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1. 发明授权

US08655138B2 Waveguide structure and related fabrication method 有权
标题翻译：波导结构及相关制造方法
公开(公告)号：US08655138B2
公开(公告)日：2014-02-18
申请号：US13104440
申请日：2011-05-10
申请人： Michal Lipson , Alexander Gondarenko , Nicholas Sherwood
发明人： Michal Lipson , Alexander Gondarenko , Nicholas Sherwood
IPC分类号： G02B6/10 , G02B6/26 , G02B6/42
CPC分类号： G02B6/136
摘要： A method for fabricating a waveguide structure (i.e., preferably an optical waveguide structure) uses a two mask process step sequence for forming a waveguide layer over a substrate. A first mask within the two mask step process sequence is used to etch the substrate to provide a pillar within the substrate. A second mask within the two mask process step sequence is self aligned to, and covers a top and at least a portion of the sidewalls of, the pillar. The second mask is used as a thermal oxidation mask that provides an optical waveguide layer from a top portion of the pillar that is separated from a thinned substrate derived from the substrate by a waveguide isolation layer formed from thermal oxidation of at least a bottom portion of the pillar. Under conditions of manufacturing economy, and as a result of the processing sequence, the waveguide layer is formed with a non-planar bottom surface including a valley in the bottom surface of the waveguide layer and the substrate is formed with a non-planar top surface including a peak in the top surface of the substrate that corresponds with the valley in the bottom surface of the waveguide layer.
摘要翻译：用于制造波导结构（即，优选地，光波导结构）的方法使用用于在衬底上形成波导层的两个掩模处理步骤序列。使用两个掩模步骤处理序列内的第一掩模来蚀刻衬底以在衬底内提供柱。两个掩模工艺步骤序列内的第二个掩模是自对准的并且覆盖了柱的顶部和侧壁的至少一部分。第二掩模用作热氧化掩模，其从柱的顶部提供光波导层，其通过由至少底部的热氧化形成的波导隔离层与从基板衍生的薄化基板分离支柱。在制造经济条件下，作为加工顺序的结果，波导层形成有非平面底面，其包括在波导层的底表面中的谷部，并且基板形成有非平面顶表面包括在与波导层的底表面中的谷相对应的衬底的顶表面中的峰。

2. 发明申请

US20110280539A1 WAVEGUIDE STRUCTURE AND RELATED FABRICATION METHOD 有权
标题翻译：波形结构及相关制造方法
公开(公告)号：US20110280539A1
公开(公告)日：2011-11-17
申请号：US13104440
申请日：2011-05-10
申请人： Michal Lipson , Alexander Gondarenko , Nicholas Sherwood
发明人： Michal Lipson , Alexander Gondarenko , Nicholas Sherwood
IPC分类号： G02B6/10 , C23F1/02
CPC分类号： G02B6/136
摘要： A method for fabricating a waveguide structure (i.e., preferably an optical waveguide structure) uses a two mask process step sequence for forming a waveguide layer over a substrate. A first mask within the two mask step process sequence is used to etch the substrate to provide a pillar within the substrate. A second mask within the two mask process step sequence is self aligned to, and covers a top and at least a portion of the sidewalls of, the pillar. The second mask is used as a thermal oxidation mask that provides an optical waveguide layer from a top portion of the pillar that is separated from a thinned substrate derived from the substrate by a waveguide isolation layer formed from thermal oxidation of at least a bottom portion of the pillar. Under conditions of manufacturing economy, and as a result of the processing sequence, the waveguide layer is formed with a non-planar bottom surface including a valley in the bottom surface of the waveguide layer and the substrate is formed with a non-planar top surface including a peak in the top surface of the substrate that corresponds with the valley in the bottom surface of the waveguide layer.
摘要翻译：用于制造波导结构（即，优选地，光波导结构）的方法使用用于在衬底上形成波导层的两个掩模处理步骤序列。使用两个掩模步骤处理序列内的第一掩模来蚀刻衬底以在衬底内提供柱。两个掩模工艺步骤序列内的第二个掩模是自对准的并且覆盖了柱的顶部和侧壁的至少一部分。第二掩模用作热氧化掩模，其从柱的顶部提供光波导层，其通过由至少底部的热氧化形成的波导隔离层与从基板衍生的薄化基板分离支柱。在制造经济条件下，作为加工顺序的结果，波导层形成有非平面底面，其包括在波导层的底表面中的谷部，并且基板形成有非平面顶表面包括在与波导层的底表面中的谷相对应的衬底的顶表面中的峰。

3. 发明申请

US20140085634A1 Multi-Function Spectrometer-On-Chip with a Single Detector Array 有权
标题翻译：具有单个检测器阵列的片上多功能光谱仪
公开(公告)号：US20140085634A1
公开(公告)日：2014-03-27
申请号：US14035348
申请日：2013-09-24
申请人： Kyle Preston , Arthur Nitkowski , Nicholas Sherwood , Arsen Hajian
发明人： Kyle Preston , Arthur Nitkowski , Nicholas Sherwood , Arsen Hajian
IPC分类号： G01J3/02
CPC分类号： G01J3/447 , G01J3/0205 , G01J3/0218 , G01J3/0224 , G01J3/0259 , G01J3/18 , G01J3/1804 , G01J3/1895 , G01J3/2803 , G01J3/36
摘要： Various embodiments of apparatuses, systems and methods are described herein for a spectrometer comprising at least two dispersive elements configured to receive at least one input optical signal and generate two or more pluralities of spatially separated spectral components, at least a portion of the at least two dispersive elements being implemented on a first substrate; and a single detector array coupled to the at least two dispersive elements and configured to receive and measure two or more pluralities of narrowband optical signals derived from the two or more pluralities of spatially separated spectral components, respectively.
摘要翻译：本文描述了用于光谱仪的装置，系统和方法的各种实施例，其包括至少两个分散元件，其被配置为接收至少一个输入光信号并产生两个或更多个空间上分离的光谱分量，至少两个分散元件被实施在第一基板上; 以及耦合到所述至少两个色散元件并被配置为分别接收和测量从所述两个或更多个空间分离的光谱分量导出的两个或更多个窄带光信号的单个检测器阵列。

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