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1. 发明申请

US20130106535A1 HIGH COUPLING, LOW LOSS SAW FILTER AND ASSOCIATED METHOD 有权
标题翻译：高耦合，低损耗滤波器及相关方法
公开(公告)号：US20130106535A1
公开(公告)日：2013-05-02
申请号：US13282371
申请日：2011-10-26
申请人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
发明人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
IPC分类号： H03H9/64
CPC分类号： H03H9/25 , H03H9/02157 , H03H9/02559 , H03H9/02834
摘要： Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.
摘要翻译：公开的实施例包括具有电极周期，电极宽度和/或电极宽度与电极周期的比例以规定方式变化的弹性表面波器件。

2. 发明授权

US06833774B2 Surface acoustic wave filter 有权
标题翻译：表面声波滤波器
公开(公告)号：US06833774B2
公开(公告)日：2004-12-21
申请号：US10414058
申请日：2003-04-15
申请人： Benjamin P. Abbott , Natalya F. Naumenko
发明人： Benjamin P. Abbott , Natalya F. Naumenko
IPC分类号： H03H916
CPC分类号： H03H9/02559 , H03H9/6483
摘要： A SAW filter includes a piezoelectric substrate of a single crystal LiNbO3 and SAW resonators having an electrode thickness ranging from about 8% to about 9% of an acoustic wavelength of a high velocity SAW excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;, &mgr;, &thgr;), with angle &lgr; in a range from −5° to +5°, angle &mgr; in a range from about 75° to about 85°, and angle &thgr; in a range from 85° to 95°. A metalization ratio for the resonators ranges from about 0.3 to about 0.9, with resonators in a parallel arm of the filter having a metalization ratio from 1.1-1.4 times larger than the metalization ratio for resonators in the series arm of the filter. Such orientations simultaneously combined with an optimized electrode thickness and optimized metalization ratios provide an improved performance in RF applications.
摘要翻译： SAW滤波器包括单晶LiNbO 3的压电基片和具有在衬底表面上激发的高速SAW的声波的约8％至约9％的电极厚度的SAW谐振器。压电衬底具有由欧拉角（λ，μ，θ）限定的取向，角度λ在-5°至+ 5°的范围内，角度μ在约75°至约85°的范围内，角度θ 在85°至95°的范围内。谐振器的金属化比范围为约0.3至约0.9，其中滤波器的并联臂中的谐振器的金属化比例为滤波器的串联臂中的谐振器的金属化率的1.1-1.4倍。这种取向同时与优化的电极厚度和优化的金属化比组合提供了RF应用中改进的性能。

3. 发明授权

US06661313B2 Surface acoustic wave devices using optimized cuts of lithium niobate (LiNbO3) 有权
标题翻译：使用铌酸锂（LiNbO3）优化切割的表面声波器件
公开(公告)号：US06661313B2
公开(公告)日：2003-12-09
申请号：US10003060
申请日：2001-10-25
申请人： Natalya F. Naumenko , Benjamin P. Abbott
发明人： Natalya F. Naumenko , Benjamin P. Abbott
IPC分类号： H03H964
CPC分类号： H03H9/02559
摘要： A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiNbO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 0.1% to about 8% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;,&mgr;,&thgr;), with angle &lgr; in a range from −20° to +20°, angle &mgr; in a range from about −45° to about −10°, and angle &thgr; in a range from about (−1.16&lgr;−1.5)° to (−1.16&lgr;+1.5)°, wherein one of angle &lgr; and &thgr; is not equal to zero degrees. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.
摘要翻译：表面声波装置包括单晶LiNbO 3的压电基片和设置在压电基片的表面上的电极图案，该电极图形成电极厚度在声波波长的约0.1％至约8％的范围内的谐振器在衬底的表面上激发表面声波。压电衬底具有由欧拉角（λ，μ，θ）限定的取向，角度λ在-20°至+ 20°的范围内，角度μ在约-45°至约-10°的范围内;以及角度θ在约（-1.16λ-1.5）°至（-1.16λ+ 1.5）°的范围内，其中角度λ和θ之一不等于零度。同时与谐振和反谐振频率下的优化传播损耗相结合的这种取向提供了射频应用中改进的性能。

4. 发明授权

US08552819B2 High coupling, low loss saw filter and associated method 有权
标题翻译：高耦合，低损耗滤波器及相关方法
公开(公告)号：US08552819B2
公开(公告)日：2013-10-08
申请号：US13282371
申请日：2011-10-26
申请人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
发明人： Benjamin P. Abbott , Alan Chen , Taeho Kook , Kurt Steiner , Robert Aigner , Suzanne Combe , Timothy Daniel , Natalya F. Naumenko , Julien Gratier
IPC分类号： H03H9/00
CPC分类号： H03H9/25 , H03H9/02157 , H03H9/02559 , H03H9/02834
摘要： Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.
摘要翻译：公开的实施例包括具有电极周期，电极宽度和/或电极宽度与电极周期的比例以规定方式变化的弹性表面波器件。

