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    • 2. 发明授权
    • Laser beam generating apparatus
    • 激光束发生装置
    • US06404786B1
    • 2002-06-11
    • US09543136
    • 2000-04-05
    • Kenji KondoMichio OkaHiroyuki Wada
    • Kenji KondoMichio OkaHiroyuki Wada
    • H01S310
    • G02F1/3501G02F2001/3505
    • A laser beam in the ultraviolet region is generated at high power for along period. A green laser beam generated by a laser oscillator comes incident into a resonator from behind a first curved mirror, and circulates there, reflected by each mirror. By passing a barium borate crystal, it causes a secondary harmonic (a laser beam in the ultraviolet region) to be generated, which is taken out of the resonator via a second curved mirror. The beam waist of the laser beam passing the barium borate crystal is set to 46 &mgr;m, about double the conventional thickness, by adjusting the distance between the first curved mirror and a second flat mirror. As a result, the power density of the laser beam in the barium borate crystal is reduced to ¼ of the value according to the related art, and it is made possible to avoid rapid degradation of the barium borate crystal by excessive squeezing of the laser beam.
    • 紫外线区域的激光束在高功率下产生一段时间。 由激光振荡器产生的绿色激光束从第一曲面镜的后面入射到谐振器中,并在那里循环,由每个反射镜反射。 通过使硼酸钡晶体通过,产生二次谐波(紫外区域中的激光束),其通过第二曲面镜从谐振器中取出。 通过硼酸钡晶体的激光束的束腰通过调整第一曲面镜和第二平面镜之间的距离而设定为46μm,约为传统厚度的两倍。 结果,根据现有技术,硼酸钡晶体中的激光束的功率密度降低到1/4的值,并且可以避免过度挤压激光束导致硼酸钡晶体的快速降解 。
    • 3. 发明授权
    • Measurement method and apparatus
    • 测量方法和装置
    • US06403966B1
    • 2002-06-11
    • US09339851
    • 1999-06-25
    • Michio Oka
    • Michio Oka
    • G01J142
    • G02B21/16
    • A measurement method and a measurement apparatus for measuring the structure of a micro-structure or the structure along the depth of an object for measurement. The laser light from a solid-state laser light source is subjected to wavelength conversion to generate the ultraviolet laser light, and measurement is made of the object for measurement by heterodyne detection or homodyne detection employing the ultraviolet laser light. This enables measurement of a structure of a micro-structure. Alternatively, the laser light is split into multiple laser light beams and frequency shifted so that the laser light beams will be of different frequencies. The laser light beams are imaged at respective different focal point positions to perform heterodyne detection. The resulting heterodyne signals are separated into respective frequency bands and measurement is made of the structure of the object for measurement in association with the respective imaging points. This enables measurement of the structure of the object for measurement in the direction along its depth.
    • 一种测量方法和测量装置,用于测量沿着测量对象的深度的微结构或结构的结构。 对来自固态激光光源的激光进行波长转换以产生紫外激光,并且通过使用紫外激光的外差检测或零差检测来测量测量对象。 这使得能够测量微结构的结构。 或者,激光被分成多个激光束并且频移,使得激光束将具有不同的频率。 激光束在各个不同的焦点位置成像,以进行外差检测。 所得到的外差信号被分离成相应的频带,并且与各个成像点相关联地测量用于测量的对象的结构。 这使得能够沿着其深度的方向测量被测物体的结构。
    • 4. 发明授权
    • Optical system having stable resonator
    • 具有稳定谐振器的光学系统
    • US06181461B2
    • 2001-01-30
    • US09162105
    • 1998-09-28
    • Hiroyuki WadaHisashi MasudaKenji KondoMichio OkaYuushi Kaneda
    • Hiroyuki WadaHisashi MasudaKenji KondoMichio OkaYuushi Kaneda
    • G02F135
    • G02F1/37G02F2001/3542
    • In an optical system having at least one optical part other than mirrors, for example, a wavelength conversion optical system which uses an external resonator, an optical system which is capable of solving the problem of transverse mode generation due to the existence of scattering matter and the optical crystal used and capable of supplying a stable output (stable wavelength conversion output) is provided. At least at one point in a stable resonator having optical parts (optical crystal) other than mirrors, an aperture having a circular hole with a diameter 1 to 10 times the diameter of a beam at the aperture, a slit having a width 1 to 10 times the diameter of the beam, or an aperture of an arbitrary shape having an edge is located, or a knife edge having an linear or curved edge is Located so that the nearest distance between the edge and the beam is 1 to 10 times the radius of the beam from the center of the beam.
