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    • 1. 发明授权
    • Micromachined optomechanical switches
    • 微加工光机械开关
    • US06498870B1
    • 2002-12-24
    • US09063644
    • 1998-04-20
    • Ming WuLi FanAnis Husain
    • Ming WuLi FanAnis Husain
    • G02B626
    • G02B6/3514B82Y30/00G02B6/3518G02B6/3546G02B6/357G02B6/358G02B6/3584
    • A micromachined plate 11, called a torsion plate, selectively pivots upon a substrate responsively to electrical force so as to move an attached micromirror 12 in a same plane; thereby to accurately selectively intercept, and to reflect, a light beam 2 that is moving parallel to the substrate; forming thus an optomechanical switch 1. The electrical force may be electromagnetic 3 in nature or, preferably, electrostatic. In various embodiments the pivoting torsion plate 11 with the micromirror 12 affixed may be (i) biased off the substrate by a three-dimensional structure 14 and/or by a “reshaped” torsion beam 11c, (ii) bent as plate 11d, and operated push OR pull, push AND pull, or push AND push, in a rocking operation, (iii) elevated above the substrate upon a self-assembling “micro-elevator structure” 16, and/or (iv) moved greatly in angular position by action of a “micro-flap” 11f. A new design spring-loaded landing electrode 18, and a torsion microhinge 131-134, further enhance performance. The micromachined, or Micro Electro Mechanical Systems (MEMS), optomechanical switch 1 so formed is both fast and accurate to switch light over large angles up to 180° while being highly resistant to sticking, or “stiction”.
    • 称为扭板的微加工板11选择性地响应于电力而在基板上枢轴转动,以将附接的微镜12移动到同一平面内; 从而准确地选择性地截取和反射平行于基板移动的光束2; 形成光机械开关1.电力本质上可以是电磁3,或者优选静电。 在各种实施例中,具有固定微镜12的枢转扭转板11可以(i)通过三维结构14和/或通过“重新成形”的扭转梁11c偏离衬底,(ii)弯曲成板11d,以及 (iii)在自组装“微电梯结构”16上升高到基板上方,和/或(iv)在角度位置大大地移动 通过“微瓣”11f的作用。 新的设计弹簧着陆电极18和扭转微型加热器131-134进一步增强了性能。 微机械或微电子机械系统(MEMS),如此形成的光学机械开关1既快速又准确,可以在大角度切换180°,同时高度抵抗粘附或“粘性”。
    • 3. 发明授权
    • Optomechanical matrix switches including collimator arrays
    • 机械矩阵开关包括准直器阵列
    • US06445841B1
    • 2002-09-03
    • US09483275
    • 2000-01-13
    • Steffen GloecknerAnis HusainLi Fan
    • Steffen GloecknerAnis HusainLi Fan
    • G02B635
    • G02B6/3514G02B6/352G02B6/3546G02B6/3556G02B6/357G02B6/3576G02B26/0833G02B26/085H04Q11/0005H04Q2011/003H04Q2011/0049
    • Various configurations of optomechanical matrix and broadcast switches are disclosed herein. One such optomechanical matrix switch includes a substrate and a plurality of optomechanical switching cells coupled thereto. Each of the optomechanical switching cells includes a mirror and an actuator. The matrix switch further includes an array of collimator elements, each of the collimator elements being in optical alignment with one of the optomechanical switching cells. Also disclosed herein is a distributed matrix switch including first and second optomechanical matrix switches. The first and second optomechanical matrix switches respectively include first and second pluralities of optomechanical switching cells mounted upon first and second substrates. A collimator array is interposed between the first and second matrix switches in optical alignment with the first and second pluralities of optomechanical switching cells.
    • 本文公开了机电矩阵和广播交换机的各种配置。 一种这样的光机械矩阵开关包括衬底和耦合到其上的多个光机械转换单元。 每个光机械切换单元包括反射镜和致动器。 矩阵开关还包括准直器元件阵列,准直器元件中的每一个与光学机械转换单元之一光学对准。 这里还公开了包括第一和第二光机械矩阵开关的分布式矩阵开关。 第一和第二视光机械矩阵开关分别包括安装在第一和第二基板上的第一和第二多个光学机械转换单元。 在与第一和第二多个光学机械开关单元光学对准的第一和第二矩阵开关之间插入准直器阵列。
    • 6. 发明授权
    • Micromachined optical switching devices
    • 微加工光开关器件
    • US06445840B1
    • 2002-09-03
    • US09483269
    • 2000-01-13
    • Marc FernandezAnis HusainLi Fan
    • Marc FernandezAnis HusainLi Fan
    • G02B635
    • G02B6/3514G02B6/352G02B6/3546G02B6/357G02B6/3576G02B26/0833G02B26/085H04Q11/0005H04Q2011/0026H04Q2011/003H04Q2011/0039H04Q2011/0049
    • Various 3-port and 4-port micromachined optomechanical matrix switches are disclosed herein. In accordance with one aspect of the invention there is provided an optomechanical matrix switch including a substrate and a first plurality of optomechanical switching cells coupled thereto. Each of the first plurality of optomechanical switching cells is arranged to be in optical alignment with a first input port. A second plurality of optomechanical switching cells is also coupled to the substrate, each of the second plurality of optomechanical switching cells being in optical alignment with a second input port. In another aspect of the present invention an optomechanical matrix switch is provided which includes a substrate and a first plurality of optomechanical switching cells coupled thereto. Each of the first plurality of optomechanical switching cells is placed in optical alignment with one of a corresponding first plurality of input ports and with one of a corresponding first plurality of output ports. The matrix switch further includes a second plurality of optomechanical switching cells coupled to the substrate. Each of the second plurality of optomechanical switching cells is placed in optical alignment with one of a corresponding second plurality input ports and with one of a corresponding second plurality of output ports.
    • 本文公开了各种3端口和4端口微加工机电矩阵开关。 根据本发明的一个方面,提供了一种包括基板和耦合到其上的第一多个光机械切换单元的光机械矩阵开关。 第一多个光学机械转换单元中的每一个被布置成与第一输入端口光学对准。 第二组多个光机械转换单元也耦合到基板,第二多个光机械切换单元中的每一个与第二输入端口对准。 在本发明的另一方面,提供了一种光机械矩阵开关,其包括基板和耦合到其上的第一多个光机械切换单元。 第一组多个光机械切换单元中的每一个被放置成与对应的第一多个输入端口中的一个和相应的第一多个输出端口中的一个对准。 矩阵开关还包括耦合到衬底的第二多个光机械转换单元。 第二组多个光学机械式开关单元中的每一个被放置成与相应的第二多个输入端口中的一个和相应的第二多个输出端口中的一个对准。