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    • 1. 发明授权
    • Imprint apparatus
    • 印刷装置
    • US08021141B2
    • 2011-09-20
    • US12582732
    • 2009-10-21
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • B29C59/00B29C35/08
    • B29C59/022B29C2035/0827B29C2059/023
    • An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
    • 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案,在与形成凹凸面的面相反的微细图案层的表面上的树脂层,树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量,第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。
    • 2. 发明申请
    • IMPRINT APPARATUS
    • US20100098799A1
    • 2010-04-22
    • US12582732
    • 2009-10-21
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • Miho SasakiMasahiko OginoAkihiro MiyauchiNoritake ShizawaKyoichi Mori
    • B29C59/16B29C59/02
    • B29C59/022B29C2035/0827B29C2059/023
    • An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
    • 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案,在与形成凹凸面的面相反的微细图案层的表面上的树脂层,树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量,第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。