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    • 9. 发明申请
    • Imprinting apparatus and imprinting method
    • 压印装置和压印方法
    • US20070062396A1
    • 2007-03-22
    • US10556052
    • 2004-04-28
    • Mitsuru TakaiKazuhiro HattoriMinoru Fujita
    • Mitsuru TakaiKazuhiro HattoriMinoru Fujita
    • B41K1/56
    • B29C59/02B29C33/50B29C37/0007B29C37/0017B29L2017/005G11B7/261
    • An imprinting apparatus according to the present invention is configured to be capable of removing a stamper having one surface thereof formed with a concave/convex portion and having flexibility, from a resist layer to which shapes of the concave/convex portion of the stamper have been transferred by pressing the concave/convex portion of the stamper against the resist layer on a disk-shaped substrate. The imprinting apparatus comprises a suction device (a suction section, an air pump, and a restrictor) configured to be capable of sucking a predetermined part of the other surface of the stamper to thereby remove the predetermined part from the resist layer such that a removal completion range of the stamper can be gradually expanded from a state where the predetermined part is removed from the resist layer by the suction device.
    • 根据本发明的压印装置被配置为能够从压模的凹/凸部分的形状的抗蚀剂层移除其一个表面形成有凹/凸部并具有柔性的压模 通过将压模的凹部/凸部按压在盘状基板上的抗蚀剂层上而转印。 压印装置包括吸引装置(抽吸部,空气泵和限流器),其构造成能够吸引压模的另一个表面的预定部分,从而从抗蚀剂层移除预定部分,使得去除 可以通过抽吸装置从预定部分从抗蚀剂层移除的状态逐渐扩大压模的完成范围。
    • 10. 发明申请
    • Method for manufacturing magnetic recording medium
    • 磁记录介质的制造方法
    • US20080078739A1
    • 2008-04-03
    • US11898729
    • 2007-09-14
    • Mikiharu HibiMinoru FujitaKazuhiro Hattori
    • Mikiharu HibiMinoru FujitaKazuhiro Hattori
    • B44C1/22
    • G11B5/855B82Y10/00G11B5/743G11B5/82
    • A method for manufacturing a magnetic recording medium with excellent production efficiency is provided in which the recording layer can be processed into a desired concavo-convex pattern with high precision and the resin layer can reliably and thoroughly be removed. A sub-mask layer having corrosion resistance against an oxygen-containing gas is provided over a main mask layer composed mainly of carbon. Furthermore, an intermediate mask layer is provided between the main mask layer and the sub-mask layer. The intermediate mask layer has corrosion resistance against the oxygen-containing gas, and its etching rate is higher for a halogen-containing gas than for the oxygen-containing gas. The resin layer removing step is conducted between the sub-mask layer processing step and the intermediate mask layer processing step (the main mask layer processing step). The resin layer removing step uses the oxygen-containing gas, and the intermediate mask layer processing step uses the halogen-containing gas.
    • 提供了一种制造具有优异的生产效率的磁记录介质的方法,其中记录层可以高精度地加工成所需的凹凸图案,并且可以可靠且彻底地去除树脂层。 在主要由碳构成的主掩模层上设置有对含氧气体具有耐腐蚀性的副掩模层。 此外,在主掩模层和副掩模层之间设置中间掩模层。 中间掩模层对含氧气体具有耐腐蚀性,与含氧气体相比,其含卤素气体的蚀刻速率更高。 在子掩模层处理步骤和中间掩模层处理步骤(主掩模层处理步骤)之间进行树脂层去除步骤。 树脂层除去工序使用含氧气体,中间掩模层处理工序使用含卤素气体。