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    • 2. 发明申请
    • SWITCHING ELEMENT, AND METHOD FOR PRODUCING SWITCHING ELEMENT
    • 开关元件和开关元件的制造方法
    • US20160359110A1
    • 2016-12-08
    • US15120993
    • 2015-02-18
    • NEC CORPORATION
    • Naoki BANNOMunehiro TADAKoichiro OKAMOTO
    • H01L45/00H01L23/522H01L23/532
    • H01L45/1266G11C13/0007G11C13/0011G11C2213/15G11C2213/52H01L23/5226H01L23/53228H01L45/08H01L45/085H01L45/1233H01L45/14H01L45/145H01L45/146H01L45/1616H01L45/1625H01L45/1633H01L45/1675
    • Provided is a nonvolatile switching element which has high retention ability even if programmed at a low current, while being suppressed in dielectric breakdown of a variable resistance layer during a reset operation. This switching element is provided with: a first electrode; a second electrode; and a variable resistance layer that is arranged between the first electrode and the second electrode and has ion conductivity. The first electrode contains a metal which generates metal ions that can be conducted in the variable resistance layer. The second electrode is provided with: a first electrode layer that is formed in contact with the variable resistance layer; and a second electrode layer that is formed in contact with the first electrode layer. The first electrode layer is formed of a ruthenium alloy that contains ruthenium and a first metal having a larger standard Gibbs energy of formation of oxide than ruthenium in the negative direction. The second electrode layer is formed of a nitride that contains the first metal. The content of the first metal in the first electrode layer is lower than the content of the first metal in the second electrode layer.
    • 提供了即使在低电流下编程也具有高保持能力的非易失性开关元件,同时在复位操作期间抑制可变电阻层的电介质击穿。 该开关元件设置有:第一电极; 第二电极; 以及布置在第一电极和第二电极之间并具有离子传导性的可变电阻层。 第一电极含有产生可在可变电阻层中传导的金属离子的金属。 第二电极设置有:与可变电阻层接触形成的第一电极层; 以及形成为与第一电极层接触的第二电极层。 第一电极层由含有钌的钌合金和在负方向上具有比钌形成氧化物更大的标准吉布斯能量的第一金属形成。 第二电极层由含有第一金属的氮化物形成。 第一电极层中的第一金属的含量低于第二电极层中的第一金属的含量。