会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明申请
    • METHOD FOR FABRICATING FUNCTIONAL FILM
    • 制作功能膜的方法
    • US20100311298A1
    • 2010-12-09
    • US12794906
    • 2010-06-07
    • Naoki SUZUKITakao NagumoHidehiro YoshidaHiroshi HayataMasahiro Muro
    • Naoki SUZUKITakao NagumoHidehiro YoshidaHiroshi HayataMasahiro Muro
    • H01J9/24B05D5/00
    • B41J2/155B41J2/2139B41J2/2146B41J2202/09H01L51/0005
    • It is an object to provide a functional-film fabricating method capable of forming uniform coating films without degrading the productivity, in the event of occurrence of non-ejectable nozzles, out of nozzles in an ink jet apparatus.A functional-film fabricating method includes the step of applying a coating by ejecting droplets of functional liquid (9) from plural nozzles (6) to ejection areas for forming a functional film which are surrounded by bounded areas (3) having a liquid repellent property, during a single scanning. In the step of applying the coating, when there is a non-ejectable nozzle out of plural nozzles to be used for applying a coating to a single ejection area, the amount of droplets of the functional liquid ejected form another ejectable nozzle to be used for applying a coating to this ejection area is made larger than that of cases where there is no non-ejectable nozzle.
    • 本发明的目的是提供一种能够形成均匀的涂膜的功能膜制造方法,而不会在喷墨装置中的喷嘴中发生不喷射喷嘴的情况下使生产率降低。 功能膜制造方法包括通过从多个喷嘴(6)喷射功能液体(9)的液滴到形成功能膜的喷射区域施加涂层的步骤,所述功能膜由具有疏液性的有界区域(3)包围 ,在单次扫描期间。 在施加涂层的步骤中,当在用于向单个喷射区域施加涂层的多个喷嘴中存在不可喷射的喷嘴时,从另一个可喷射喷嘴喷射的功能液体的液滴数量用于 使得涂覆到该喷射区域的涂层比没有不可喷射喷嘴的情况大。
    • 3. 发明授权
    • Method and system for measurement of resist pattern
    • 抗蚀剂图案测量方法和系统
    • US5783342A
    • 1998-07-21
    • US579355
    • 1995-12-27
    • Kazuhiro YamashitaMasahiro Muro
    • Kazuhiro YamashitaMasahiro Muro
    • G01B11/24G01B11/245G03F7/004G03F7/039G03F7/20G03F7/38G03F9/00H01L21/027H01L21/66
    • G03F7/70558G03F7/38G03F7/70633G03F9/70G03F7/0045G03F7/039
    • An overlay measurement pattern, which is formed in a master pattern of a mask, is selectively transferred by exposure processing onto a resist film on a wafer of semiconductor material. This is followed by detecting, by means of a two-beams interference method, a reference position for the overlay measurement pattern formed by the variation in film thickness occurring at an exposed resist region, with performing no development processing. A reference position for an overlay reference pattern, which is pre-formed in the semiconductor wafer, is detected using an interference pattern produced by white light, to detect an overlay difference between the patterns. Since neither a test exposure process nor a development process is needed to be carried out, this results in not only providing a higher throughput rate but also eliminating factors that contribute to degradation of the accuracy of overlay caused by base line stability and mask alignment repeatability. A higher overlay accuracy is achieved accordingly.
    • 通过曝光处理将形成在掩模的主图案中的覆盖测量图案选择性地转移到半导体材料的晶片上的抗蚀剂膜上。 接着,通过双光束干涉法检测由曝光的抗蚀剂区域发生的膜厚度变化形成的覆盖测量图案的基准位置,不执行显影处理。 使用由白光产生的干涉图案检测在半导体晶片中预先形成的覆盖参考图案的参考位置,以检测图案之间的重叠差异。 既然既不需要进行测试曝光过程也不需要开发过程,这不仅可以提供更高的吞吐率,而且可以消除导致基线稳定性和掩模对准重复性引起的覆盖精度降低的因素。 相应地实现更高的重叠精度。
    • 5. 发明授权
    • Electrical discharge machine power supply
    • 放电机电源
    • US07214900B2
    • 2007-05-08
    • US11014052
    • 2004-12-17
    • Masakazu HiraishiMasahiro MuroTakeshi MasakiToshihiko Wada
    • Masakazu HiraishiMasahiro MuroTakeshi MasakiToshihiko Wada
    • B23H1/02B23H7/14
    • B23H1/022B23H9/14
    • An electrical discharge machining apparatus includes a work electrode adapted to support a work immersed in a working fluid, a tool electrode located opposing the work electrode with a predetermined gap therebetween, a capacitor that is connected between the work electrode and the tool electrode to provide a series of voltage pulses, a charging circuit having a power supply and a first switching element which are connected in series to the capacitor, a charge regulating circuit having a second switching element connected in series to the capacitor, and a control unit that controls the first and second switching elements, such that the first switching element turns on, and then the second switching element turns on before the first switching element turns off. Then, one voltage pulse, having a leading edge corresponding to the turning on of the first switching element and a trailing edge corresponding to the turning on of the second switching element, is generated.
