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    • 1. 发明授权
    • Ion microprobe mass spectrometer for analyzing fluid materials
    • 用于分析流体物质的离子微孔质谱仪
    • US3567927A
    • 1971-03-02
    • US3567927D
    • 1969-04-11
    • NASA
    • BARRINGTON ALFRED E
    • G01Q30/10G01Q30/20H01J49/14H01J37/00G01N23/00
    • H01J49/142
    • An improved ion microprobe mass spectrometer type apparatus is provided that is suitable for analyzing trace amounts of a fluid. The present invention utilizes a target electrode for holding the sample, and a means for cooling the surfaces of the target to below a fixed temperature for a determined period of time. A stream of sample fluid is directed over the cooled surfaces of the target and is condensed thereon after which the target surface is sputtered by an incident, high intensity primary beam directed obliquely onto the surface thereof. Thereafter, means is provided for focusing the electrically charged ions of sample material that result in a secondary beam produced due to the bombardment of the sample layer. Additional means is provided to remove the prior material from the target surfaces after each analysis, so that the target surface is prepared for another sample layer. The invention described herein was made by an employee of the United States Government and may be manufactured and used by or for the Government for governmental purposes without the payment of any royalties thereon or therefor.