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1. 发明授权

US5438747A Method of making a thin film merged MR head with aligned pole tips 失效
标题翻译：制造薄膜的方法将具有对准极尖的MR头并入
公开(公告)号：US5438747A
公开(公告)日：1995-08-08
申请号：US208398
申请日：1994-03-09
申请人： Mohamad T. Krounbi , Jyh-Shuey J. Lo , Ching H. Tsang , Robert M. Valletta
发明人： Mohamad T. Krounbi , Jyh-Shuey J. Lo , Ching H. Tsang , Robert M. Valletta
IPC分类号： G11B5/31 , G11B5/39
CPC分类号： G11B5/3967 , G11B5/3116 , G11B5/3163 , Y10T29/49048
摘要： A merged MR head is provided which has vertically aligned sidewalls so as to minimize side-fringing and improve off-track performance. The bottom pole piece P1, which comprises the second shield layer S2 of the read head, has a pedestal pole tip with a short length dimension. A pedestal pole tip with a length as short as two times the length of the gap layer G optimally minimizes the sidewriting and improves off-track performance. The bottom pole tip structure of the write head is constructed by ion beam milling using the top pole tip structure as a mask. The ion beam milling is directed at an angle to the sidewalls of the top pole tip structure which causes the bottom pole tip structure to be milled with sidewalls which align with the top pole tip structure. The ion beam milling can comprise two angled beams, either sequentially or simultaneously, the first beam performing primarily a cutting operation and some clean up work while the second beam primarily conducts clean up work of the redeposition of the debris caused by the cutting. In another embodiment, a single angled ion beam can be employed, provided its angle is within a particular range.
摘要翻译：提供了具有垂直对齐的侧壁的合并的MR头，以便使边缘最小化并且提高离轨性能。包括读取头的第二屏蔽层S2的底极片P1具有短长度尺寸的基座极头。长度短到间隙层G的长度的两倍的基座极尖最优化了笔迹的最小化并改善了离轨性能。写头的底极尖端结构是通过使用顶极尖端结构作为掩模的离子束铣削构成的。离子束铣削与顶极尖端结构的侧壁成一角度地引导，这导致底极尖端结构被与顶极尖端结构对准的侧壁铣削。离子束铣削可以包括两个成角度的梁，顺序地或同时地，第一梁主要执行切割操作和一些清理工作，而第二梁主要进行由切割引起的碎片的再沉积的清理工作。在另一个实施例中，只要其角度在特定范围内即可使用单角度离子束。

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