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    • 2. 发明申请
    • THREE-DIMENSIONAL SHAPE MEASURING APPARATUS
    • 三维形状测量装置
    • US20130201488A1
    • 2013-08-08
    • US13610052
    • 2012-09-11
    • Mitsuhiro ISHIHARA
    • Mitsuhiro ISHIHARA
    • G01B11/24
    • G01B11/24G02B21/0028G02B21/0044G02B21/006G02B21/008
    • According to one embodiment, a three-dimensional shape measuring apparatus includes at least an aperture plate that is provided with a plurality of confocal apertures which are two-dimensionally arranged to have a predetermined arrangement period, and an aperture plate displacement portion that displaces the aperture plate at a constant speed in a predetermined direction perpendicular to the optical axis direction. Further, the aperture plate is provided with a cover member which is moved integrally with the aperture plate and which includes a transparent body allowing the light beams from the light source to pass therethrough and to be irradiated to the plurality of confocal apertures, and protects the plurality of confocal apertures from dust. Further, an imaging optical system, by which each of reflected light beams is guided to a photo-detector, is designed in consideration of optical properties of the whole optical system including the transparent body of the cover member.
    • 根据一个实施例,一种三维形状测量装置至少包括孔板,该孔板设置有二维排列成具有预定布置周期的多个共焦孔,以及孔径位移部分,其使孔径移动 在垂直于光轴方向的预定方向上以恒定的速度平板。 此外,孔板设置有与孔板一体地移动的盖构件,其包括允许来自光源的光束通过的透明体并照射到多个共焦孔,并且保护 多个共焦孔从灰尘。 此外,考虑到包括盖构件的透明体的整个光学系统的光学特性,设计了将每个反射光束引导到光电检测器的成像光学系统。
    • 4. 发明申请
    • FOCUS POSITION CHANGING APPARATUS AND CONFOCAL OPTICAL APPARATUS USING THE SAME
    • 聚焦位置变化装置和使用相同的共焦光学装置
    • US20130242396A1
    • 2013-09-19
    • US13610112
    • 2012-09-11
    • Mitsuhiro ISHIHARA
    • Mitsuhiro ISHIHARA
    • G02B7/16G02B1/11
    • G02B7/16G02B21/0024G02B21/248
    • According to one embodiment, a focus position changing apparatus is provided on an optical path of a confocal optical apparatus having a light source and an objective lens and is configured to change a focus position of the objective lens in an optical axis direction of the objective lens. The focus position changing apparatus includes at least a plurality of optical path changing pieces and a rotating plate. Each of the plurality of optical path changing pieces is differ from each other in at least one of a refractive index and a thickness. On the rotating plate, the plurality of optical path changing pieces is arranged along a rotation direction of the rotating plate so as to cross an optical axis of the objective lens. And an anti-reflection layer is formed in a predetermined region on a surface of the rotating plate on a side of the light source.
    • 根据一个实施例,焦点位置改变装置设置在具有光源和物镜的共焦光学装置的光路上,并且被配置为在物镜的光轴方向上改变物镜的聚焦位置 。 聚焦位置改变装置至少包括多个光路改变件和旋转板。 多个光路改变片中的每一个在折射率和厚度中的至少一个方面彼此不同。 在旋转板上,多个光路改变片沿着旋转板的旋转方向布置成与物镜的光轴交叉。 并且在光源侧的旋转板的表面上的预定区域中形成防反射层。