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    • 2. 发明申请
    • COMPOUND SEMICONDUCTOR DEPOSITION METHOD AND APPARATUS
    • 化合物半导体沉积方法和装置
    • US20120058627A1
    • 2012-03-08
    • US13266337
    • 2010-04-28
    • Motoichi OhtsuTadashi KawazoeShunsuke YamazakiKoichi KajiyamaMichinobu MizumuraKeiichi Ito
    • Motoichi OhtsuTadashi KawazoeShunsuke YamazakiKoichi KajiyamaMichinobu MizumuraKeiichi Ito
    • H01L21/20B05C9/08
    • C23C16/481C23C14/548C23C16/303C23C16/52C30B25/00C30B29/403H01L21/0237H01L21/0242H01L21/0254H01L21/0262H01L33/0062
    • Provided is a compound semiconductor deposition method of adjusting the luminous wavelength of a compound semiconductor of a ternary or higher system in a nanometer order in depositing the compound semiconductor on a substrate. In the compound semiconductor deposition method of depositing a compound semiconductor of a ternary or higher system on a substrate, propagation light of a smaller energy than a desired ideal excitation energy for the compound semiconductor is irradiated onto the substrate 13 while depositing the compound semiconductor on the substrate 13, near-field light is generated based on the irradiated propagation light from fine particles of the compound semiconductor deposited on the substrate 13, new vibrational levels for the compound semiconductor are formed in multiple stages based on the generated near-field light, and a component in the compound semiconductor corresponding to the excitation energy is excited with the propagation light through a vibrational level, among the new vibrational levels, which has an excitation energy equal to or smaller than the energy of the propagation light is excited to desorb the component.
    • 提供一种在将化合物半导体沉积在基板上时以纳米级调节三元或更高系统的化合物半导体的发光波长的化合物半导体沉积方法。 在将三元或更高系统的化合物半导体沉积在衬底上的化合物半导体沉积方法中,将化合物半导体所需的理想激发能的能量较小的传播光照射到衬底13上,同时将化合物半导体沉积在 基板13,基于沉积在基板13上的化合物半导体的微粒的照射的传播光产生近场光,基于产生的近场光,以多个阶段形成化合物半导体的新的振动电平,以及 对应于激发能的化合物半导体中的成分被传播光激发,通过振动水平,激发能量等于或小于传播光的能量的新的振动水平被激发,从而解吸部件 。
    • 7. 发明申请
    • Optical Fiber Probe, Optical Detection Device, And Optical Detection Method
    • 光纤探头,光学检测装置和光学检测方法
    • US20080073518A1
    • 2008-03-27
    • US11547032
    • 2006-02-02
    • Izumi ItohMasato TakadaTaroh TerashiMotoichi OhtsuTakashi YatsuiMotonobu Kourogi
    • Izumi ItohMasato TakadaTaroh TerashiMotoichi OhtsuTakashi YatsuiMotonobu Kourogi
    • G01N23/00
    • G01Q60/22
    • An optical detection device image is disclosed that allows fast measurements using near-field light at high resolution and high efficiency but without necessity of position alignment of an optical fiber probe. The optical detection device includes an optical fiber probe having a core for propagating light with an optical probe being formed at a front end of the core; a movement control unit to move the optical fiber probe to approach or depart from a sample; and a detection unit to detect light from the sample surface, wherein on the front end surface of the core of the optical probe, there are a first exit section on a peripheral side for emitting propagating light and a second exit section for seeping out the near-field light, the first exit section and the second exit section are formed in a concentric manner, and the tilt angle of the first exit section is different from the tilt angle of the second exit section.
    • 公开了一种光学检测装置图像,其允许使用高分辨率和高效率的近场光进行快速测量,但不需要光纤探针的位置对准。 光学检测装置包括光纤探针,其具有用于传播光的芯,光纤探针形成在芯的前端; 移动控制单元,用于移动光纤探针以接近或离开样本; 以及检测单元,用于检测来自所述样品表面的光,其中在所述光学探针的所述芯的前端表面上,在用于发射传播光的外围侧上具有第一出射部分,以及用于渗出所述近端的第二出射部分 第一出口部和第二出口部以同心方式形成,第一出口部的倾斜角度与第二出口部的倾斜角度不同。