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1. 发明授权

US07937834B2 Method of fabricating capacitive ultrasonic transducers 有权
标题翻译：制造电容式超声换能器的方法
公开(公告)号：US07937834B2
公开(公告)日：2011-05-10
申请号：US12049224
申请日：2008-03-14
申请人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
发明人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
IPC分类号： H05K3/02
CPC分类号： B06B1/0292 , Y10T29/43 , Y10T29/49005 , Y10T29/49117 , Y10T29/49128 , Y10T29/49156
摘要： A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed space apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.
摘要翻译：电容式超声波换能器包括：第一电极，形成在第一电极上的绝缘层，形成在绝缘层上的至少一个支撑框架，以及与第一电极间隔开形成的第二电极，其中，第一电极和第二电极限定电容式超声波换能器的有效振荡区域，并且限定振荡的有效区域的第一电极和第二电极的相应长度基本相同。

2. 发明授权

US07626891B2 Capacitive ultrasonic transducer and method of fabricating the same 有权
标题翻译：电容式超声波换能器及其制造方法
公开(公告)号：US07626891B2
公开(公告)日：2009-12-01
申请号：US11427194
申请日：2006-06-28
申请人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
发明人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
IPC分类号： H04R19/00
CPC分类号： B06B1/0292 , H04R19/00
摘要： A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.
摘要翻译：电容式超声波换能器包括：第一电极，形成在第一电极上的绝缘层，形成在绝缘层上的至少一个支撑框架，以及与第一电极间隔开形成的第二电极，其中，第一电极和第二电极限定电容式超声波换能器的有效振荡区域，并且限定振荡的有效区域的第一电极和第二电极的相应长度基本相同。

3. 发明申请

US20080235936A1 Capacitive Ultrasonic Transducer and Method of Fabricating the Same 有权
标题翻译：电容式超声波传感器及其制造方法
公开(公告)号：US20080235936A1
公开(公告)日：2008-10-02
申请号：US12049224
申请日：2008-03-14
申请人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
发明人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
IPC分类号： H04R31/00 , H01G7/00
CPC分类号： B06B1/0292 , Y10T29/43 , Y10T29/49005 , Y10T29/49117 , Y10T29/49128 , Y10T29/49156
摘要： A capacitive ultrasonic transducer includes a first electrode, an insulating layer formed on the first electrode, at least one support frame formed on the insulating layer, and a second electrode formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.
摘要翻译：电容式超声波换能器包括：第一电极，形成在第一电极上的绝缘层，形成在绝缘层上的至少一个支撑框架，以及与第一电极间隔开形成的第二电极，其中，第一电极和第二电极限定电容式超声波换能器的有效振荡区域，并且限定振荡的有效区域的第一电极和第二电极的相应长度基本相同。

4. 发明申请

US20070097791A1 Capacitive ultrasonic transducer and method of fabricating the same 审中-公开
标题翻译：电容式超声波换能器及其制造方法
公开(公告)号：US20070097791A1
公开(公告)日：2007-05-03
申请号：US11324408
申请日：2006-01-04
申请人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
发明人： Ming-Wei Chang , Tsung-Ju Gwo , Tse-Min Deng , Zhen-Yuan Chung
IPC分类号： H04R19/00
CPC分类号： B06B1/0292 , Y10T29/43 , Y10T29/49005 , Y10T29/49117 , Y10T29/49128 , Y10T29/49156
摘要： A capacitive ultrasonic transducer and method of fabricating the same are disclosed, whereas the capacitive ultrasonic transducer is a stacking of multiple metal layers. The fabrication method of the invention is characterized in that: the structure and cavity of excitation are formed by lithographing and etching the sacrificial layer and other stacking layers, whereas the sacrificial layer and the other stacking layer are made of metal, and moreover, a protective bulk is formed on the capacitive ultrasonic transducer by a means of metal depositing. It is noted that not only the structure of capacitive ultrasonic transducer of the invention has a bulk for protection, which is different to that of a conventional capacitive ultrasonic transducer, but also the method of fabricating the same can do without the steps of electrode formation, high-temperature processing and annealing, which enable the method to have simplified process and thus cost less than that of conventional methods. The capacitive ultrasonic transducer can be integrated into a variety of integrated circuit that enables the same to be vastly implemented in consumer electronic products, and products of bio-medical science and other engineering fields.
摘要翻译：公开了一种电容式超声波换能器及其制造方法，而电容式超声波换能器是多层金属层的堆叠。本发明的制造方法的特征在于：通过对牺牲层和其它堆叠层进行平版印刷和蚀刻来形成激发的结构和空腔，而牺牲层和其它堆叠层由金属制成，此外，通过金属沉积的方式在电容式超声换能器上形成体。应当注意，本发明的电容式超声波换能器的结构不仅具有与传统的电容式超声波换能器不同的保护体，而且其制造方法也可以不用电极形成步骤，高温处理和退火，使得该方法具有简化的工艺，因此成本比常规方法的成本低。电容式超声波换能器可以集成到各种集成电路中，使其能够在消费电子产品，生物医学科学和其他工程领域的产品中大量实施。

