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1. 发明授权

US07334708B2 Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical 失效
标题翻译：整体块，化学物质输送系统和交付超纯化学品的方法
公开(公告)号：US07334708B2
公开(公告)日：2008-02-26
申请号：US10064220
申请日：2002-06-21
申请人： Mindi Xu , Tay Sayasane , Joseph E. Paganessi , Gregory M. Jursich , Naoyuki Nakamoto , Yukinobu Nishikawa , Herve E. Dulphy , Guillaume Rameau , Lorrin Honda
发明人： Mindi Xu , Tay Sayasane , Joseph E. Paganessi , Gregory M. Jursich , Naoyuki Nakamoto , Yukinobu Nishikawa , Herve E. Dulphy , Guillaume Rameau , Lorrin Honda
IPC分类号： B67D5/58
CPC分类号： B08B9/032 , C03B19/1415 , C03B37/01413 , C03B2207/32 , C23C16/448 , C23C16/45561 , F17C9/02 , F17C2205/0332 , F17C2205/0338 , F17C2221/014 , F17C2221/016 , F17C2221/017 , F17C2221/05 , F17C2223/0123 , F17C2223/033 , F17C2227/044 , F17C2227/045 , F17C2270/0518
摘要： Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks. The invention also relates to a method for delivering an ultrapure chemical from a chemical container to a point of use, by connecting a chemical container block, containing an ultrapure chemical, to a chemical delivery block and introducing the ultrapure chemical to a point of use. The methods may also include the use of one or more integral blocks. The chemical delivery systems and methods of the invention may be used in a variety of applications. In particular, the invention may be used in electronics fabrication, optical fiber manufacture or semiconductor manufacture.
摘要翻译：提供了一体化块，化学传递系统和将超纯化学品输送到使用点或另一整体块的方法。更具体地，积分块包括再充电容器块，加压气体块，吹扫气体块，废物回收块，真空块，溶剂供应块，脱气块，控制块和过滤块。可以选择各种积分块以形成特别适用于给定应用的化学物质输送系统。化学品输送系统通常将包括化学容器块，化学物质输送块和符合化学容器块和化学物质输送块的使用点以及一个或多个整体块。本发明还涉及通过将含有超纯化学品的化学容器块连接到化学物质输送块并将超纯化学品引入到使用点，将超纯化学品从化学容器输送到使用点的方法。所述方法还可以包括使用一个或多个积分块。本发明的化学输送系统和方法可以用于各种应用中。特别地，本发明可用于电子制造，光纤制造或半导体制造。

2. 发明授权

US07906094B2 Method for producing a high purity trisilane product from the pyrolysis of disilane 有权
标题翻译：从乙硅烷的热解生产高纯度丙硅烷产品的方法
公开(公告)号：US07906094B2
公开(公告)日：2011-03-15
申请号：US11863524
申请日：2007-09-28
申请人： Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell, Jr. , Derong Zhou , Thomas K. Moncur
发明人： Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell, Jr. , Derong Zhou , Thomas K. Moncur
IPC分类号： C01B33/04
CPC分类号： C01B33/04 , C01B33/046
摘要： Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.
摘要翻译：在单个反应器中从乙硅烷的热解生产丙硅烷的方法。

3. 发明申请

US20080175784A1 METHOD FOR PRODUCING A HIGH PURITY TRISILANE PRODUCT FROM THE PYROLYSIS OF DISILANE 有权
标题翻译：从高分子化学生产高纯度TRISILANE产品的方法
公开(公告)号：US20080175784A1
公开(公告)日：2008-07-24
申请号：US11863524
申请日：2007-09-28
申请人： Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell , Derong Zhou , Thomas K. Moncur
发明人： Cyril Bourasseau , Gregory M. Jursich , Mindi Xu , John P. Borzio , Donald W. Mitchell , Derong Zhou , Thomas K. Moncur
IPC分类号： C01B33/04
CPC分类号： C01B33/04 , C01B33/046
摘要： Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.
摘要翻译：在单个反应器中从乙硅烷的热解生产丙硅烷的方法。

4. 发明授权

US5897847A Method for extending the gas lifetime of excimer lasers 失效
标题翻译：扩展准分子激光器的气体寿命的方法
公开(公告)号：US5897847A
公开(公告)日：1999-04-27
申请号：US114285
申请日：1993-09-01
申请人： Gregory M. Jursich , William A. Von Drasek
发明人： Gregory M. Jursich , William A. Von Drasek
IPC分类号： H01S3/036 , H01S3/041 , H01S3/225 , G01B13/00
CPC分类号： H01S3/225 , H01S3/036
摘要： A method for extending the gas lifetime of an excimer laser by removing CF.sub.4 impurity, which comprises:a) reacting CF.sub.4, an undesirable impurity which forms and is contained in the lasing gases, with an amount of an oxidizing gas additive effective to produce one or more compounds which are condensible with refrigeration means, without reducing laser output below a predetermined acceptable level; andb) condensing said one or more compounds produced in step a) with refrigeration means, substantially without condensing said one or more rare gases therewith, thereby removing said CF.sub.4 impurity from said excimer laser and extending the gas lifetime of the laser.
摘要翻译：通过除去CF 4杂质来延长准分子激光器的气体寿命的方法，其包括：a）使形成并包含在激发气体中的不期望的杂质与一定量的氧化气体添加剂反应，CF4有效地产生一种或更多可与制冷装置冷凝的化合物，而不会将激光输出降低到预定的可接受水平以下; 和b）将步骤a）中制备的一种或多种化合物与制冷装置冷凝，基本上不与所述一种或多种稀有气体冷凝，从而从所述准分子激光器中除去所述CF 4杂质并延长激光器的气体寿命。