    • 一种放电加工装置,包括:工件电极,用于支撑浸在工作流体中的工件;工具电极,与工作电极相对设置,其间具有预定的间隙;电容器,连接在工作电极和工具电极之间, 一系列电压脉冲,具有与电容器串联连接的电源和第一开关元件的充电电路,具有与电容器串联连接的第二开关元件的电荷调节电路,以及控制单元,其控制第一 以及第二开关元件,使得第一开关元件导通,然后第二开关元件在第一开关元件断开之前导通。 然后,产生具有与第一开关元件的接通相对应的前沿和与第二开关元件的导通相对应的后沿的一个电压脉冲。
    • 6. 发明申请
    • ORGANIC EL DISPLAY PANEL AND METHOD FOR MANUFACTURING SAME
    • 有机EL显示面板及其制造方法
    • US20110233572A1
    • 2011-09-29
    • US13132171
    • 2010-05-11
    • Shuhei NakataniMasahiro Muro
    • Shuhei NakataniMasahiro Muro
    • H01L33/08
    • H01L27/3246H01L51/5228
    • Disclosed is an organic EL display panel which has: a substrate; two or more pixel electrodes arranged on the substrate; a bus electrode, which is positioned beside at least one pixel electrode and is disposed on the substrate; an organic layer which is formed on the pixel electrode by means of a coating method; two or more banks, which are disposed on the substrate and define the arrangement region of the organic layer; and a counter electrode, which is disposed on the organic layer and is connected to the bus electrode. The two or more banks include a bank disposed between the bus electrode and the pixel electrode, and a bank disposed between the pixel electrodes, and the lyophilicity of the surface of the bank disposed between the bus electrode and the pixel electrode is lower than that of the bank disposed between the pixel electrodes.
    • 公开了一种有机EL显示面板,其具有:基板; 布置在基板上的两个或更多个像素电极; 位于至少一个像素电极旁边并设置在基板上的总线电极; 通过涂布方法形成在像素电极上的有机层; 两个或更多个组,它们设置在衬底上并限定有机层的布置区域; 以及配置在有机层上并与总线电极连接的对电极。 两个以上的堤包括设置在总线电极和像素电极之间的堤和设置在像素电极之间的堤,并且设置在总线电极和像素电极之间的堤的表面的亲液性低于 该银行设置在像素电极之间。
    • 10. 发明申请
    • Electrical discharge machining apparatus and electrical discharge machining method
    • 放电加工装置和放电加工方法
    • US20060006150A1
    • 2006-01-12
    • US11014052
    • 2004-12-17
    • Masakazu HiraishiMasahiro MuroTakeshi MasakiToshihiko Wada
    • Masakazu HiraishiMasahiro MuroTakeshi MasakiToshihiko Wada
    • B23H1/02B23H7/14
    • B23H1/022B23H9/14
    • An electrical discharge machining apparatus includes a work electrode adapted to support a work immersed in a working fluid, a tool electrode located opposing the work electrode with a predetermined gap, a capacitor that is connected between the work electrode and the tool electrode to provide a series of voltage pulses, a charging circuit having a power supply and a first switching element which are connected in series to the capacitor, a charge regulating circuit having a second switching element connected in series to the capacitor, and a control unit that controls the first and second switching elements, such that the first switching element turns on, and then the second switching element turns on before the first switching element turns off. Then, one voltage pulse, having a leading edge corresponding to the turn on of the first switching element and a trailing edge corresponding to the turn on of the second switching element, is generated.
    • 放电加工装置包括:工件电极,用于支撑浸入工作流体中的工件;工具电极;以与预定间隙相对的工作电极定位的工具电极;连接在工作电极和工具电极之间的电容器, 电压脉冲的充电电路,具有与电容器串联连接的电源和第一开关元件的充电电路,具有与电容器串联连接的第二开关元件的电荷调节电路,以及控制单元,其控制第一和 第二开关元件,使得第一开关元件导通,然后第二开关元件在第一开关元件截止之前导通。 然后,产生一个电压脉冲,其具有与第一开关元件的导通相对应的前沿和与第二开关元件的导通相对应的后沿。