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1. 发明申请

US20090212011A1 MICRO-LENS ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING THEREOF 有权
标题翻译：微透镜阵列基板及其制造方法
公开(公告)号：US20090212011A1
公开(公告)日：2009-08-27
申请号：US12432803
申请日：2009-04-30
申请人： Moriaki ABE , Hiroyuki MINAMI , Kenichi SATOH , Kazuhiro SHINODA , Junichi MIZUMA
发明人： Moriaki ABE , Hiroyuki MINAMI , Kenichi SATOH , Kazuhiro SHINODA , Junichi MIZUMA
IPC分类号： B29D11/00 , B44C1/22
CPC分类号： G02B3/0075 , G02B3/0012 , G02B3/0031 , G02F1/133526
摘要： A micro-lens substrate having a precise micro-lens array suitable for higher resolution, the micro-lens array substrate of high quality without having a distortion, and a method for manufacturing thereof are provided.In the micro-lens array substrate of the present invention, a micro-lens array formed of a plurality of consecutive concave lens-shaped micro-lenses is directly formed in a surface of a quartz substrate or glass substrate, and the micro-lens array is formed by a transfer method based on dry-etching. In the micro-lens array substrate of the present invention, a taper portion is formed toward the surface of the substrate in a peripheral portion of the micro-lens array in the quartz substrate or glass substrate.In a method for manufacturing the micro-lens array substrate of the present invention, a resist layer having a plurality of consecutive lens-shaped concave portions is formed in a surface of a quartz or glass substrate, the lens-shaped concave portion of the resist layer is transferred to the substrate by dry-etching, and a micro-lens array is formed by injecting a resin into the lens-shaped concave portion of this substrate. In addition, a taper portion is formed in a peripheral portion similarly to the formation of the lens-shaped concave portion, and a micro-lens array is formed by injecting a resin into the lens-shaped concave portion and taper portion.
摘要翻译：提供了具有适合于更高分辨率的精确微透镜阵列的微透镜基板，具有高质量的微透镜阵列基板而不具有变形，及其制造方法。在本发明的微透镜阵列基板中，在石英基板或玻璃基板的表面直接形成由多个连续的凹透镜形微透镜形成的微透镜阵列，微透镜阵列通过基于干蚀刻的转印方法形成。在本发明的微透镜阵列基板中，在石英基板或玻璃基板的微透镜阵列的周边部分，朝向基板的表面形成锥形部。在本发明的微透镜阵列基板的制造方法中，在石英或玻璃基板的表面形成具有多个连续的透镜状凹部的抗蚀剂层，抗蚀剂的透镜状凹部通过干法蚀刻将层转移到基板上，并且通过将树脂注入到该基板的透镜形凹部中而形成微透镜阵列。此外，与透镜状凹部的形成同样，在周边部形成有锥形部，通过将树脂注入到透镜状的凹部和锥形部中而形成微透镜阵列。

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