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1. 发明申请

US20190172996A1 PIEZOELECTRIC TRANSFORMER 审中-公开
公开(公告)号：US20190172996A1
公开(公告)日：2019-06-06
申请号：US16273191
申请日：2019-02-12
申请人： Murata Manufacturing Co., Ltd.
发明人： Shinsuke Ikeuchi , Yoichi Mochida , Kansho Yamamoto , Takuo Hada , Hideya Horiuchi
IPC分类号： H01L41/257 , H01L41/107 , H01L41/047 , H01L41/083 , H01L41/29
摘要： A piezoelectric transformer that includes a vibration portion assembly having an output electrode, an output-side intermediate electrode, an input-side intermediate electrode, and an input electrode. The vibration portion assembly includes n vibration portions. The input electrode includes one to n input electrode pieces. The output electrode includes one to n output electrode pieces. Wiring lines are arranged such that voltages of opposite phases can be respectively applied to a first input electrode piece group of the input electrode pieces corresponding to odd-numbered vibration portions, and a second input electrode piece group of the input electrode pieces corresponding to even-numbered vibration portions. The second output electrode piece and the first output-side intermediate electrode piece are superposed with each other in the thickness direction. The first output electrode piece is not superposed with either of the first and second output-side intermediate electrode pieces in the thickness direction.

2. 发明授权

US11195984B2 Piezoelectric transformer 有权
公开(公告)号：US11195984B2
公开(公告)日：2021-12-07
申请号：US16243171
申请日：2019-01-09
申请人： Murata Manufacturing Co., Ltd.
发明人： Shinsuke Ikeuchi , Yoichi Mochida , Kansho Yamamoto , Takuo Hada , Hideya Horiuchi
IPC分类号： H01L41/107 , H01L41/187 , H01L41/047 , H01L41/053 , H01L41/293 , H01L41/314 , H01L41/318 , H01L41/332
摘要： A piezoelectric transformer that includes a base and an upper layer supported by the base. The upper layer includes a first piezoelectric layer that includes the portion of the upper layer that is interposed between an output electrode and an intermediate electrode, and a second piezoelectric layer that is superposed with the first piezoelectric layer and includes the portion of the upper layer interposed between the intermediate electrode and an input electrode in at least n vibration portions. Moreover, the input electrode includes multiple input electrode pieces and the output electrode includes multiple output electrode pieces. In addition, wiring lines are routed such that voltages of opposite phases can be respectively applied to a first input electrode piece group and a second input electrode piece group with the potential of the intermediate electrode serving as a reference.

3. 发明授权

US10862018B2 Method for manufacturing a piezoelectric device 有权
公开(公告)号：US10862018B2
公开(公告)日：2020-12-08
申请号：US15638861
申请日：2017-06-30
申请人： Murata Manufacturing Co., Ltd.
发明人： Takuo Hada , Kansho Yamamoto
IPC分类号： H04R17/00 , H01L41/09 , H01L41/253 , B81C1/00 , H01L41/113 , H01L41/33 , H04R17/10 , H04R31/00
摘要： A method for manufacturing a piezoelectric device that includes a substrate and a vibration portion that can include a membrane or a beam that is directly or indirectly supported by the substrate and arranged above the substrate. Moreover, the vibration portion includes a piezoelectric layer and the method includes forming the vibration portion and adjusting a resonance frequency of the vibration portion by locally subjecting a region including the vibration portion to heat treatment.

