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    • 8. 发明授权
    • CMP system utilizing halogen adduct
    • 使用卤素加合物的CMP系统
    • US07776230B2
    • 2010-08-17
    • US11673518
    • 2007-02-09
    • Steven GrumbineFrancesco De Rege Thesauro
    • Steven GrumbineFrancesco De Rege Thesauro
    • C03C15/00
    • H01L21/31053C09G1/02H01L21/3212
    • The invention provides a chemical-mechanical polishing system for polishing a substrate comprising (a) a polishing component selected from an abrasive, a polishing pad, or both an abrasive and a polishing pad, (b) an aqueous carrier, and (c) the halogen adduct resulting from the reaction of (1) an oxidizing agent selected from the group consisting of iodine, bromine, and a combination thereof, and (2) a carbon acid having a pKa of about 3 to about 14, wherein the halogen adduct is present in a concentration of about 0.01 mM or more in the aqueous carrier. The invention also provides a method of polishing a substrate comprising (i) providing the aforementioned chemical-mechanical polishing system, (ii) contacting the substrate with the polishing system, and (iii) abrading at least a portion of the surface of the substrate with the polishing system to polish the substrate.
    • 本发明提供了一种用于抛光衬底的化学机械抛光系统,其包括(a)选自研磨剂,抛光垫或研磨剂和抛光垫两者的抛光组分,(b)水性载体,和(c) 由(1)选自碘,溴及其组合的氧化剂的反应产生的卤素加合物,和(2)pKa为约3至约14的碳酸,其中卤素加合物为 在水性载体中以约0.01mM或更高的浓度存在。 本发明还提供了一种抛光衬底的方法,其包括(i)提供上述化学机械抛光系统,(ii)使衬底与抛光系统接触,和(iii)研磨衬底表面的至少一部分, 抛光系统抛光底物。
    • 10. 发明申请
    • Oxidation-stabilized CMP compositions and methods
    • 氧化稳定的CMP组合物和方法
    • US20070219104A1
    • 2007-09-20
    • US11384538
    • 2006-03-20
    • Steven GrumbineRenjie ZhouZhan ChenPhillip Carter
    • Steven GrumbineRenjie ZhouZhan ChenPhillip Carter
    • B08B7/00
    • H01L21/3212C09G1/02C09K3/1463C23F3/04C23F3/06
    • The present invention provides a chemical-mechanical polishing (CMP) composition comprising an amino compound, a radical-forming oxidizing agent, a radical trapping agent capable of inhibiting radical-induced oxidation of the amino compound, and an aqueous carrier therefore. The radical trapping agent is a hydroxyl-substituted polyunsaturated cyclic compound, a nitrogenous compound, or a combination thereof. Optionally, the composition comprises a metal oxide abrasive (e.g., silica, alumina, titania, ceria, zirconia, or a combination of two or more of the foregoing abrasives). The invention further provides a method of chemically-mechanically polishing a substrate with the CMP compositions, as well as a method of enhancing the shelf-life of CMP compositions containing an amine and a radical-forming oxidizing agent, in which a radical trapping agent is added to the CMP composition.
    • 本发明提供一种包含氨基化合物,自由基形成氧化剂,能够抑制氨基化合物自由基诱导氧化的自由基捕获剂的化学机械抛光(CMP)组合物,以及含水载体。 自由基捕获剂是羟基取代的多不饱和环状化合物,含氮化合物或其组合。 任选地,组合物包含金属氧化物研磨剂(例如二氧化硅,氧化铝,二氧化钛,二氧化铈,氧化锆,或两种或更多种前述研磨剂的组合)。 本发明还提供了用CMP组合物对基材进行化学机械抛光的方法,以及提高含有胺和自由基形成氧化剂的CMP组合物的保存期限的方法,其中自由基捕获剂是 添加到CMP组合物中。