会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 5. 发明授权
    • Isolation in micromachined single crystal silicon using deep trench insulation
    • 使用深沟槽绝缘的微加工单晶硅中的隔离
    • US06472290B2
    • 2002-10-29
    • US09756981
    • 2001-01-09
    • Dong-il ChoSangwoo LeeSangjun ParkSangchul Lee
    • Dong-il ChoSangwoo LeeSangjun ParkSangchul Lee
    • H01L2176
    • B81B3/0086B81B2203/0136B81B2203/0307B81B2203/04
    • An electrical isolation method for silicon microelectromechanical systems provides trenches filled with insulation layers that support released silicon structures. The insulation layer that fills the trenches passes through the middle portion of the electrodes, anchors the electrodes to the silicon substrate and supports the electrode. The insulation layers do not attach the electrode to the sidewalls of the substrate, thereby forming an electrode having an “island” shape. Such an electrode is spaced far apart from the adjacent walls of the silicon substrate providing a small parasitic capacitance for the resulting structure. The isolation method is consistent with fabricating a complex structure or a structure with a complicated electrode arrangement. Furthermore, the structure and the electrode are separated from the silicon substrate in a single release step. Additionally, a metal layer is deposited on the surfaces of the structure and electrodes without using separate photolithography and etching steps.
    • 用于硅微机电系统的电隔离方法提供填充有支撑释放的硅结构的绝缘层的沟槽。 填充沟槽的绝缘层通过电极的中间部分,将电极固定到硅衬底并支撑电极。 绝缘层不将电极附着到基板的侧壁,从而形成具有“岛”形状的电极。 这样的电极与硅衬底的相邻壁间隔得很远,为所得到的结构提供了小的寄生电容。 隔离方法与制造具有复杂电极布置的复杂结构或结构一致。 此外,在单个释放步骤中,结构和电极与硅衬底分离。 此外,金属层沉积在结构和电极的表面上,而不使用单独的光刻和蚀刻步骤。