发明人： Masahiro Tsugai , Mikio Bessho , Takashi Sesekura
IPC分类号： G01L1/22 , G05F1/567 , G01R1/44
CPC分类号： G01L1/2281 , G05F1/567
摘要： A method for compensating an offset voltage temperature drift in a semiconductor strain gage sensor in which a temperature-sensitive power supply is modeled as the one for providing the output voltage V.sub.0 =KV.sub.S (1+.alpha.T), and, under the condition that the resistance of the compensating resistor and the coefficient .alpha. are within practical ranges, respectively, the parameter K is determined so as to minimize the compensating error, thereby both of the primary order term and the secondary order term with respect to the temperature in the offset voltage of the strain gage can be compensated so that the offset temperature drift can be reduced.
摘要翻译：一种用于补偿半导体应变计传感器中的偏移电压温度漂移的方法，其中将温度敏感电源建模为用于提供输出电压V0 = KVS（1+αT）的温度敏感电源，并且在补偿电阻器的阻抗和系数α分别在实际范围内，确定参数K以使补偿误差最小化，从而相对于偏移电压中的温度，一次次项和次级项可以补偿应变计，从而可以减小偏移温度漂移。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式