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    • 1. 发明授权
    • Magnetoresistive sensor having lead and/or bias layer structure
contributing to a narrow gap
    • 具有有助于窄间隙的引线和/或偏置层结构的磁阻传感器
    • US5946167A
    • 1999-08-31
    • US816432
    • 1997-03-14
    • Michiko HaraHiroaki YodaYuichi Ohsawa
    • Michiko HaraHiroaki YodaYuichi Ohsawa
    • G11B5/31G11B5/39
    • G11B5/3903G11B5/3967G11B5/3116G11B5/313
    • The present invention provides a magnetoresistive sensor comprising a magnetoresistive film (MR film) having a magnetic field response portion; a pair of leads on the MR film to supply sensing current to the MR film; and upper and lower (first and second) magnetic shield layers arranged so as to sandwich the MR film through a magnetic gap film, respectively. The pair of lead layers is deposited on the side of the magnetic field response portion, i.e., a portion of the MR film between the pair of the leads is the magnetic field response portion. The lead layer respectively provides multi-stage tapered portions, comprising a first tapered portion having a steep angle with respect to the MR film surface, and a second tapered portion having a shallow angle with respect to the MR film surface and provided continuously with the first tapered portion.
    • 本发明提供一种包括具有磁场响应部分的磁阻膜(MR膜)的磁阻传感器; 在MR膜上的一对引线,用于向MR膜提供感测电流; 以及分别通过磁隙膜夹住MR膜的上下(第一和第二)磁屏蔽层。 一对引线层沉积在磁场响应部分的一侧,即一对引线之间的MR膜的一部分是磁场响应部分。 引线层分别提供多级锥形部分,其包括相对于MR膜表面具有陡角的第一锥形部分和相对于MR膜表面具有浅角度的第二锥形部分,并连续地设置有第一 锥形部分。
    • 3. 发明授权
    • Method for manufacturing thin film magnetic head
    • 制造薄膜磁头的方法
    • US06305072B1
    • 2001-10-23
    • US08979965
    • 1997-11-26
    • Hiroaki YodaSusumu HashimotoMichiko HaraMasashi Sahashi
    • Hiroaki YodaSusumu HashimotoMichiko HaraMasashi Sahashi
    • G11B542
    • B82Y10/00G11B5/3116G11B5/313G11B5/3163G11B5/3967Y10T29/49044Y10T29/49046
    • When manufacturing a thin film magnetic head in which an upper magnetic pole is formed on a lower magnetic pole through a magnetic gap, firstly, at least on the lower magnetic pole, a convex portion possessing the width equivalent to a track width is formed. The convex portion forms a lower magnetic pole tip. Conforming to a contour of the convex shape of the lower magnetic pole, a non-magnetic material layer is formed. A flattening layer is formed on the non-magnetic material layer. The non-magnetic layer is etched with the flattening layer, for example, as a mask. In the non-magnetic material layer, a concave portion self-aligned to the lower portion magnetic pole top (convex portion) is formed. Inside the concave portion, a magnetic layer (upper magnetic pole tip) destined to be a part of the upper magnetic pole is formed. As to the lower magnetic pole tip and the upper magnetic pole tip, the widths of surfaces opposite to the magnetic gap are almost equal, and the central positions thereof almost overlap each other. Thus, a narrow track head structure with high accuracy can be obtained.
    • 当通过磁隙制造在下磁极上形成上磁极的薄膜磁头时,首先至少在下磁极上形成具有与磁道宽度相等的宽度的凸部。 凸部形成下磁极末端。 符合下磁极的凸形轮廓,形成非磁性材料层。 在非磁性材料层上形成平坦化层。 用平坦化层,例如作为掩模蚀刻非磁性层。 在非磁性材料层中,形成与下部磁极顶部(凸部)自对准的凹部。 在凹部内部形成着作为上磁极的一部分的磁性层(上磁极端)。 对于下磁极尖端和上磁极尖端,与磁隙相反的表面的宽度几乎相等,并且其中心位置几乎彼此重叠。 因此,可以获得高精度的窄轨道头结构。
    • 5. 发明授权
    • Magnetic head manufacturing method
    • 磁头制造方法
    • US06751846B2
    • 2004-06-22
    • US10401869
    • 2003-03-31
    • Susumu HashimotoMichiko HaraTomohiko NagataKohichi TateyamaMasatoshi YoshikawaTakeo SakakuboHiroaki YodaAkio HoriTakashi Koizumi
    • Susumu HashimotoMichiko HaraTomohiko NagataKohichi TateyamaMasatoshi YoshikawaTakeo SakakuboHiroaki YodaAkio HoriTakashi Koizumi
    • G11B5127
    • G11B5/313G11B5/3116G11B5/3163G11B5/3967Y10T29/49044
    • A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the lower write pole, comprising: a first step of making the magnetic gap on the projection of the lower write pole; a second step of making a non-magnetic material layer on the lower write pole, the non-magnetic material layer having a projection on its top surface in positional alignment with the projection of the lower write pole; a third step of making a mask layer on the non-magnetic material layer, the mask layer having an opening in which the top surface of the projection of the non-magnetic material layer is exposed; a fourth step of making a curved recess in the non-magnetic material layer by isotropically etching the non-magnetic material layer through the opening of the mask layer; a fifth step of making an approximately tapered recess down from the bottom of the curved recess by anisotropically etching the non-magnetic material layer through the opening of the mask layer; and a sixth step of making the upper write pole by burying a magnetic material in the tapered recess and the curved recess is provided.
