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    • 5. 发明授权
    • Semiconductor optical device
    • 半导体光学器件
    • US06407410B1
    • 2002-06-18
    • US09291069
    • 1999-04-14
    • Mitsuhiko OgiharaYukio NakamuraHiroshi HamanoMasumi Taninaka
    • Mitsuhiko OgiharaYukio NakamuraHiroshi HamanoMasumi Taninaka
    • H01L3300
    • H01L33/025H01L27/153H01L33/24H01L33/30
    • A light emitting diode in accordance with the present invention has a p-n junction which is formed by selectively implanting an impurity from the surface of a semiconductor substrate, and also has an etched groove which is formed in the p-n junction area near the surface of the substrate. In the area where the etched groove is formed, the p-type area and the n-type area are spatially separated in the region of the substrate, therefore the movement of minority carriers does not occur. As a consequence, in the light emitting diode in accordance with the present invention, the movement of minority carriers in the p-n junction interface occurs at a deeper position of the semiconductor substrate. In a deep position of the semiconductor substrate, the recombination rate of minority carriers is high. Therefore if the recombination of minority carriers is increased in a deep position, the emission efficiency of the light emitting diode increases.
    • 根据本发明的发光二极管具有通过从半导体衬底的表面选择性地注入杂质形成的pn结,并且还具有形成在衬底表面附近的pn结区域中的蚀刻槽 。 在形成蚀刻槽的区域中,p型区域和n型区域在基板的区域中在空间上分离,因此不会发生少数载流子的移动。 结果,在根据本发明的发光二极管中,p-n结界面中的少数载流子的移动发生在半导体衬底的较深位置处。 在半导体衬底的深位置,少数载流子的复合率高。 因此,如果少量载流子的复合在深位置增加,则发光二极管的发射效率增加。