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    • 1. 发明授权
    • Strain detector and pressure sensor
    • 应变检测器和压力传感器
    • US07194923B2
    • 2007-03-27
    • US11066907
    • 2005-02-25
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • G01L9/06
    • G01L9/0051Y10T29/49103
    • A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).
    • 一种薄膜电阻器(5),其通过绝缘膜(4)设置在应变产生部件(2)上;以及电极薄膜(6),其包括配置在薄膜电阻器(5)中的电极焊盘 )。 薄膜电阻器(5)包括应变检测薄膜电阻部分(8)和连接到电阻部分(8)的电极连接(9)。 电极连接(9)形成为延伸到电极焊盘(10)。 电极焊盘(10)包括形成在不同位置的外部连接接合区域(12)和测试探针区域(13)。 电极焊盘(10)设置在设置在应变产生部(2)的外周缘的管状刚体(1)上。
    • 4. 发明申请
    • Strain detector and pressure sensor
    • 应变检测器和压力传感器
    • US20050193836A1
    • 2005-09-08
    • US11066907
    • 2005-02-25
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • Naoki YoshidaHiroshi KodamaHiroshi Nagasaka
    • G01L9/00H01L29/84G01L9/06
    • G01L9/0051Y10T29/49103
    • A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).
    • 一种薄膜电阻器(5),其通过绝缘膜(4)设置在应变产生部件(2)上;以及电极薄膜(6),其包括配置在薄膜电阻器(5)中的电极焊盘 )。 薄膜电阻器(5)包括应变检测薄膜电阻部分(8)和连接到电阻部分(8)的电极连接(9)。 电极连接(9)形成为延伸到电极焊盘(10)。 电极焊盘(10)包括形成在不同位置的外部连接接合区域(12)和测试探针区域(13)。 电极焊盘(10)设置在设置在应变产生部(2)的外周缘的管状刚体(1)上。
    • 5. 发明授权
    • Method for manufacture of a physical quantity detector
    • 物理量检测器的制造方法
    • US07708051B2
    • 2010-05-04
    • US11657162
    • 2007-01-24
    • Tetsuya KatsumiHitoshi OfuneTadashi YamaguchiHiroshi NagasakaNaoki Yoshida
    • Tetsuya KatsumiHitoshi OfuneTadashi YamaguchiHiroshi NagasakaNaoki Yoshida
    • B22D17/00B22D33/04
    • G01L9/0051B22D15/02
    • A physical quantity detector, such as a pressure sensor and a load sensor, includes a cylindrical part of which one end is closed with a strain generating part and a sensor part formed on the strain generating part. The cylindrical part is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold, and cooling the molten alloy in the metal mold to confer amorphousness on the alloy. The metal mold includes a split mold having at least two split parts for forming a cavity and an insert pin to be inserted into the cavity so as to define the inner configuration of the cylindrical part, or further an insert core to be inserted into the mold so as to form the surface of the cavity corresponding to the surface of the strain generating part.
    • 诸如压力传感器和负载传感器的物理量检测器包括其一端被应变产生部分封闭的圆柱形部分和形成在应变发生部分上的传感器部分。 通过熔化具有能够产生非晶合金的组成的合金材料,将所得熔融合金注入金属模具中,并且冷却金属模具中的熔融合金以赋予合金非晶性,从而制造圆柱形部分。 金属模具包括具有用于形成空腔的至少两个分开部分和插入空腔中的插入销以便限定圆柱形部件的内部构造的分开模具,或者还包括插入模具中的插入芯部 从而形成与应变发生部的表面对应的空腔的表面。
    • 6. 发明申请
    • Method for manufacture of a physical quantity detector
    • 物理量检测器的制造方法
    • US20070181222A1
    • 2007-08-09
    • US11657162
    • 2007-01-24
    • Tetsuya KatsumiHitoshi OfuneTadashi YamaguchiHiroshi NagasakaNaoki Yoshida
    • Tetsuya KatsumiHitoshi OfuneTadashi YamaguchiHiroshi NagasakaNaoki Yoshida
    • C23C22/70B32B15/01
    • G01L9/0051B22D15/02
    • In the manufacture of a physical quantity detector, such as a pressure sensor and a load sensor, comprising a cylindrical part of which one end is closed with a strain generating part and a sensor part formed on the strain generating part, the cylindrical part mentioned above is produced by melting an alloying material having a composition capable of yielding an amorphous alloy, injecting the resultant molten alloy into a metal mold, and cooling the molten alloy in the metal mold to confer amorphousness on the alloy. The metal mold is composed of a split mold having at least two split parts for forming a cavity and an insert pin to be inserted into the cavity so as to define the inner configuration of the cylindrical part, or further an insert core to be inserted into the mold so as to form the surface of the cavity corresponding to the surface of the strain generating part. In another embodiment, the cavity is formed so that the parting face of the mold corresponds to the surface of the strain generating part.
    • 在物理量检测器的制造中,例如压力传感器和负载传感器,包括其一端被应变产生部分封闭的圆柱形部分和形成在应变发生部分上的传感器部分,上述圆柱形部分 通过熔化具有能够产生非晶合金的组成的合金材料制成,将所得熔融合金注入金属模具中,并且冷却金属模具中的熔融合金以赋予合金非晶质。 金属模具由具有至少两个用于形成空腔的分开部分和插入空腔中的插入销的分开模具组成,以限定圆柱形部件的内部构造,或者还有插入芯部 以形成对应于应变发生部的表面的空腔的表面。 在另一个实施例中,形成空腔,使得模具的分型面对应于应变发生部件的表面。
    • 10. 发明授权
    • Absolute-pressure type of pressure sensor
    • 绝压式压力传感器
    • US06883379B2
    • 2005-04-26
    • US10440158
    • 2003-05-19
    • Yoshikazu KanekoHiroshi Nagasaka
    • Yoshikazu KanekoHiroshi Nagasaka
    • G01L9/04G01L9/00
    • G01L19/143G01L19/0061G01L19/0084G01L19/146G01L19/148
    • An absolute-pressure type of pressure sensor is provided. The sensor has a pressure detecting device having a metal diaphragm. Strain gauges are disposed on one surface of the diaphragm, whose other surface is formed to receive fluid to be detected. The sensor comprises a lid, relay board, two seal rings, and input/output terminal. The lid provides a reference pressure space. The relay board is electrically connected to the gauge and composed of laminated ceramic members having both of through holes formed to pass through both sides thereof and a protrusion formed outwardly. The two seal rings are located to face the two sides of the board, respectively. The one seal ring air-tightly connects the relay board and the diaphragm. The other seal ring air-tightly connects the relay board and the lid. The terminal is electrically connected to the relay board and mounted on the protrusion of the relay board.
    • 提供绝对压力型压力传感器。 传感器具有具有金属隔膜的压力检测装置。 应变计布置在隔膜的一个表面上,其另一表面被形成以接收待检测的流体。 传感器包括盖子,继电器板,两个密封环和输入/输出端子。 盖子提供参考压力空间。 继电器板电连接到量规,由具有形成为穿过其两侧的通孔和向外形成的突起的层叠陶瓷构件组成。 两个密封环分别位于板的两侧。 一个密封环气密地连接继电器板和隔膜。 另一个密封圈将继电器板和盖子紧密连接。 端子电连接到继电器板并安装在继电器板的突起上。