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    • 2. 发明授权
    • Electromagnetic wave measuring apparatus
    • 电磁波测量仪
    • US08053733B2
    • 2011-11-08
    • US12616992
    • 2009-11-12
    • Shigeki NishinaMotoki Imamura
    • Shigeki NishinaMotoki Imamura
    • G01J5/02
    • G01N21/3581
    • A desired spatial resolution upon a measurement can be attained by making an electromagnetic wave including a terahertz wave (frequency thereof is equal to or more than 0.01 [THz], and equal to or less than 100 [THz]) incident to a device under test. An electromagnetic wave measurement device includes an incident lens which makes an electromagnetic wave to be measured having a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] incident to a device under a test while decreasing a beam diameter of the electromagnetic wave to be measured, a scanning stage which rotates, about a line orthogonal to an optical axis of the incident lens as a rotational axis, the device under the test or the optical axis, and an electromagnetic wave detector which detects the electromagnetic wave to be measured which has transmitted through the device under the test, where a coordinate on the optical axis of a position which gives the minimum value d of the beam diameter is different from a coordinate on the optical axis of the rotational axis.
    • 测量时的期望空间分辨率可以通过使包含入射到被测器件的太赫兹波(其频率等于或大于0.01 [THz],等于或小于100 [THz])的电磁波来实现 。 电磁波测量装置包括入射透镜,该入射透镜使得测量的电磁波具有等于或大于在测试时入射到设备的0.01 [THz]且等于或小于100 [THz]的频率,同时减小光束 要测量的电磁波的直径,围绕与入射透镜的光轴正交的线作为旋转轴旋转的扫描台,被测装置或光轴的电磁波检测器,以及检测 通过测试中的装置传输的要测量的电磁波,其中给出光束直径的最小值d的位置的光轴上的坐标不同于旋转轴的光轴上的坐标。
    • 6. 发明授权
    • Electromagnetic wave measuring apparatus, measurement method, a program, and a recording medium
    • 电磁波测量装置,测量方法,程序和记录介质
    • US08183528B2
    • 2012-05-22
    • US12487177
    • 2009-06-18
    • Eiji KatoShigeki NishinaMotoki ImamuraAkiyoshi IrisawaTomoyu Yamashita
    • Eiji KatoShigeki NishinaMotoki ImamuraAkiyoshi IrisawaTomoyu Yamashita
    • G01R23/16
    • G01N21/3581
    • According to the present invention, the CT is carried out based on parameters other than the absorption rate. An electromagnetic wave measurement device includes an electromagnetic wave output device 2 which outputs an electromagnetic wave at a frequency equal to or more than 0.01 [THz] and equal to or less than 100 [THz] toward a device under test 1, an electromagnetic wave detector 4 which detects the electromagnetic wave which has transmitted through the device under test 1, a relative position changing unit 6 which changes a relative position of an intersection 100 at which an optical path of the electromagnetic wave transmitting through the device under test 1 and the device under test 1 intersect with respect to the device under test 1, a phase deriving unit 12 which derives, based on a detected result by the electromagnetic wave detector 4, a phase in the frequency domain of the electromagnetic wave which has transmitted through the device under test 1, a sinogram deriving unit 16 which derives a sinogram based on a derived result by the phase deriving unit 12, and a cross sectional image deriving unit 18 that derives, based on the sinogram, an image of a cross section of the device under test 1 including a trajectory of the intersection 100.
