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1. 发明授权

US07198961B2 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope 失效
标题翻译：使用近场扫描光学显微镜修改现有微结构和纳米结构的方法
公开(公告)号：US07198961B2
公开(公告)日：2007-04-03
申请号：US10813372
申请日：2004-03-30
申请人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
发明人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
IPC分类号： H01L21/00
CPC分类号： B81C1/00492 , B81C99/0065 , G01Q60/22 , G01Q80/00 , Y10S977/851
摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.
摘要翻译：一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。提供微结构器件预制件。其顶表面的一部分与NSOM成型以形成地形图像。该分析部分被选择为包括现有特征。基于地形图像为顶面的成型部分定义图像坐标系。使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。

2. 发明申请

US20050221577A1 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope 失效
标题翻译：使用近场扫描光学显微镜修改现有微结构和纳米结构的方法
公开(公告)号：US20050221577A1
公开(公告)日：2005-10-06
申请号：US10813372
申请日：2004-03-30
申请人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
发明人： Ming Li , Makoto Ishizuka , Chen-Hsiung Cheng
IPC分类号： B23K26/06 , B81C1/00 , B81C99/00 , G01Q10/04 , G01Q40/00 , G01Q60/18 , G01Q60/22 , G01Q80/00 , H01L21/76
CPC分类号： B81C1/00492 , B81C99/0065 , G01Q60/22 , G01Q80/00 , Y10S977/851
摘要： A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.
摘要翻译：一种使用NSOM激光微加工系统制造微结构的方法，其包括现有特征上的至少一个精细特征。提供微结构器件预制件。其顶表面的一部分与NSOM成型以形成地形图像。该分析部分被选择为包括现有特征。基于地形图像为顶面的成型部分定义图像坐标系。使用地形图像确定参考点的坐标和图像坐标系中现有特征的方位。使用确定的参考点的坐标和现有特征的方向，使NSOM的探针尖端对准现有特征的一部分。用微型加工激光加工微结构器件预制件的上表面，以形成现有特征的精细特征。

3. 发明申请

US20060043257A1 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining 失效
标题翻译：用于校准激光加工的近场扫描光学显微镜尖端的方法和装置
公开(公告)号：US20060043257A1
公开(公告)日：2006-03-02
申请号：US10932617
申请日：2004-09-02
申请人： Chen-Hsiung Cheng , Ming Li
发明人： Chen-Hsiung Cheng , Ming Li
IPC分类号： H01J40/14
CPC分类号： B23K26/04 , B23K26/0624 , G01Q40/00 , G01Q60/22
摘要： A system for measuring radiation at a peak wavelength that is radiated from a probe tip of a near-field scanning optical microscope (NSOM) probe used for laser machining, including: a laser source; the NSOM probe; a coupling substrate that is substantially transmissive to the peak wavelength; an NSOM mount to controllably hold the probe and the coupling substrate; an NSOM probe monitor coupled to the mount; an NSOM controller; and a photodetector optically coupled to the substrate. Light is coupled into the probe. The mount includes a Z motion stage. The probe monitor determines the distance between the probe tip and the coupling substrate. The controller is coupled to the probe monitor and the motion stage. It controls the distance between the probe tip and the coupling substrate such that radiation is coupled from the probe tip into the coupling substrate. The photodetector measures the power of this radiation.
摘要翻译：一种用于测量从用于激光加工的近场扫描光学显微镜（NSOM）探针的探针尖端辐射的峰值波长处的辐射的系统，包括：激光源; NSOM探针; 基本上对峰值波长透射的耦合衬底; NSOM安装座，用于可控制地保持探头和耦合衬底; 耦合到安装座的NSOM探针监视器; 一个NSOM控制器以及与该基板光耦合的光电检测器。光耦合到探头中。底座包括一个Z运动台。探针监测器确定探针尖端和耦合衬底之间的距离。控制器耦合到探头监视器和运动台。它控制探针尖端和耦合衬底之间的距离，使得辐射从探针尖端耦合到耦合衬底中。光电检测器测量这种辐射的功率。

