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    • 3. 发明授权
    • Integrated beam shaper and use thereof
    • 集成光束整形器及其用途
    • US6128134A
    • 2000-10-03
    • US917865
    • 1997-08-27
    • Michael R. FeldmanAlan D. KathmanW. Hudson WelchRobert TeKolste
    • Michael R. FeldmanAlan D. KathmanW. Hudson WelchRobert TeKolste
    • G02B6/42G02B27/09G11B7/135H01S3/00H01S3/02H01S5/00H01S5/022G02B6/12G02B27/30
    • G02B19/0009G02B19/0052G02B27/09G02B27/095G02B6/4206G11B7/1353G11B7/1362G11B7/1381G11B7/1398G02B6/4214G02B6/4224G02B6/4232H01S5/02248H01S5/02292
    • A substrate having an optical element on an input surface thereof receives a light beam not having a desired beam shape and shapes the light beam into a predetermined intensity distribution. The substrate may further include a second optical element for providing a predetermined phase pattern to the light beam provided by the first optical element. The first optical element may, for example, circularize an elliptical light beam using a soft aperture for differential power attenuation or by altering the divergence of the light beam along the different axes of the light beam. When the divergence angles are altered and the collimating optical element is provided on the output surface, the thickness of the transparent substrate is determined in accordance with a resultant difference in the divergence and/or with the initial difference in beam size along each axis and with a required circularity. A light source is mounted close to the first optical element in order to minimize the amount of differing divergence present along the different axes of the light beam. The optical elements may be diffractive, refractive, or hybrids thereof and are preferably prepared photolithographically on the substrate itself. The light source may be mounted using fiducial marks and the photolithographic processes for forming the optical elements may also use fiducial marks. All elements of the integrated beam shaper may be formed on a planar, wafer level.
    • 在其输入表面上具有光学元件的基板接收不具有期望光束形状的光束并将光束形成为预定的强度分布。 基板还可以包括用于向由第一光学元件提供的光束提供预定相位图案的第二光学元件。 例如,第一光学元件可以使用用于差分功率衰减的软孔径或通过改变沿着光束的不同轴的光束的发散来使椭圆形光束圆化。 当发散角被改变并且准直光学元件设置在输出表面上时,透明衬底的厚度根据所得到的发散差异和/或沿着每个轴的光束尺寸的初始差异以及与 要求的圆形度。 光源安装在靠近第一光学元件的位置,以便沿着光束的不同轴线最小化存在的不同发散量。 光学元件可以是衍射,折射或混合,并且优选光刻地制备在衬底本身上。 光源可以使用基准标记安装,并且用于形成光学元件的光刻工艺也可以使用基准标记。 集成光束整形器的所有元件可以形成在平面晶片级上。
    • 4. 发明授权
    • Integrated optical apparatus and associated methods
    • 集成光学仪器及相关方法
    • US06522618B1
    • 2003-02-18
    • US09637364
    • 2000-08-15
    • Michael R. FeldmanAlan D. KathmanW. Hudson Welch
    • Michael R. FeldmanAlan D. KathmanW. Hudson Welch
    • G11B700
    • G11B7/1353G02B6/4214G02B6/4224G02B6/4231G02B6/4232G02B6/4238G02B6/4239G02B6/43G02B2006/12102G02B2006/12107G11B7/123G11B7/1372G11B7/1374G11B7/22H01S5/005
    • An integrated optical apparatus includes an optically transparent substrate with a light source and a detector mounted adjacent thereto. The substrate includes an optical element in a transmit path from the light source to a remote target. The optical element splits the light into more than one beam. A detector receives beams reflected by the target. All optical elements needed to create the more then one beam, direct the more than one beam onto the target and direct the more than one beam from the target to the detector are on the substrate and/or any structure bonded to the substrate. Preferably, the optical element provides sufficient separation between the more than one beam such that each beam is delivered to a unique respective light detecting element of the detector. The return path from the remote target to the detector may include an optical element for each beam or no optical elements. An additional substrate may be included and bonded to the substrate. The active elements may be bonded to a bottom surface of the substrate, either directly or via spacer blocks, or may be provided on a support substrate, which is then bonded, either directly or via spacer blocks, to the substrate.