5. 发明授权

US07312165B2 Codeposition of hafnium-germanium oxides on substrates used in or for semiconductor devices 失效
标题翻译：在半导体器件中使用的基板上的铪 - 锗氧化物的沉积
公开(公告)号：US07312165B2
公开(公告)日：2007-12-25
申请号：US11124451
申请日：2005-05-05
申请人： Gregory M. Jursich , Ronald S. Inman
发明人： Gregory M. Jursich , Ronald S. Inman
IPC分类号： H01L31/31
CPC分类号： H01L21/0228 , C23C16/40 , C23C16/45531 , H01L21/02181 , H01L21/02205 , H01L21/3141 , H01L21/31604 , H01L21/31645
摘要： Methods of film deposition using metals and metal oxides. A thin film of germanium oxide and an oxide of a non-germanium metal is deposited by ALD by alternating deposition of first and second precursor compounds, wherein the first precursor compound includes a metal other than germanium, and the second precursor compound includes germanium.
摘要翻译：使用金属和金属氧化物的薄膜沉积方法。通过交替沉积第一和第二前体化合物，通过ALD沉积氧化锗和非锗金属的氧化物的薄膜，其中第一前体化合物包括除锗之外的金属，第二前体化合物包括锗。

6. 发明授权

US06581649B2 Methods and apparatus for delivering high purity liquids with low vapor pressure 失效
标题翻译：用于输送低蒸气压的高纯度液体的方法和装置
公开(公告)号：US06581649B2
公开(公告)日：2003-06-24
申请号：US09905327
申请日：2001-07-13
申请人： Gregory M. Jursich
发明人： Gregory M. Jursich
IPC分类号： B65B3100
CPC分类号： B67D7/0272
摘要： Methods and apparatus for delivery of high purity reactive liquids using gaseous assist are described, the apparatus comprising a container body, the container body having fluidly connected thereto a gas inlet and a reactive liquid outlet, the gas inlet fitted with a means adapted to hold a gas filter media, and a gas filter media positioned within said means adapted to hold a gas filter media, the gas inlet having a gas inlet valve, the liquid outlet having a liquid outlet valve.
摘要翻译：描述了使用气体助剂输送高纯度反应性液体的方法和装置，所述装置包括容器主体，容器主体具有流体连接到其上的气体入口和反应性液体出口，气体入口装配有适于保持气体过滤介质和位于所述装置内的适于保持气体过滤介质的气体过滤介质，所述气体入口具有气体入口阀，所述液体出口具有液体出口阀。

7. 发明授权

US06361750B1 Systems for purification of boron trichloride 有权
公开(公告)号：US06361750B1
公开(公告)日：2002-03-26
申请号：US09725965
申请日：2000-11-29
申请人： Derong Zhou , Gregory M. Jursich , Earle R. Kebbekus , John P. Borzio , Jason R. Uner
发明人： Derong Zhou , Gregory M. Jursich , Earle R. Kebbekus , John P. Borzio , Jason R. Uner
IPC分类号： B01J804
摘要： Processes are disclosed for increasing the condensed phase production of BCl3 comprising less than about 10 ppm phosgene, less than 10 ppm chlorine, and less than 10 ppm HCl. In one embodiment the process comprises injecting an inert gas into a container having condensed BCl3 therein, the condensed BCl3 having therein a minor portion of phosgene impurity. A major portion of the phosgene in the condensed BCl3 is decomposed to carbon monoxide and chlorine by increasing temperature to produce a phosgene deficient stream. The temperature of the phosgene deficient stream is then decreased, and contacted with an adsorbent to remove the chlorine in the stream by adsorption to form a chlorine and phosgene free condensed stream. The chlorine and phosgene free stream is stripped using an inert gas to form a BCl3 product condensed stream, and an inert gas is used to pump the BCl3 product condensed stream to a product receiver.