4. 发明授权

US09383205B2 Vibrator and vibrating gyroscope 有权
标题翻译：振动器和振动陀螺仪
公开(公告)号：US09383205B2
公开(公告)日：2016-07-05
申请号：US14148964
申请日：2014-01-07
申请人： Murata Manufacturing Co., Ltd.
发明人： Katsumi Fujimoto , Toshimaro Yoneda , Takuo Hada , Hideya Horiuchi
IPC分类号： G01C19/56 , G01C19/5607 , G01C19/5621 , H01L41/09
CPC分类号： G01C19/56 , G01C19/5607 , G01C19/5621 , H01L41/09 , Y10T74/12 , Y10T74/18856
摘要： A vibrator includes first and second circular or substantially circular arc-shaped beam portions, a base end-side weight portion, and a base end-side weight portion joining portion. The end portions of the first and second circular or substantially circular arc-shaped beam portions in an X-axis positive direction face each other across a distance in a Y-axis direction, and the end portions thereof in an X-axis negative direction are joined to each other. The base end-side weight portion is disposed between the first and second circular or substantially circular arc-shaped beam portions. The base end-side weight portion joining portion extends from a joining portion between the first circular or substantially circular arc-shaped beam portion and the second circular or substantially circular arc-shaped beam portion in the X-axis positive direction, and joined to the base end-side weight portion.
摘要翻译：振动器包括第一和第二圆形或大致圆形的弧形梁部分，基端侧配重部分和基端侧配重部分接合部分。第一和第二圆形或大致圆弧形的梁部分在X轴正方向上的端部在Y轴方向上的距离彼此相对，并且其端部在X轴负方向上是相互加入基端侧配重部分设置在第一和第二圆形或大致圆弧形的梁部分之间。基端侧配重部接合部从第一圆弧状或大致圆弧状的梁部与第二圆形或大致圆弧状的梁部在X轴正方向上的接合部延伸，并与基端侧配重部。

5. 发明授权

US11233190B2 Piezoelectric transformer 有权
公开(公告)号：US11233190B2
公开(公告)日：2022-01-25
申请号：US16273191
申请日：2019-02-12
申请人： Murata Manufacturing Co., Ltd.
发明人： Shinsuke Ikeuchi , Yoichi Mochida , Kansho Yamamoto , Takuo Hada , Hideya Horiuchi
IPC分类号： H01L41/257 , H01L41/047 , H01L41/107 , H02N2/18 , B06B1/06 , H01L41/083 , H01L41/29
摘要： A piezoelectric transformer that includes a vibration portion assembly having an output electrode, an output-side intermediate electrode, an input-side intermediate electrode, and an input electrode. The vibration portion assembly includes n vibration portions. The input electrode includes one to n input electrode pieces. The output electrode includes one to n output electrode pieces. Wiring lines are arranged such that voltages of opposite phases can be respectively applied to a first input electrode piece group of the input electrode pieces corresponding to odd-numbered vibration portions, and a second input electrode piece group of the input electrode pieces corresponding to even-numbered vibration portions. The second output electrode piece and the first output-side intermediate electrode piece are superposed with each other in the thickness direction. The first output electrode piece is not superposed with either of the first and second output-side intermediate electrode pieces in the thickness direction.

6. 发明授权

US11018292B2 Piezoelectric device, piezoelectric transformer, and method of manufacturing piezoelectric device 有权
公开(公告)号：US11018292B2
公开(公告)日：2021-05-25
申请号：US15795579
申请日：2017-10-27
申请人： Murata Manufacturing Co., Ltd.
发明人： Shinsuke Ikeuchi , Kansho Yamamoto , Takuo Hada , Yoichi Mochida , Hideya Horiuchi
IPC分类号： H01L41/09 , H01L41/107 , H01L41/047 , H01L41/04 , H01L41/31 , H01L41/083 , H01L41/187 , H01L41/314 , H04R17/00
摘要： A piezoelectric device that includes a base member having an opening therein and an upper layer supported by the base member. The upper layer includes a vibration portion at a location corresponding to the opening in the base member. The vibration portion includes a lower electrode, an intermediate electrode and an upper electrode that are spaced apart from one another in a thickness direction of the piezoelectric device. The upper layer includes a first piezoelectric layer disposed so as to be at least partially sandwiched between the lower electrode and the intermediate electrode, and a second piezoelectric layer disposed so as to overlap with the first piezoelectric layer and so as to be at least partially sandwiched between the intermediate electrode and the upper electrode. The first piezoelectric layer and the second piezoelectric layer are different in relative permittivity in the thickness direction of the piezoelectric device.

7. 发明授权

US10608166B2 Method for manufacturing a piezoelectric device 有权
公开(公告)号：US10608166B2
公开(公告)日：2020-03-31
申请号：US15641470
申请日：2017-07-05
申请人： Murata Manufacturing Co., Ltd.
发明人： Kansho Yamamoto , Takuo Hada
IPC分类号： H04R17/00 , H01L41/29 , H01L41/253 , H01L41/113 , H01L41/39 , H01L41/09 , H03H3/02 , H01L41/23 , H03H9/58 , H03H9/17 , H05B3/26 , H01L41/08 , H01L41/332 , H01L41/338 , H05B3/03 , H03H9/02 , H03H3/04 , H01L41/314
摘要： A method for manufacturing a piezoelectric device that includes a substrate, a piezoelectric layer directly or indirectly supported by the substrate and arranged above the substrate, a heater, and a heater electrode for driving the heater. Moreover, the method includes forming the piezoelectric layer, the heater, and the heater electrode and subjecting the piezoelectric device to heat treatment with heat generated from the heater by driving the heater by feeding electric power to the heater electrode.