    • 根据本发明,根据吸收速度以外的参数进行CT。 电磁波测量装置包括电磁波输出装置2,其以等于或大于0.01 [THz]且等于或小于100 [THz]的频率朝向被测设备1输出电磁波,电磁波检测器 4,其检测通过被测试装置1发送的电磁波;相对位置改变单元6,其改变通过被测试设备1发送的电磁波的光路和设备的相交位置100的相对位置; 测试1相对于被测设备1相交,相位导出单元12基于电磁波检测器4的检测结果,导出已经通过设备传输的电磁波的频域中的相位 测试1,基于相位导出单元12的导出结果导出正弦图的正弦图导出单元16,以及横截面ima ge导出单元18基于正弦图得出包括交会100的轨迹的被测设备1的横截面的图像。
    • 8. 发明授权
    • Apparatus and method for measuring optical characteristics and recording medium
    • 用于测量光学特性和记录介质的装置和方法
    • US06433865B1
    • 2002-08-13
    • US09975557
    • 2001-10-12
    • Eiji KimuraMotoki ImamuraToshio KawazawaSatoru Nagumo
    • Eiji KimuraMotoki ImamuraToshio KawazawaSatoru Nagumo
    • G01N2100
    • G01M11/335G01M11/333G01M11/338
    • To provide an apparatus for measuring chromatic dispersion when modulating frequency of a variable wavelength light source is different from modulating frequency of a fixed wavelength light source for reference. This apparatus is provided with a variable wavelength light phase comparator 24 for obtaining a phase difference &phgr;x-&phgr;x′ between a variable wavelength light component and a signal having the first modulating frequency fmx, a fixed wavelength light phase comparator 25 for obtaining a phase difference between a phase difference &phgr;0-&phgr;0′ between a fixed wavelength light component and an electrical signal having the second modulating frequency fm0, a phase difference converter 26 for converting the phase difference &phgr;0-&phgr;0′ calculated by the fixed wavelength light phase comparator 25 into &phgr;ex, which corresponds to the first modulating frequency fmx, and a true phase difference calculator 27 for measuring a true phase difference &phgr; between the phase difference &phgr;x-&phgr;x′ calculated by the variable wavelength light phase comparator 24, and the converted result &phgr;ex of phase difference converter 26, and obtains the true phase difference &phgr; from which an affect of contraction/extension of a DUT 30 is removed when the first modulating frequency fmx and the second modulating frequency fm0 are different, thereby measuring wave dispersion.
    • 提供一种用于测量可变波长光源的调制频率时的色散的装置与用于参考的固定波长光源的调制频率不同。该装置设置有可变波长光相位比较器24,用于获得相位差phix- 可变波长光分量和具有第一调制频率fmx的信号之间的“phix”,固定波长光相位比较器25,用于获得固定波长光分量与具有第一调制频率fmx的电信号之间的相位差phi0-phi0'之间的相位差 第二调制频率fm0,用于将由固定波长光相位比较器25计算出的相位差phi0-phi0'转换成对应于第一调制频率fmx的phiex的相位差转换器26和用于测量 相位差phix-phix'ca之间的真相位差phi 由可变波长光相位比较器24计算的相位差转换器26的转换结果phix,并获得当第一调制频率fmx和 第二调制频率fm0不同,从而测量波分散。
    • 10. 发明申请
    • Polarization mode dispersion measuring device, method, recording medium
    • 极化模式色散测量装置,方法,记录介质
    • US20050052638A1
    • 2005-03-10
    • US10491787
    • 2002-10-09
    • Takeshi OzekiTomoyu YamashitaMotoki Imamura
    • Takeshi OzekiTomoyu YamashitaMotoki Imamura
    • G01M11/02G01M11/00G01J4/00
    • G01M11/333G01M11/336
    • A polarization mode dispersion measuring device reduced in time required to measure polarization mode dispersion τPMD. A polarization controller (12) allows a first (second) incident light to apply a synthetic incident light to an object to be measured (30) in line with a p-polarization axis (s-polarization axis) in a polarization separator (16). Accordingly, the phase shift equivalent value (optical angle frequency differentiation) and amplitude equivalent value (square value) of a first incident light component (second incident light component) in an output from the polarization separator (16) measured by a first measuring unit (20a) (second measuring unit (20b)) are respectively the phase shift equivalent value and amplitude equivalent value of a first column T11, T21 (second column T12, T22) when the transfer function matrix of the object to be measured (30) is a 2×2 matrix to thereby allow a control unit (2) to determine the polarization mode dispersion r PMD of the object to be measured (30). Since there is no need of switching the orientation setting of light output from the polarization controller (12) with the setting left fixed, time required to measure polarization mode dispersion τPMD can be shortened.
    • 偏振模色散测量装置减少测量偏振模色散τPMD所需的时间。 偏振控制器(12)允许第一(第二)入射光根据偏振分离器(16)中的p偏振轴(s偏振轴)将合成入射光施加到待测量对象(30) 。 因此,由第一测量单元测量的偏振分离器(16)的输出中的第一入射光分量(第二入射光分量)的相移等效值(光学角度频率微分)和振幅等效值(平方值) 20a)(第二测量单元(20b))分别是当被测量对象(30)的传递函数矩阵为(30)时的第一列T11,T21(第二列T12,T22)的相移等效值和振幅当量值 2×2矩阵,从而允许控制单元(2)确定被测量物体的偏振模色散r PMD(30)。 由于不需要将固定的偏振控制器(12)的光的输出的取向设置切换,所以可以缩短测量偏振模色散τPMD所需的时间。