4. 发明申请

US20050218315A1 Near-field scanning optical microscope for laser machining of micro- and nano- structures 失效
标题翻译：用于微结构和纳米结构激光加工的近场扫描光学显微镜
公开(公告)号：US20050218315A1
公开(公告)日：2005-10-06
申请号：US10813503
申请日：2004-03-30
申请人： Ming Li , Chen-Hsiung Cheng
发明人： Ming Li , Chen-Hsiung Cheng
IPC分类号： G01Q70/02 , B23K26/06 , H01J3/14
CPC分类号： B23K26/0665 , B23K26/064 , B23K26/0648
摘要： A near-field scanning optical microscope (NSOM) laser micromachining system for laser machining features on surfaces using an ultrafast laser source and a method of laser machining such features. The system includes: the ultrafast laser source to generate pulses of laser light having pulse durations less than 1 ns and a peak wavelength; an NSOM probe having a substantially cylindrical shape; an NSOM mount to controllably hold the NSOM probe and the microstructure workpiece to be machined; an NSOM probe monitor coupled to the NSOM mount for determining the distance between the probe tip of the NSOM probe and the surface; and an NSOM controller coupled to the NSOM probe monitor, and motion stages in the NSOM mount. The NSOM mount includes an XY motion stage and a Z motion stage. These motion stages are couple to either the NSOM probe or the microstructure workpiece, or one motion stage to each.
摘要翻译：使用超快激光源的激光加工特征的近场扫描光学显微镜（NSOM）激光微加工系统和激光加工这种特征的方法。该系统包括：超快激光源，产生具有小于1ns的脉冲持续时间和峰值波长的激光脉冲; 具有大致圆柱形形状的NSOM探针; NSOM安装座可控制地固定NSOM探针和要加工的微结构工件; 耦合到NSOM安装座的NSOM探针监测器，用于确定NSOM探针的探针末端与表面之间的距离; 以及耦合到NSOM探针监视器的NSOM控制器以及NSOM安装中的运动级。 NSOM安装座包括XY运动台和Z运动台。这些运动阶段耦合到NSOM探针或微结构工件，或者连接到每个运动阶段。

5. 发明授权

US07151244B2 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining 失效
公开(公告)号：US07151244B2
公开(公告)日：2006-12-19
申请号：US10932617
申请日：2004-09-02
申请人： Chen-Hsiung Cheng , Ming Li
发明人： Chen-Hsiung Cheng , Ming Li
IPC分类号： G02B7/04
CPC分类号： B23K26/04 , B23K26/0624 , G01Q40/00 , G01Q60/22
摘要： A system for measuring radiation at a peak wavelength that is radiated from a probe tip of a near-field scanning optical microscope (NSOM) probe used for laser machining, including: a laser source; the NSOM probe; a coupling substrate that is substantially transmissive to the peak wavelength; an NSOM mount to controllably hold the probe and the coupling substrate; an NSOM probe monitor coupled to the mount; an NSOM controller; and a photodetector optically coupled to the substrate. Light is coupled into the probe. The mount includes a Z motion stage. The probe monitor determines the distance between the probe tip and the coupling substrate. The controller is coupled to the probe monitor and the motion stage. It controls the distance between the probe tip and the coupling substrate such that radiation is coupled from the probe tip into the coupling substrate. The photodetector measures the power of this radiation.

