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    • 5. 发明授权
    • Film type light receiving element and sputter method of manufacturing
the same
    • 薄膜式光接收元件及其制造方法
    • US4370360A
    • 1983-01-25
    • US242735
    • 1981-03-11
    • Mario FuseMutsuo Takenouchi
    • Mario FuseMutsuo Takenouchi
    • H01L31/0264H01B13/00H01L27/146H01L31/10H01L27/14
    • H01L27/14603H01L27/14665Y10T428/12549Y10T428/12632Y10T428/12639Y10T428/12681
    • A film type light receiving element and a method for producing such an element in which the electric current ratio for light and dark input intensities is large while the resistance of an optically transmissive electrode is made low. Belt-shaped metal electrodes and a photoconductive film are provided on a smooth surface of an insulating substrate. The optically transmissive electrode film layer is formed on the photoconductive film. A portion of the optically transmissive electrode film adjacent the photoconductive film has a high specific resistance while the remaining portion has a low specific resistance. To form the portion having a low specific resistance, the film is formed by sputtering in an oxygen partial pressure close to a value at which a minimum specific resistance is obtained while to form the portion having a high specific resistance, the oxygen partial pressure is set to a value higher than the value at which the minimum specific resistance is obtained.
    • 薄膜型光接收元件和用于制造这样的元件的方法,其中光输入强度的电流比率大,同时使光透射电极的电阻变低。 带状金属电极和光电导膜设置在绝缘基板的光滑表面上。 透光电极膜层形成在光电导膜上。 与光电导膜相邻的光透射电极膜的一部分具有高电阻率,而剩余部分具有低电阻率。 为了形成具有低电阻率的部分,通过在接近达到最小电阻率的值的氧分压下溅射形成膜,同时形成具有高电阻率的部分,设定氧分压 达到比获得最小电阻率的值高的值。
    • 7. 发明授权
    • Flat detector and medium detector
    • 平板检测器和介质检测器
    • US07888615B2
    • 2011-02-15
    • US12434163
    • 2009-05-01
    • Eizo KuriharaTsukasa MatsudaKunihiro TakahashiHiroyoshi InoueMario FuseShoji Yamaguchi
    • Eizo KuriharaTsukasa MatsudaKunihiro TakahashiHiroyoshi InoueMario FuseShoji Yamaguchi
    • B07C5/344
    • G01N27/725
    • A flat detector includes a first flat member and a second flat member both made of a nonmagnetic nonmetal, a first conductive wiring that generates an alternating magnetic field, the first conductive wiring being disposed on a surface of the first flat member facing toward the second flat member, a first layer made of a nonmagnetic metal and disposed at least on a surface of the first flat member, a second conductive wiring that detects a signal generated by magnetization reversal of a magnetic material, the magnetization reversal being caused by the alternating magnetic field generated by the first conductive wiring, the second conductive wiring being disposed on a surface of the second flat member facing toward the first flat member, and a second layer made of a nonmagnetic metal and disposed at least on a surface of the second flat member.
    • 平板检测器包括由非磁性非金属制成的第一平坦构件和第二平坦构件,产生交变磁场的第一导电布线,第一导电布线设置在面向第二平面的第一平坦构件的表面上 构件,由非磁性金属制成的第一层并且至少设置在所述第一平坦构件的表面上;第二导电布线,其检测由磁性材料的磁化反转产生的信号,所述磁化反转是由交变磁场引起的 由所述第一导电布线产生,所述第二导电布线设置在所述第二平坦构件的面向所述第一平坦构件的表面上,所述第二层由非磁性金属制成并且至少设置在所述第二平坦构件的表面上。