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    • 5. 发明申请
    • DEVICE FOR GENERATING PLASMA BY MEANS OF MICROWAVES
    • 通过MICROWAVES生成等离子体的装置
    • US20120279448A1
    • 2012-11-08
    • US13509290
    • 2010-11-05
    • Horst MueggeKlaus-Martin BaumgärtnerMathias KaiserLukas Alberts
    • Horst MueggeKlaus-Martin BaumgärtnerMathias KaiserLukas Alberts
    • C23C16/511
    • H01J37/32211C23C16/511H01J37/32192
    • A device is provided for generating plasma by microwaves for CVD coating a substrate having a vacuum container into which a reaction gas can be fed and an electrical conductor arranged therein which is connected on each of both ends thereof to a device for coupling microwaves and to a voltage source with which a difference of potential can generated between the electrical conductor and the surrounding vacuum container. The electrical conductor is electrically insulated from the devices for coupling microwaves. The electrical conductor has a rod-shaped design or a curved run. The electrical conductor is connected to the voltage source via a feedthrough filter. The device for coupling microwaves expands in a funnel shape toward the electrical conductor and is partially or completely filled by a dielectric material. The device for coupling microwaves has groove-shaped recesses running along a circumference.
    • 提供了一种用于通过微波产生等离子体的装置,用于CVD涂覆具有可以供应反应气体的真空容器的基板和布置在其中的电导体,其两端连接到用于耦合微波的装置和 在电导体和周围的真空容器之间产生电位差的电压源。 电导体与用于耦合微波的器件电绝缘。 电导体具有棒状设计或弯曲的行程。 电导体通过馈通滤波器连接到电压源。 用于耦合微波的装置以漏斗形状朝向电导体扩张,并被电介质材料部分或完全填充。 用于耦合微波的装置具有沿圆周方向延伸的凹槽形凹部。