6. 发明授权

US06621045B1 Workpiece stabilization with gas flow 失效
标题翻译：工件稳定与气流
公开(公告)号：US06621045B1
公开(公告)日：2003-09-16
申请号：US10266936
申请日：2002-10-08
申请人： Xinbing Liu , Ming Li , Chen-Hsiung Cheng
发明人： Xinbing Liu , Ming Li , Chen-Hsiung Cheng
IPC分类号： B23K2638
CPC分类号： B23K26/38 , B23K26/0624 , B23K26/142 , B23K26/1435 , B23K26/1436 , B23K26/1437 , B23K26/1438 , B23K26/147
摘要： A method is provided for maintaining a workpiece in a focal plane of a laser drilling system. The method includes: providing a workpiece holder that is adapted to releasably retain a workpiece on a planar surface thereof, the planar surface having a recess extending therein; positioning the workpiece onto a planar surface of a workpiece holder, such that the workpiece extends across the recess formed in the workpiece holder and an exposed surface of the workpiece aligns with a focal plane of a laser drilling system; projecting a laser beam from the laser drilling system onto the exposed surface of the workpiece, thereby forming an ablation on the exposed surface of the workpiece; and directing a flow of gas onto the exposed surface of the workpiece substantially concurrent with the step of projecting a laser beam, such that the flow of gas substantially impinges on an area of the exposed surface that extends across the recess formed in the workpiece holder, thereby maintaining the exposed surface of the workpiece in the focal plane of the laser drilling system during the laser drilling operation.
摘要翻译：提供了一种用于将工件保持在激光钻孔系统的焦平面中的方法。该方法包括：提供适于将工件可释放地保持在其平坦表面上的工件保持器，该平坦表面具有在其中延伸的凹部; 将工件定位在工件保持器的平坦表面上，使得工件延伸穿过形成在工件保持器中的凹部，并且工件的暴露表面与激光钻孔系统的焦平面对齐; 将来自激光钻孔系统的激光束投射到工件的暴露表面上，从而在工件的暴露表面上形成消融; 并且在投射激光束的步骤的基础上同时将气体流引导到工件的暴露表面上，使得气体流基本上撞击暴露表面的延伸穿过形成在工件保持器中的凹部的区域，从而在激光钻孔操作期间将工件的暴露表面保持在激光钻孔系统的焦平面内。

7. 发明授权

US07053351B2 Near-field scanning optical microscope for laser machining of micro- and nano- structures 失效
标题翻译：用于微结构和纳米结构激光加工的近场扫描光学显微镜
公开(公告)号：US07053351B2
公开(公告)日：2006-05-30
申请号：US10813503
申请日：2004-03-30
申请人： Ming Li , Chen-Hsiung Cheng
发明人： Ming Li , Chen-Hsiung Cheng
IPC分类号： G02B7/04
CPC分类号： B23K26/0665 , B23K26/064 , B23K26/0648
摘要： A near-field scanning optical microscope (NSOM) laser micromachining system for laser machining features on surfaces using an ultrafast laser source and a method of laser machining such features. The system includes: the ultrafast laser source to generate pulses of laser light having pulse durations less than 1 ns and a peak wavelength; an NSOM probe having a substantially cylindrical shape; an NSOM mount to controllably hold the NSOM probe and the microstructure workpiece to be machined; an NSOM probe monitor coupled to the NSOM mount for determining the distance between the probe tip of the NSOM probe and the surface; and an NSOM controller coupled to the NSOM probe monitor, and motion stages in the NSOM mount. The NSOM mount includes an XY motion stage and a Z motion stage. These motion stages are couple to either the NSOM probe or the microstructure workpiece, or one motion stage to each.
摘要翻译：使用超快激光源的激光加工特征的近场扫描光学显微镜（NSOM）激光微加工系统和激光加工这种特征的方法。该系统包括：超快激光源，产生具有小于1ns的脉冲持续时间和峰值波长的激光脉冲; 具有大致圆柱形形状的NSOM探针; NSOM安装座可控制地固定NSOM探针和要加工的微结构工件; 耦合到NSOM安装座的NSOM探针监测器，用于确定NSOM探针的探针末端与表面之间的距离; 以及耦合到NSOM探针监视器的NSOM控制器以及NSOM安装中的运动级。 NSOM安装座包括XY运动台和Z运动台。这些运动阶段耦合到NSOM探针或微结构工件，或者连接到每个运动阶段。