8. 发明授权

US5063035A Enhanced performance of alumina for the removal of low-level fluorine from gas streams 失效
标题翻译：用于从气体流中去除低水平氟化物的氧化铝的增强性能
公开(公告)号：US5063035A
公开(公告)日：1991-11-05
申请号：US512410
申请日：1990-04-23
申请人： Paul S. Leondaridis , William A. Von Drasek , Gregory M. Jursich
发明人： Paul S. Leondaridis , William A. Von Drasek , Gregory M. Jursich
IPC分类号： B01D53/34 , B01D53/68 , B01J23/26
CPC分类号： B01D53/68
摘要： Low-level fluorine concentrations are removed from gases by conducting a gas stream containing fluorine over an alumina treated with chromium oxide material, thereby effectively eliminating fluorine from the gas while preventing the formation of toxic oxygen difluoride by-product.
摘要翻译：通过在氧化铬材料处理的氧化铝上进行含氟气流，从气体中除去低浓度的氟浓度，从而有效地从气体中除去氟，同时防止形成有毒的二氟化氧副产物。

9. 发明授权

US07175696B2 Method and apparatus for corrosive gas purification 有权
标题翻译：腐蚀性气体净化方法和装置
公开(公告)号：US07175696B2
公开(公告)日：2007-02-13
申请号：US10369341
申请日：2003-02-18
申请人： Derong Zhou , John P. Borzio , Gregory M. Jursich , Earle R. Kebbekus
发明人： Derong Zhou , John P. Borzio , Gregory M. Jursich , Earle R. Kebbekus
IPC分类号： B01D3/00
CPC分类号： B01D53/002 , B01D1/0094 , B01D1/305 , B01D3/34 , B01D5/009 , B01D53/26
摘要： Herein is disclosed a method and an apparatus for preparing a highly purified gas from a crude liquid comprising the gas and one or more of a metal, particulates, water vapor, or a volatile impurity. The method comprises: (a) vaporizing the crude liquid, to yield (i) a first vapor stream comprising the gas and (ii) a first liquid stream comprising the gas; (b) removing water vapor, particulates, or both from the first vapor stream, to yield a second vapor stream comprising the gas; (c) condensing the second vapor stream, to yield a second liquid stream comprising the gas; and (d) sparging the second liquid stream with an inert gas, to yield (i) a third vapor stream comprising the gas and (ii) a third liquid stream comprising the highly purified gas. Also disclosed is a method for preparing an adsorbent to effectively remove water vapor from the gas, as well as an adsorbent so prepared.
摘要翻译：本文公开了一种从包含气体和一种或多种金属，微粒，水蒸气或挥发性杂质的粗液中制备高纯度气体的方法和装置。该方法包括：（a）蒸发粗液体，以产生（i）包含气体的第一蒸气流和（ii）包含该气体的第一液流; （b）从第一蒸汽流中除去水蒸气，颗粒物或二者，以产生包含该气体的第二蒸气流; （c）冷凝第二蒸气流，产生包含气体的第二液体流; 和（d）用惰性气体喷射第二液体流，产生（i）包含气体的第三蒸气流和（ii）包含高度纯化气体的第三液体流。还公开了一种制备吸附剂以有效地从气体中除去水蒸气的方法，以及如此制备的吸附剂。

10. 发明授权

US07141500B2 Methods for forming aluminum containing films utilizing amino aluminum precursors 有权
标题翻译：使用氨基铝前体形成含铝膜的方法
公开(公告)号：US07141500B2
公开(公告)日：2006-11-28
申请号：US10844579
申请日：2004-05-13
申请人： Gregory M. Jursich , Ronald S. Inman
发明人： Gregory M. Jursich , Ronald S. Inman
IPC分类号： H01L21/44
CPC分类号： C23C16/45553 , C23C16/403 , H01L21/02178 , H01L21/02181 , H01L21/02194 , H01L21/02205 , H01L21/0228 , H01L21/3145 , H01L21/31616 , H01L21/31645 , H01L21/318
摘要： A method of forming an aluminum containing film on a substrate includes providing a precursor having the chemical structure: Al(NR1R2)(NR3R4)(NR5R6); where each of R1, R2, R3, R4, R5 and R6 is independently selected from the group consisting of hydrogen and an alkyl group including at least two carbon atoms. The precursor is utilized to form a film on the substrate including at least one of aluminum oxide, aluminum nitride and aluminum oxy-nitride. Each of the R1–R6 groups can be the same or different and can by straight or branched chain alkyls. An exemplary precursor that has is useful in forming aluminum containing films is tris diethylamino aluminum.
摘要翻译：在基材上形成含铝膜的方法包括提供具有以下化学结构的前体：Al（NR 1 R 2 R 2）（NR 3 R 2） R 4 R 4）（NR 5 R 6）; 其中R 1，R 2，R 3，R 4，R 5， R 3和R 6独立地选自氢和包括至少两个碳原子的烷基。该前体用于在基底上形成包含氧化铝，氮化铝和氮氧化铝中的至少一种的膜。 R 1〜R 6基团中的每一个可以相同或不同，并且可以是直链或支链烷基。可用于形成含铝膜的示例性前体是三乙基氨基铝。

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