8. 发明申请

US20170309811A1 METHOD FOR MANUFACTURING A PIEZOELECTRIC DEVICE 审中-公开
公开(公告)号：US20170309811A1
公开(公告)日：2017-10-26
申请号：US15641470
申请日：2017-07-05
申请人： Murata Manufacturing CO., Ltd.
发明人： KANSHO YAMAMOTO , Takuo Hada
IPC分类号： H01L41/29 , H01L41/338 , H01L41/332 , H05B3/03 , H01L41/08
CPC分类号： H01L41/29 , H01L41/0805 , H01L41/09 , H01L41/113 , H01L41/23 , H01L41/253 , H01L41/314 , H01L41/332 , H01L41/338 , H01L41/39 , H03H3/02 , H03H9/174 , H03H9/583 , H03H2003/0414 , H03H2009/02181 , H05B3/03 , H05B3/26
摘要： A method for manufacturing a piezoelectric device that includes a substrate, a piezoelectric layer directly or indirectly supported by the substrate and arranged above the substrate, a heater, and a heater electrode for driving the heater. Moreover, the method includes forming the piezoelectric layer, the heater, and the heater electrode and subjecting the piezoelectric device to heat treatment with heat generated from the heater by driving the heater by feeding electric power to the heater electrode.

9. 发明授权

US09753056B2 Acceleration sensor 有权
公开(公告)号：US09753056B2
公开(公告)日：2017-09-05
申请号：US14501109
申请日：2014-09-30
申请人： Murata Manufacturing Co., Ltd.
发明人： Takuo Hada , Katsumi Fujimoto , Hideya Horiuchi , Toshimaro Yoneda
IPC分类号： G01P15/097 , G01P15/09 , G01P15/10 , G01P15/08
CPC分类号： G01P15/097 , G01P15/09 , G01P15/10 , G01P2015/0814
摘要： A weight member includes two sides opposite to each other in an X-axis direction when looked at in a plan view. A vibrating beam includes one end portion connected at one location to a fixation member and the other end portion connected at one location to one of the two sides of the weight member in the X-axis direction when looked at in a plan view. The vibrating beam supports the weight member to be displaceable in the X-axis direction. A holding beam includes one end portion connected at one location to the fixation member and the other end portion connected at one location to the other of the two sides of the weight member opposing to each other in the X-axis direction when looked at in a plan view. The holding beam supports the weight member to be displaceable in the X-axis direction. A driver is disposed on the vibrating beam and vibrates the vibrating beam. A detector is disposed on the vibrating beam and configured to output a detection signal changes according to deformation of the vibrating beam.

10. 发明申请

US20170069820A1 PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC DEVICE 审中-公开
标题翻译：压电元件及制造压电元件的方法
公开(公告)号：US20170069820A1
公开(公告)日：2017-03-09
申请号：US15355657
申请日：2016-11-18
申请人： Murata Manufacturing Co., Ltd.
发明人： Takuo Hada , Kansho Yamamoto
IPC分类号： H01L41/047 , H01L41/29 , H01L41/053
CPC分类号： H01L41/047 , H01L41/053 , H01L41/0973 , H01L41/22 , H01L41/29 , H03H3/02 , H03H9/174 , H04R17/00 , H04R17/02 , H04R31/00
摘要： A piezoelectric device that includes a support layer, a lower electrode, a piezoelectric film and an upper electrode on a substrate. In the substrate, a first opening is provided that penetrates through at least part of the substrate in a thickness direction of the substrate. A second opening that faces the support layer and the first opening is provided above the first opening. An opening area of the first opening is smaller than an opening area of the second opening.
摘要翻译：一种在基板上包括支撑层，下电极，压电膜和上电极的压电器件。在基板中，提供在基板的厚度方向上穿透基板的至少一部分的第一开口。面向支撑层和第一开口的第二开口设置在第一开口的上方。第一开口的开口面积小于第二开口的开口面积。

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