    • 一种用于制造磁头的方法,该磁头包括具有突出部的下部写入极,具有与下部写入磁极的突起相对的突出部的上部写入磁极,以及插入在上部写入磁极和突起之间的磁隙 包括:使下部写入极的投影上的磁隙形成的第一步骤; 在下写入磁极上制作非磁性材料层的第二步骤,非磁性材料层在其顶表面上具有与下写入磁极的突起位置对准的突起; 在非磁性材料层上形成掩模层的第三步骤,所述掩模层具有露出所述非磁性材料层的突起的顶表面的开口; 通过所述掩模层的开口对所述非磁性材料层进行各向同性蚀刻来制造所述非磁性材料层中的弯曲凹部的第四工序; 第五步骤,通过通过掩模层的开口各向异性蚀刻非磁性材料层,从弯曲凹槽的底部向下形成大致锥形的凹陷; 并且提供通过将磁性材料埋入锥形凹部和弯曲凹部中来制造上部写入极的第六步骤。
    • 7. 发明授权
    • Magnetic head
    • 磁头
    • US06304415B1
    • 2001-10-16
    • US09615783
    • 2000-07-13
    • Kohichi TateyamaHiroaki YodaTadahiko KobayashiHiromi SakataMichiko HaraAkio HoriTakashi KoizumiTomohiko Nagata
    • Kohichi TateyamaHiroaki YodaTadahiko KobayashiHiromi SakataMichiko HaraAkio HoriTakashi KoizumiTomohiko Nagata
    • G11B531
    • G11B5/3109G11B5/3116G11B5/3146G11B5/3153G11B5/3163G11B5/3967
    • At least one magnetic pole out of a pair of magnetic poles is provided with a T-shaped magnetic pole having a magnetic pole chip at the position contacting with a magnetic gap and an auxiliary magnetic pole which is wider than thereof. The proximity of an air bearing surface of the T-shaped magnetic pole is composed of a laminated film containing a magnetic material layer with a high saturated magnetic flux density which composes the magnetic pole chip and a portion of the auxiliary magnetic pole and a magnetic material layer with a low saturated magnetic flux density which composes the remaining portion of the auxiliary magnetic pole. When the front portion of the magnetic pole with the track width of 1.8 &mgr;m or less is composed of a laminated film containing a magnetic material layer having a high saturated magnetic flux density and a magnetic material layer having a low saturated magnetic flux density, the thickness of the magnetic material layer having the high saturated magnetic flux density is 0.5 &mgr;m or more. According to the above described magnetic pole, the magnetic saturation near the tip portion of the magnetic pole is controlled, so that preferable magnetic field strength and magnetic field gradient can be attained when the track width is narrowed.
    • 在一对磁极中的至少一个磁极设置有在与磁隙接触的位置处具有磁极片的T形磁极和比其宽的辅助磁极。 T形磁极的空气轴承表面的接近度由包含构成磁极片和辅助磁极的一部分的磁性材料层和具有高饱和磁通密度的磁性材料层的叠层膜构成, 具有构成辅助磁极的剩余部分的低饱和磁通密度的层。 当磁道宽度为1.8μm或更小的磁极的前部由包含具有高饱和磁通密度的磁性材料层和具有低饱和磁通密度的磁性材料层的层叠膜构成时,厚度 具有高饱和磁通密度的磁性材料层的厚度为0.5μm以上。 根据上述磁极,控制磁极尖端部附近的磁饱和,从而当磁道宽度变窄时可以获得优选的磁场强度和磁场梯度。
    • 10. 发明授权
    • Magnetic head
    • 磁头
    • US6108167A
    • 2000-08-22
    • US150926
    • 1998-09-10
    • Kohichi TateyamaHiroaki YodaTadahiko KobayashiHiromi SakataMichiko HaraAkio HoriTakashi KoizumiTomohiko Nagata
    • Kohichi TateyamaHiroaki YodaTadahiko KobayashiHiromi SakataMichiko HaraAkio HoriTakashi KoizumiTomohiko Nagata
    • G11B5/31G11B5/39G11B5/187
    • G11B5/3109G11B5/3146G11B5/3153G11B5/3116G11B5/3163G11B5/3967
    • At least one magnetic pole out of a pair of magnetic poles is provided with a T-shaped magnetic pole having a magnetic pole chip at the position contacting with a magnetic gap and an auxiliary magnetic pole which is wider than thereof. The proximity of an air bearing surface of the T-shaped magnetic pole is composed of a laminated film containing a magnetic material layer with a high saturated magnetic flux density which composes the magnetic pole chip and a portion of the auxiliary magnetic pole and a magnetic material layer with a low saturated magnetic flux density which composes the remaining portion of the auxiliary magnetic pole. When the front portion of the magnetic pole with the track width of 1.8 .mu.m or less is composed of a laminated film containing a magnetic material layer having a high saturated magnetic flux density and a magnetic material layer having a low saturated magnetic flux density, the thickness of the magnetic material layer having the high saturated magnetic flux density is 0.5 .mu.m or more. According to the above described magnetic pole, the magnetic saturation near the tip portion of the magnetic pole is controlled, so that preferable magnetic field strength and magnetic field gradient can be attained when the track width is narrowed.
    • 在一对磁极中的至少一个磁极设置有在与磁隙接触的位置处具有磁极片的T形磁极和比其宽的辅助磁极。 T形磁极的空气轴承表面的接近度由包含构成磁极片和辅助磁极的一部分的磁性材料层和具有高饱和磁通密度的磁性材料层的叠层膜构成, 具有构成辅助磁极的剩余部分的低饱和磁通密度的层。 当轨道宽度为1.8μm或更小的磁极的前部由包含具有高饱和磁通密度的磁性材料层和具有低饱和磁通密度的磁性材料层的层叠膜构成时, 具有高饱和磁通密度的磁性材料层的厚度为0.5μm以上。 根据上述磁极,控制磁极尖端部附近的磁饱和,从而当磁道宽度变窄时可以获得优选的磁场强度和磁场梯度。