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    • 2. 发明申请
    • Surface Machining Device
    • 表面加工装置
    • US20160001412A1
    • 2016-01-07
    • US14769403
    • 2014-02-19
    • NOTION SYSTEMS GMBH
    • Jan SchoenefeldJens MuenkelMichael DoranCarsten Schimansky
    • B23Q17/22B23Q7/00G05B19/418B23Q15/26
    • The invention relates to a surface machining device comprising a substrate support for receiving a substrate to be machined, a machining unit which can be moved relative to the substrate support along a first and a second movement axis, a position detecting unit for ascertaining the orientation of the substrate, and a control unit for controlling the movement of the machining unit dependent on the orientation of the substrate on the substrate support. The aim of the invention is to provide a surface machining device which can be produced in a compact manner and which allows a precise machining of the surface of the substrate to be machined in an inexpensive manner regardless of the position of the substrate on the substrate support. This is achieved in that the machining unit can be pivoted relative to the substrate support, in particular about a height axis which extends perpendicularly to the plane formed by the first and second movement axis.
    • 本发明涉及一种表面加工装置,其包括用于接收待加工基板的基板支撑件,可沿着第一和第二移动轴线相对于基板支撑件移动的加工单元,位置检测单元,用于确定 基板和控制单元,用于根据基板支撑件上的基板的取向来控制加工单元的移动。 本发明的目的是提供一种能够以紧凑的方式制造的表面加工装置,并且允许以便宜的方式精确地加工要加工的基板的表面,而不管基板在基板支撑件上的位置如何 。 这是通过加工单元相对于基板支撑件枢转的,特别是围绕垂直于由第一和第二移动轴线形成的平面延伸的高度轴线来实现的。