5. 发明授权

US08294330B1 High coupling, low loss saw filter and associated method 有权
标题翻译：高耦合，低损耗滤波器及相关方法
公开(公告)号：US08294330B1
公开(公告)日：2012-10-23
申请号：US12414706
申请日：2009-03-31
申请人： Benjamin P. Abbott , Natalya F. Naumenko
发明人： Benjamin P. Abbott , Natalya F. Naumenko
IPC分类号： H03H9/25
CPC分类号： H03H9/02834
摘要： A surface acoustic wave device with improved temperature characteristics includes a piezoelectric substrate of a single crystal of symmetry 3m, providing propagation of a SAW having an electromechanical coupling factor exceeding 5%, an electrode pattern on a substrate surface forming a resonator, and a SiOx overlay covering the electrode pattern. An optimized thickness of the electrodes combined with an SiOx overlay provide improved performance in RF applications with improved temperature characteristics. To suppress spurious responses the SiOx thickness is varied depending upon the relative thickness and period of the electrodes. The electrode pattern forms resonators with the silicon oxide thickness over the electrodes inversely related to the period of the electrodes of the resonators.
摘要翻译：具有改善的温度特性的表面声波装置包括具有对称性3m的单晶的压电基片，提供机电耦合系数超过5％的SAW的传播，形成谐振器的基板表面上的电极图案，和SiOx覆盖层覆盖电极图案。与SiOx覆盖层结合的电极的优化厚度在具有改进的温度特性的RF应用中提供改进的性能。为了抑制杂散响应，SiO x厚度根据电极的相对厚度和周期而变化。电极图案形成在电极上的氧化硅厚度与谐振器的电极的周期成反比的谐振器。

6. 发明授权

US07446453B1 Surface acoustic wave devices using surface acoustic waves with strong piezoelectric coupling 有权
标题翻译：表面声波装置使用表面声波与强耦合
公开(公告)号：US07446453B1
公开(公告)日：2008-11-04
申请号：US11773151
申请日：2007-07-03
申请人： Natalya F. Naumenko , Benjamin P. Abbott
发明人： Natalya F. Naumenko , Benjamin P. Abbott
IPC分类号： H03H9/25
CPC分类号： H03H9/02559 , H03H9/14538
摘要： A SAW device includes a LiNbO3 single crystal piezoelectric substrate having an orientation defined by Euler angles (λ,μ,θ), with angle λ ranging from −5° to +5°, angle μ ranging from about −74° to about −65°, and angle θ ranging from −5° to +5°. Electrode patterns on a surface of the substrate form element resonators having a metallization ratio ranging from about 0.3 to about 0.8 and electrode thicknesses ranging from about 12% to about 17.5% of an acoustic wavelength of a strongly coupled non-leaky surface acoustic wave, excited on the surface of the substrate, if Al is used as electrode material, and in a range from about 6% to about 10% of an acoustic wavelength, if Cu is used as electrode material. Such orientations simultaneously combined with an optimized electromechanical coupling of spurious surface acoustic mode provide for improved performance in RF applications with a widened passband.
摘要翻译： SAW器件包括具有由欧拉角（λ，μ，θ）限定的取向，角度λ为-5°至+ 5°的取向的LiNbO 3单晶压电基片，约-74°至约-65°，角度θ为-5°至+ 5°。衬底表面上的电极图案形成金属化率范围为约0.3至约0.8的元件谐振器和强耦合的非泄漏表面声波的声波的约12％至约17.5％的电极厚度，激发如果使用Cu作为电极材料，则在基板的表面上，如果使用Al作为电极材料，并且在约6％至约10％的声波长的范围内。这种取向同时与优化的机电耦合的杂散表面声学模式相结合，提供了具有加宽通带的RF应用中的改进的性能。

