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    • 3. 发明申请
    • Method of manufacturing and testing semiconductor device using assembly substrate
    • 使用组装基板制造和测试半导体器件的方法
    • US20050146337A1
    • 2005-07-07
    • US11055627
    • 2005-02-11
    • Mitsunori MatsunagaTsugumi Matsuishi
    • Mitsunori MatsunagaTsugumi Matsuishi
    • G01R31/26G01R1/04G01R31/28G01R31/30H01L21/66G01R31/02
    • G01R31/2863G01R1/0408
    • A method of manufacturing a semiconductor device including mounting semiconductor chips, each chip having pads, on respective areas of a front surface of an assembly substrate, electrically connecting corresponding terminals on a rear surface of the assembly substrate through wirings of the assembly substrate to the pads of the semiconductor chips, respective terminals and wirings electrically connected to a semiconductor chip being confined within the corresponding area of the assembly substrate on which the semiconductor chip is mounted, inputting test waveforms to the pads of the plurality of semiconductor chips through the corresponding terminals and wirings and testing the semiconductor chips, and, after the testing the semiconductor chips, cutting the assembly substrate with a rotating blade into pieces corresponding to the respective areas. The terminals and wirings connecting the terminals to the semiconductor chips are not cut by the rotating blade.
    • 一种制造半导体器件的方法,包括在组件衬底的前表面的相应区域上安装半导体芯片,每个芯片具有衬垫,通过组装衬底的布线将电连接到组件衬底的后表面上的相应端子, 将与半导体芯片电连接的各个端子和布线限制在其上安装有半导体芯片的组装衬底的相应区域内,通过相应的端子向多个半导体芯片的焊盘输入测试波形,以及 布线并测试半导体芯片,并且在测试半导体芯片之后,用旋转叶片将组装衬底切割成与各个区域相对应的片段。 将端子与半导体芯片连接的端子和配线不会被旋转刀片切断。