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    • 1. 发明申请
    • Apparatus for cleaning a wafer
    • 清洁晶片的装置
    • US20070051393A1
    • 2007-03-08
    • US11516101
    • 2006-09-06
    • Mo-Hyun ChoDong-Chul HeoDuk-Lyol LeeTae-Hwan KimTae-Wan Kim
    • Mo-Hyun ChoDong-Chul HeoDuk-Lyol LeeTae-Hwan KimTae-Wan Kim
    • B08B3/00B08B3/04
    • B08B3/04H01L21/67051
    • An apparatus for cleaning a wafer includes a rotary chuck for supporting and rotating a wafer, a cleaning solution supply unit for supplying a cleaning solution onto the wafer, a bowl spaced apart from and surrounding the rotary chuck, and a protrusion portion protruded from the rotary chuck and having a slope face with respect to the rotary chuck. The protrusion portion can prevent an ascending air stream from being generated by a vortex when the rotary chuck rotates. A guide member can be positioned between the bowl and the rotary chuck to guide the cleaning solution downwardly to a bottom portion of the bowl. A protector can extend from an inner side surface of the guide member toward the rotary chuck, to prevent an ascending air stream caused by the vortex.
    • 一种用于清洗晶片的设备包括用于支撑和旋转晶片的旋转卡盘,用于将清洁溶液供应到晶片上的清洁溶液供应单元,与旋转卡盘间隔开并围绕旋转卡盘的碗,以及从旋转盘 并且相对于旋转卡盘具有倾斜面。 当旋转卡盘旋转时,突出部分可以防止上升的气流由涡流产生。 引导构件可以定位在碗和旋转卡盘之间,以将清洁溶液向下引导到碗的底部。 保护器可以从引导构件的内侧表面朝向旋转卡盘延伸,以防止由涡流引起的上升气流。
    • 9. 发明授权
    • Display device with an embedded touch panel and a method of manufacturing the same
    • 具有嵌入式触摸面板的显示装置及其制造方法
    • US08810534B2
    • 2014-08-19
    • US13226901
    • 2011-09-07
    • Tae-Hwan Kim
    • Tae-Hwan Kim
    • G06F3/041G06F3/044
    • G06F3/041G06F3/044G06F2203/04103G06F2203/04107
    • The present invention relates to a display device with an embedded touch panel which eliminates FPC mounted to a shielding electrode for applying a shielding signal to the shielding electrode, to reduce a cost and simplify a fabrication process.The touch panel embedded display device includes a liquid crystal panel having an upper substrate and a lower substrate faced to each other with liquid crystals disposed therebetween, and a touch panel mounted on the liquid crystal panel, wherein the touch panel includes a sensor substrate having first and second pattern portions which function as position sensing electrodes and a shielding signal supply line formed on an upper side thereof for supplying a shielding signal, a shielding electrode formed on an underside of the sensor substrate, and two or more shielding electrode connection portions for connecting the shielding electrode to the shielding signal supply line.
    • 本发明涉及一种具有嵌入式触摸面板的显示装置,该显示装置消除了安装在屏蔽电极上用于向屏蔽电极施加屏蔽信号的FPC,以降低成本并简化制造工艺。 触摸面板嵌入式显示装置包括具有上部基板和下部基板的液晶面板,液晶面板彼此面对并具有液晶,并且安装在液晶面板上的触摸面板,其中,触摸面板包括具有第一 以及用作位置检测电极的第二图案部分和形成在其上侧的用于提供屏蔽信号的屏蔽信号供给线,形成在传感器基板的下侧的屏蔽电极和用于连接的两个或更多个屏蔽电极连接部 屏蔽电极到屏蔽信号电源线。