会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明申请
    • Pattern Forming Material, Pattern Forming Apparatus and Pattern Forming Process
    • 图案成型材料,图案形成装置和图案形成工艺
    • US20080088813A1
    • 2008-04-17
    • US11661855
    • 2005-09-05
    • Masanobu TakashimaShinichiro Serizawa
    • Masanobu TakashimaShinichiro Serizawa
    • G03F7/20G03C1/73
    • G03F7/001G03F7/0007G03F7/027G03F7/031G03F7/11Y10S430/114
    • The present invention aims to provide a pattern forming material that is capable of suppressing generation of wrinkles and static electric charge on a substrate in a lamination step in which the pattern forming material is laminated on the substrate as well as capable of forming a fine and precise pattern; a pattern forming apparatus provided with the pattern forming material; and a pattern forming process using the pattern forming material. To this end, the present invention provides a pattern forming material having a support, a photosensitive layer, and a protective film, the photosensitive layer and the protective film being formed in this order on the support, wherein the number of fish-eyes each having an area of 2,000 μm2 or more and a maximum height measured from the film surface of 1 μm to 7 μm residing in the protective film is 50/m2 to 1,000/m2.
    • 本发明的目的在于提供一种图案形成材料,其能够抑制图案形成材料层叠在基板上的叠层工序中的基板上的皱纹和静电电荷的产生,并且能够形成精细且精确的 模式; 设置有图案形成材料的图案形成装置; 以及使用图案形成材料的图案形成处理。 为此,本发明提供一种具有支撑体,感光层和保护膜的图案形成材料,感光层和保护膜依次形成在支撑体上,其中鱼眼数量 从保护膜中的1μm至7μm的膜表面测量的最大高度为2,000μm2以上的面积为50 / m 2〜1000 / 2< 2>。
    • 8. 发明授权
    • Pattern forming material, pattern forming apparatus and pattern forming process
    • 图案形成材料,图案形成装置和图案形成工艺
    • US07662540B2
    • 2010-02-16
    • US11661855
    • 2005-09-05
    • Masanobu TakashimaShinichiro Serizawa
    • Masanobu TakashimaShinichiro Serizawa
    • G03F7/00G03F7/004
    • G03F7/001G03F7/0007G03F7/027G03F7/031G03F7/11Y10S430/114
    • The present invention aims to provide a pattern forming material that is capable of suppressing generation of wrinkles and static electric charge on a substrate in a lamination step in which the pattern forming material is laminated on the substrate as well as capable of forming a fine and precise pattern; a pattern forming apparatus provided with the pattern forming material; and a pattern forming process using the pattern forming material.To this end, the present invention provides a pattern forming material having a support, a photosensitive layer, and a protective film, the photosensitive layer and the protective film being formed in this order on the support, wherein the number of fish-eyes each having an area of 2,000μm2 or more and a maximum height measured from the film surface of 1μm to 7μm residing in the protective film is 50/m2 to 1,000/m2.
    • 本发明的目的在于提供一种图案形成材料,其能够抑制图案形成材料层叠在基板上的叠层工序中的基板上的皱纹和静电电荷的产生,并能够形成精细且精确的 模式; 设置有图案形成材料的图案形成装置; 以及使用图案形成材料的图案形成处理。 为此,本发明提供一种具有支撑体,感光层和保护膜的图案形成材料,感光层和保护膜依次形成在支撑体上,其中鱼眼数量 面积为2000m2以上,从保护膜的1um〜7um的膜表面测得的最大高度为50 / m 2〜1000 / m 2。