    • 集成光学装置包括具有光源的光学透明基板和与其相邻安装的检测器。 衬底包括从光源到远程目标的发射路径中的光学元件。 光学元件将光分成多于一个的光束。 检测器接收由目标物体反射的光束。 所需的所有光学元件需要产生多于一个的光束,将不止一个光束引导到目标物上,并引导来自目标的多于一个光束到检测器处于衬底和/或结合到衬底的任何结构上。 优选地,光学元件在多于一个光束之间提供足够的间隔,使得每个光束被传送到检测器的独特的相应的光检测元件。 从远程目标到检测器的返回路径可以包括用于每个光束的光学元件或者不包括光学元件。 可以包括另外的衬底并结合到衬底。 有源元件可以直接地或通过间隔块结合到衬底的底表面,或者可以设置在支撑衬底上,然后将其直接或经由间隔块结合到衬底上。
    • 6. 发明授权
    • Integrated optical apparatus providing separated beams on a detector and
associated methods
    • 在检测器上提供分离光束的集成光学装置及相关方法
    • US5912872A
    • 1999-06-15
    • US18891
    • 1998-02-05
    • Michael R. FeldmanAlan D. KathmanW. Hudson Welch
    • Michael R. FeldmanAlan D. KathmanW. Hudson Welch
    • G02B5/18G02B6/12G02B6/42G02B6/43G11B7/12G11B7/135G11B7/22H01L31/12H01S5/00G11B7/00
    • G11B7/1353G02B6/4231G02B6/4232G11B7/123G11B7/1372G11B7/1374G11B7/22G02B2006/12102G02B2006/12107G02B6/4214G02B6/4224G02B6/4238G02B6/4239G02B6/43H01S5/005
    • An integrated optical apparatus includes an optically transparent substrate with a light source and a detector mounted adjacent thereto. The substrate includes an optical element in a transmit path from the light source to a remote target. The optical element splits the light into more than one beam. A detector receives beams reflected by the target. All optical elements needed to create the more then one beam, direct the more than one beam onto the target and direct the more than one beam from the target to the detector are on the substrate and/or any structure bonded to the substrate. Preferably, the optical element provides sufficient separation between the more than one beam such that each beam is delivered to a unique respective light detecting element of the detector. The return path from the remote target to the detector may include an optical element for each beam or no optical elements. An additional substrate may be included and bonded to the substrate. The active elements may be bonded to a bottom surface of the substrate, either directly or via spacer blocks, or may be provided on a support substrate, which is then bonded, either directly or via spacer blocks, to the substrate.
    • 集成光学装置包括具有光源的光学透明基板和与其相邻安装的检测器。 衬底包括从光源到远程目标的发射路径中的光学元件。 光学元件将光分成多于一个的光束。 检测器接收由目标物体反射的光束。 所需的所有光学元件需要产生多于一个的光束,将不止一个光束引导到目标物上,并引导来自目标的多于一个光束到检测器处于衬底和/或结合到衬底的任何结构上。 优选地,光学元件在多于一个光束之间提供足够的间隔,使得每个光束被传送到检测器的独特的相应的光检测元件。 从远程目标到检测器的返回路径可以包括用于每个光束的光学元件或者不包括光学元件。 可以包括另外的衬底并结合到衬底。 有源元件可以直接地或通过间隔块结合到衬底的底表面,或者可以设置在支撑衬底上,然后将其直接或经由间隔块结合到衬底上。
    • 10. 发明授权
    • Radically symmetric hologram and method of fabricating the same
    • 全自由对称全息图及其制造方法
    • US5202775A
    • 1993-04-13
    • US787075
    • 1991-11-04
    • Michael R. FeldmanW. Hudson WelchJames E. Morris
    • Michael R. FeldmanW. Hudson WelchJames E. Morris
    • G02B5/32G03H1/08
    • G02B5/32G03H1/08
    • A radially symmetric iterative discrete on-axis hologram has a high diffraction efficiency for a correspondingly small f-number. The radially symmetric hologram has a plurality of concentric constant radial phase fringes. Each fringe has a predetermined plurality of radial phase rings and each fringe corresponds to a predetermined plurality of radial phase transition points and a radial phase value between the radial phase transition points. The radially symmetric iterative discrete on-axis hologram also has radial phase fringes with a predetermined number of phase levels, at least two adjacent fringes have a phase level difference which is greater than one and less than the predetermined number minus one. The radially symmetric iterative discrete on-axis hologram is fabricated by determining a plurality of concentric fringes of constant phase with a plurality of radial phase transition points and radial phase values between the radial phase transition points for each concentric fringe. The plurality of radial phase transition points and radial phase values are repeatedly optimized to obtain optimized radial phase transition points and optimized radial phase values which maximize the diffraction efficiency. A radially symmetric hologram with concentric fringes of constant radial phase corresponding to the optimized radial phase transition points and the optimized radial phase values is then fabricated using known fabrication techniques.
    • 径向对称迭代离散的轴上全息图对于相应小的f数具有高的衍射效率。 径向对称全息图具有多个同心恒定的径向相位条纹。 每个条纹具有预定的多个径向相位环,并且每个条纹对应于预定的多个径向相变点和径向相变点之间的径向相位值。 径向对称的迭代离散轴上全息图还具有预定数量的相位电平的径向相位条纹,至少两个相邻边缘具有大于1且小于预定数量减去1的相位电平差。 径向对称的迭代离散的全轴全息图是通过确定多个恒定相位的同心条纹与多个径向相变点和每个同心条纹的径向相变点之间的径向相位值来制造的。 多个径向相变点和径向相位值被重复优化以获得最大化的衍射效率的优化的径向相变点和优化的径向相位值。 然后使用已知的制造技术制造具有对应于优化的径向相变点和优化的径向相位值的恒定径向相位的同心条纹的径向对称全息图。