8. 发明申请

US20070229853A1 Nanometer contact detection method and apparatus for precision machining 审中-公开
标题翻译：纳米接触检测方法及精密加工设备
公开(公告)号：US20070229853A1
公开(公告)日：2007-10-04
申请号：US11391171
申请日：2006-03-28
申请人： Chen-Hsiung Cheng
发明人： Chen-Hsiung Cheng
IPC分类号： G01B11/14
CPC分类号： G01B11/14 , B23Q17/2233 , B23Q17/24
摘要： A method and apparatus for determining the distance between the tip of a machining tool formed of a substantially transmissive material and a surface. A beam of narrow bandwidth light is diffracted by directing the beam of narrow bandwidth light between the surface and the tip of the machining tool such that a portion of the diffracted beam is optically coupled into the machining tool via near-field optically coupling. The power of the portion of the diffracted beam optically coupled into the machining tool is measured. The distance between the tip of the machining tool and the surface is then determined based on the measured power.
摘要翻译：一种用于确定由基本上透射的材料形成的加工工具的尖端与表面之间的距离的方法和装置。通过在加工工具的表面和尖端之间引导窄带宽光束来衍射光束，使得衍射光束的一部分通过近场光耦合光学耦合到加工工具中。测量光耦合到加工工具中的衍射光束的部分的光焦度。然后基于测量的功率确定加工工具的尖端与表面之间的距离。

9. 发明授权

US07265840B2 Coupling method for coupling high power optical beams into an optical waveguide 失效
标题翻译：将高功率光束耦合到光波导中的耦合方法
公开(公告)号：US07265840B2
公开(公告)日：2007-09-04
申请号：US11154316
申请日：2005-06-16
申请人： Chen-Hsiung Cheng
发明人： Chen-Hsiung Cheng
IPC分类号： G01B11/00
CPC分类号： G02B6/4296 , G02B6/4206 , G02B6/4225 , G02B6/4227
摘要： A method for determining an improved alignment to couple a beam having a high power level into a waveguide. The power of the beam is reduced to a minimum test power level. The reduced-power beam is aligned in a test alignment such that it forms a beam spot on the coupling surface of the waveguide. The coupled power level of the coupled portion of the beam is measured. The power level of the reduced-power beam is increased in steps to a maximum test power level. Corresponding coupled power levels for each power level are measured. If the coupled power level does not saturate and the corresponding coupling efficiency is greater than or equal to the desired coupling efficiency, the current test alignment is determined to be the improved alignment. Otherwise, the test alignment is changed and the new test alignment is tested to see whether it meets the desired standards.
摘要翻译：一种用于确定改进的对准以将具有高功率水平的束耦合到波导中的方法。光束的功率降低到最小测试功率水平。减小光束在测试对准中对准，使得其在波导的耦合表面上形成光束点。测量光束的耦合部分的耦合功率电平。减小功率光束的功率电平逐步增加到最大测试功率电平。测量每个功率电平的相应的耦合功率电平。如果耦合功率电平不饱和，并且相应的耦合效率大于或等于期望的耦合效率，则将当前测试对准确定为改进的对准。否则，更改测试对齐方式，并测试新的测试对准，以查看其是否符合所需的标准。

10. 发明授权

US06931991B1 System for and method of manufacturing gravure printing plates 失效
公开(公告)号：US06931991B1
公开(公告)日：2005-08-23
申请号：US10814934
申请日：2004-03-31
申请人： Chen-Hsiung Cheng , Xinbing Liu
发明人： Chen-Hsiung Cheng , Xinbing Liu
IPC分类号： B23K26/00 , B23K26/38 , B41C1/05 , B41N1/06 , B41N6/00 , G03F7/00 , B41N6/06
CPC分类号： B41C1/05
摘要： A method of operating a laser drilling system to manufacture gravure printing plates without etching or the use of hazardous chemicals includes activating a laser drilling system, including a picosecond laser, light valves, and a mechanism adapted to rotate a gravure cylinder blank. Operation of the light valves, includes setting the light valves to block and/or allow pulses of laser energy propagating from the laser drilling system that can ablate a linear pattern of cells along a substantially entire length of the gravure cylinder blank. Drilling of cells includes targeting the laser drilling system on the gravure cylinder blank, such that ablation of materials occurs as sub-beams propagate along an optical path to the target area and impinge upon the gravure cylinder blank, wherein specific cells within the target area of the gravure cylinder blank are drilled or not drilled according to settings of the light valves.

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