7. 发明授权

US06556104B2 Surface acoustic wave devices using optimized cuts of a piezoelectric substrate 有权
标题翻译：使用优化的压电基片的表面声波装置
公开(公告)号：US06556104B2
公开(公告)日：2003-04-29
申请号：US09848714
申请日：2001-05-03
申请人： Natalya F. Naumenko , Benjamin P. Abbott
发明人： Natalya F. Naumenko , Benjamin P. Abbott
IPC分类号： H03H964
CPC分类号： H03H9/6483 , H03H9/02559
摘要： A surface acoustic wave device includes a piezoelectric substrate of a single crystal LiTaO3 and an electrode pattern provided on a surface of the piezoelectric substrate which forms a resonator having an electrode thickness in a range of about 1% to about 15% of an acoustic wavelength of a surface acoustic wave excited on the surface of the substrate. The piezoelectric substrate has an orientation defined by Euler angles (&lgr;, &mgr;, &thgr;), with angle &lgr; in a range from −4° to +4°, angle &mgr; in a range from about −52° to about −36°, and angle &thgr; in a range from about (−1.365 &lgr;−4)° to (−1.365 &lgr;+4)°. Such orientations simultaneously combined with an optimized propagation loss at resonant and anti-resonant frequencies provide for improved performance in RF applications.
摘要翻译：表面声波装置包括单晶LiTaO 3的压电衬底和设置在压电衬底的表面上的电极图案，该电极图形成电极厚度在声波波长的约1％至约15％的范围内的谐振器在衬底的表面上激发表面声波。压电衬底具有由欧拉角（兰德，mu，θ）限定的取向，角度范围在-4°至+ 4°之间，角度μ在约-52°至约-36°的范围内;以及角度θ在约（-1.365 lambd-4）°至（-1.365 lambd + 4）°的范围内。同时与谐振和反谐振频率下的优化传播损耗相结合的这种取向提供了射频应用中改进的性能。

8. 发明授权

US07105980B2 Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics 有权
标题翻译：锯式过滤装置和采用常温接合的方法，用于产生理想的过滤器生产和性能特征
公开(公告)号：US07105980B2
公开(公告)日：2006-09-12
申请号：US10454797
申请日：2003-06-04
申请人： Benjamin P. Abbott , Svetlana Malocha , Jack Chocola , Gary Monetti , Josh Zepress
发明人： Benjamin P. Abbott , Svetlana Malocha , Jack Chocola , Gary Monetti , Josh Zepress
IPC分类号： H01L41/08
CPC分类号： H03H3/10 , H03H3/08 , H03H9/02094 , H03H9/02559 , H03H9/02566 , H03H9/02574 , H03H9/02834 , H03H9/02897 , H03H9/02952 , H03H9/02984 , H03H9/6489 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155 , Y10T29/49156
摘要： A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.
摘要翻译： SAW滤波器包括铌酸锂的压电基片或任选的具有至少两倍声波长的厚度的钽酸锂。压电基板被接合到硅材料的替代基板上。代用衬底的特征在于至少100欧姆 - 厘米的电阻率和与压电基片相容的膨胀系数。压电基片与替代基片之间的催化接合膜由沉积在压电基片的表面上的第一催化接合膜和沉积在代理基片的表面上的第二催化接合膜形成。压电基板通过足以在常温下提供粘合的压缩力粘合到替代基板上。

9. 发明授权

US06566980B2 Die layout for SAW devices and associated methods 失效
公开(公告)号：US06566980B2
公开(公告)日：2003-05-20
申请号：US09823270
申请日：2001-03-30
申请人： Benjamin P. Abbott
发明人： Benjamin P. Abbott
IPC分类号： H03H964
CPC分类号： H03H9/14547 , H03H3/08 , H03H9/14594 , H03H9/643 , H03H9/6433 , H03H9/6473 , H03H9/6489 , Y10T29/42
摘要： A surface-acoustic-wave die includes a generally rectangular die that comprises a piezoelectric material, atop which is positioned a surface-acoustic-wave electrode pattern. The pattern has a generally rectangular footprint, and the footprint has a top edge that is positioned at an acute, nonzero angle to a top end of the die. A pair of generally rectangular electrode pads are both in electrical contact with the electrode pattern, each pad adjacent diametrically opposed corners of the die. The device addresses the inefficiency in the conventional die layout technique, and provides a method for reducing the width of the die for SAW coupled resonator filters resulting in a smaller package.

10. 发明授权

US5081389A Crystal cut angles for lithium tantalate crystal for novel surface acoustic wave devices 失效
标题翻译：用于新型表面声波器件的钽酸锂晶体的晶体切割角度
公开(公告)号：US5081389A
公开(公告)日：1992-01-14
申请号：US620025
申请日：1990-11-30
申请人： Benjamin P. Abbott , Thor Thorvaldsson
发明人： Benjamin P. Abbott , Thor Thorvaldsson
IPC分类号： H03H9/25 , H01L41/08 , H03H9/00 , H03H9/02
CPC分类号： H03H9/02559 , Y10T29/42
摘要： A Lithium Tantalate crystal, defined by the Euler angles lambda (.lambda.) equal to about 0.degree. and mu (.mu.) equal to about 90.degree. with an acoustic wave propagation direction angle theta (.theta.) in the range of plus 130.degree. to plus 150.degree. and preferably equal to about plus 141.25.degree., offers unique properties for surface acoustic wave device applications.
摘要翻译：由欧拉角λ（λ）等于约0°和mu（mu）等于约90°，声波传播方向角θ（θ）在130°至+ 150°范围内限定的钛酸锂晶体 DEG，优选等于大约141.25°，为声表面波器件应用提供独特的性能。

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