5. 发明申请

US20080139943A1 ULTRASONIC WAVE DEVICE 审中-公开
标题翻译：超声波装置
公开(公告)号：US20080139943A1
公开(公告)日：2008-06-12
申请号：US11567836
申请日：2006-12-07
申请人： Tse-Min Deng , Ming-Wei Chang , Te-I Chiu , Mu-Yueh Chen
发明人： Tse-Min Deng , Ming-Wei Chang , Te-I Chiu , Mu-Yueh Chen
IPC分类号： A61B8/00
CPC分类号： A61M37/0092 , A61N2007/0034
摘要： An ultrasonic wave device has a first flexible layer, a second flexible layer, a flexible circuit between the first flexible layer and the second flexible layer, and one or more arrays of capacitive ultrasonic transducer between the first flexible layer and the second flexible layer electrically coupled to the flexible circuit. The array of capacitive ultrasonic transducer is configured to transmit ultrasonic energy through the second flexible layer in response to electrical energy applied via the flexible circuit.
摘要翻译：超声波装置具有第一柔性层，第二柔性层，在第一柔性层和第二柔性层之间的柔性电路，以及在第一柔性层和第二柔性层之间的一个或多个电容式超声换能器阵列电耦合到柔性电路。电容式超声波换能器的阵列被配置为响应于通过柔性电路施加的电能而通过第二柔性层传输超声波能量。

6. 发明申请

US20080188753A1 Flexible capacitive ultrasonic transducer and method of fabricating the same 有权
标题翻译：柔性电容式超声波换能器及其制造方法
公开(公告)号：US20080188753A1
公开(公告)日：2008-08-07
申请号：US11703910
申请日：2007-02-07
申请人： Ming-Wei Chang , Tse-Min Deng , Te-I Chiu , Mu-Yue Chen , Da-Chen Pang , Ping-Ta Tai
发明人： Ming-Wei Chang , Tse-Min Deng , Te-I Chiu , Mu-Yue Chen , Da-Chen Pang , Ping-Ta Tai
IPC分类号： A61B8/00
CPC分类号： B06B1/0292 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： A capacitive ultrasonic transducer includes a flexible layer, a first conductive layer on the flexible layer, a support frame on the first conductive layer, the support frame including a flexible material, a membrane over the support frame being spaced apart from the first conductive layer by the support frame, the membrane including the flexible material, a cavity defined by the first conductive layer, the support frame and the membrane, and a second conductive layer on the membrane.
摘要翻译：电容式超声波换能器包括柔性层，柔性层上的第一导电层，第一导电层上的支撑框架，支撑框架包括柔性材料，支撑框架上的膜与第一导电层间隔开，所述支撑框架，所述膜包括所述柔性材料，由所述第一导电层，所述支撑框架和所述膜限定的空腔以及所述膜上的第二导电层。

7. 发明授权

US07721397B2 Method for fabricating capacitive ultrasonic transducers 有权
标题翻译：制造电容式超声换能器的方法
公开(公告)号：US07721397B2
公开(公告)日：2010-05-25
申请号：US11703910
申请日：2007-02-07
申请人： Ming-Wei Chang , Tse-Min Deng , Te-I Chiu , Mu-Yue Chen , Da-Chen Pang , Ping-Ta Tai
发明人： Ming-Wei Chang , Tse-Min Deng , Te-I Chiu , Mu-Yue Chen , Da-Chen Pang , Ping-Ta Tai
IPC分类号： H01G7/00
CPC分类号： B06B1/0292 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/4902 , Y10T29/4908
摘要： A capacitive ultrasonic transducer includes a flexible layer, a first conductive layer on the flexible layer, a support frame on the first conductive layer, the support frame including a flexible material, a membrane over the support frame being spaced apart from the first conductive layer by the support frame, the membrane including the flexible material, a cavity defined by the first conductive layer, the support frame and the membrane, and a second conductive layer on the membrane.
摘要翻译：电容式超声波换能器包括柔性层，柔性层上的第一导电层，第一导电层上的支撑框架，支撑框架包括柔性材料，支撑框架上的膜与第一导电层间隔开，所述支撑框架，所述膜包括所述柔性材料，由所述第一导电层，所述支撑框架和所述膜限定的空腔以及所述膜上的第二导电层。

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