    • 在具有除反射镜之外的至少一个光学部件的光学系统中,例如,使用外部谐振器的波长转换光学系统,能够解决由于散射物质的存在而产生横向模式的问题的光学系统,以及 提供了使用并且能够提供稳定输出(稳定的波长转换输出)的光学晶体。 至少在具有除了镜子之外的光学部件(光学晶体)的稳定谐振器中的一个点处,具有直径在光阑的光束直径的1至10倍的圆形孔的孔,具有宽度1至10的狭缝 或者具有边缘的任意形状的孔的位置,或者具有线性或弯曲边缘的刀刃被定位成使得边缘和梁之间的最近距离为半径的1至10倍 的梁的中心。
    • 6. 发明授权
    • Solid-state laser resonator
    • 固态激光谐振器
    • US5349603A
    • 1994-09-20
    • US976276
    • 1992-11-13
    • Yushi KanedaMichio Oka
    • Yushi KanedaMichio Oka
    • H01S3/08H01S3/094H01S3/139H01S3/16
    • H01S3/08H01S3/08072H01S3/09408H01S3/09415
    • A solid-state laser resonator includes a pair of reflectors 4, 5, a bar-like laser medium 6, a plurality of point laser sources 1, 2 and resonator including a plurality of resonator portions. At least one of the paired reflectors 4, 5 has a curved-surface mirror. The laser medium 6 is interposed between the paired reflectors 4, 5. Laser beams 8 emitted from the point laser sources 1, 2 are passed through one of the paired reflectors 4, 5 and irradiated as pumping lights on one end face of the laser medium 6. The resonators include the pair of reflectors, the laser sources 1, 2 and a plurality of thermal lenses. The thermal lenses are formed within the laser medium 6. The resonators produce output laser beam to produce from the other end face of the laser medium 6 through other one of the reflector 5.
    • 固体激光谐振器包括一对反射器4,5,棒状激光介质6,多个点激光源1,2和包括多个谐振器部分的谐振器。 配对反射器4,5中的至少一个具有曲面反射镜。 激光介质6插入在成对反射器4,5之间。从点激光源1,2发射的激光束8通过成对的反射器4,5中的一个,并在激光介质的一个端面上作为泵浦光照射 谐振器包括一对反射器,激光源1,2和多个热透镜。 热透镜形成在激光介质6内。谐振器产生输出激光束,以通过反射器5中的另一个从激光介质6的另一端面产生。
    • 10. 发明授权
    • Laser beam generator
    • 激光束发生器
    • US5909456A
    • 1999-06-01
    • US944457
    • 1997-10-06
    • Michio Oka
    • Michio Oka
    • G02F1/37H01S3/08H01S3/081H01S3/098H01S3/109H01S3/131H01S3/16H01S3/10
    • H01S3/1312H01S3/109G02F1/37H01S3/08018H01S3/08054H01S3/08072H01S3/0815H01S3/1611H01S3/1643H01S3/1665H01S3/1673
    • A laser beam generator includes first and second mirrors, a laser light source, a laser medium, a non-linear optical crystal element and a birefringent element. The laser light source generates a pumping light beam. The laser medium, arranged between the first and second mirrors, is irradiated with the pumping light beam via one of the mirrors to generate a fundamental laser beam based on the pumping light beam. The non-linear optical crystal element is arranged between the first and second mirrors to generate a second harmonic laser beam under the type II phase matching as the fundamental laser beam from the laser medium is passed through it in resonant oscillation. The birefringent element has its one surface at a pumping light beam inlet side coated with a high reflectance coating and has its opposite surface parallel to it with a nonreflective coating. The birefringent element is set so that its optical axis is inclined at a predetermined azimuth angle with respect to the crystal axis of the non-linear optical crystal element. The surface of the birefringent element coated with a high reflectance coating constitutes one of the first or second mirrors.
    • 激光束发生器包括第一和第二反射镜,激光光源,激光介质,非线性光学晶体元件和双折射元件。 激光光源产生泵浦光束。 布置在第一和第二反射镜之间的激光介质通过其中一个反射镜用泵浦光束照射,以产生基于激发光束的基本激光束。 非线性光学晶体元件布置在第一和第二反射镜之间,以在激光介质的基本激光束以共振振荡的方式通过时,在II型相位匹配下产生二次谐波激光束。 双折射元件的一个表面在泵浦光束入口侧涂覆有高反射率涂层,并且其相对表面与非反射涂层平行。 双折射元件被设置为使得其光轴相对于非线性光学晶体元件的晶轴以预定的方位角倾斜。 涂覆有高反射率涂层的双折射元件的表面构成第一或第二反射镜之一。