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    • 6. 发明授权
    • Turbo vacuum pump
    • 涡轮真空泵
    • US5536148A
    • 1996-07-16
    • US297017
    • 1994-08-29
    • Akira NishiuchiMasahiro MaseNoboru MatsumuraKatsuaki KikuchiTakashi NagaokaSeiji Sakagami
    • Akira NishiuchiMasahiro MaseNoboru MatsumuraKatsuaki KikuchiTakashi NagaokaSeiji Sakagami
    • F04D17/16F04D19/04F04D29/58F04B23/14
    • F04D19/046F04D17/168F04D23/008F04D29/582
    • A turbo vacuum pump for compressing a low-pressure gas to discharge the compressed gas into atmosphere comprises pump stator having a gas flow passage comprising a plurality of annular flow passages on an inner surface thereof arranged stepwise diameters of which become smaller toward downstream and passages intercommunicating with adjacent annular flow passages and a gas discharge port communicated with one of the plurality of annular flow passages disposed at the most downstream. The pump stator includes a cylindrical spiral grooved pump impeller and a plurality of peripheral flow pump impellers facing the annular flow passages provided downstream of the cylindrical spiral grooved pump impeller and having stepwise diameters which become smaller toward downstream to form a peripheral flow pump stage. The suction casing has a spiral groove on a cylindrical inner surface thereof arranged with a predetermined clearance in relation to the spiral grooved pump impeller of the pump rotor so as to form a spiral grooved pump stage and a gas suction port communicated with the spiral grooved pump stage.
    • 用于压缩低压气体以将压缩气体排放到大气中的涡轮真空泵包括具有气体流动通道的泵定子,所述气体流动通道在其内表面上包括多个环形流动通道,所述内部表面的逐步直径向下游变小并且通过相互通信 与相邻的环形流动通道相连接,气体排出口与设置在最下游的多个环形流动通道中的一个连通。 泵定子包括圆柱形螺旋槽泵叶轮和面向环形流动通道的多个周向流动泵叶轮,其设置在圆柱形螺旋槽泵叶轮的下游,并且具有朝向下游变小的逐步直径以形成外围流动泵级。 抽吸壳体在其圆柱形内表面上具有相对于泵转子的螺旋槽泵叶轮设置有预定间隙的螺旋槽,以形成螺旋槽泵台和与螺旋槽泵连通的吸气口 阶段。