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    • 3. 发明授权
    • Method and apparatus for making a shadow mask array
    • 用于制作荫罩阵列的方法和装置
    • US06729927B2
    • 2004-05-04
    • US10210687
    • 2002-08-01
    • Joseph E. StagnittoThomas W. PaloneCamiel J. RaesJames A. WhiteJoseph YokajtyGopalan Rajeswaran
    • Joseph E. StagnittoThomas W. PaloneCamiel J. RaesJames A. WhiteJoseph YokajtyGopalan Rajeswaran
    • H01J2907
    • C23C14/042
    • A method for making a shadow mask array is taught. Producing a plurality of shadow mask sections; inspecting the plurality of shadow mask sections to determine which shadow mask sections are acceptable as meeting predetermined criteria; positioning a predetermined number of the acceptable mask sections into predetermined locations relative to one another to form a mask section array thereby distributing any error in individual mask sections across the mask section array; and attaching the individual mask sections of the mask section array to a support structure. The support structure allows for expansion and/or contraction of the individual mask sections of the mask section array while maintaining relative positioning of the individual shadow mask section in the shadow mask array. The support structure further allows for compliance of the shadow mask array in a direction normal to the plane of the shadow mask array thereby allowing for a substantially planar interface between the shadow mask array and a substrate to be coated.
    • 教导了制作荫罩阵列的方法。 制作多个荫罩部分; 检查所述多个荫罩部分以确定哪个荫罩部分是可接受的,以满足预定标准; 将预定数量的可接受掩模部分相对于彼此定位到预定位置以形成掩模部分阵列,从而在掩模部分阵列中分布各个掩模部分中的任何误差; 以及将所述掩模部阵列的各个掩模部分附接到支撑结构。 支撑结构允许掩模部分阵列的各个掩模部分的扩展和/或收缩,同时保持各个阴影部分在荫罩阵列中的相对定位。 支撑结构还允许荫罩阵列在垂直于荫罩阵列的平面的方向上的顺应性,从而允许荫罩阵列和待涂覆的基底之间的基本平坦的界面。
    • 4. 发明授权
    • Vaporization apparatus with precise powder metering
    • 具有精密粉末计量的气化装置
    • US07883583B2
    • 2011-02-08
    • US11970548
    • 2008-01-08
    • Michael LongThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • Michael LongThomas W. PaloneBruce E. KoppeMichael L. Boroson
    • C23C16/448C23F1/00H01L21/306C23C16/06C23C16/22
    • C23C14/246C23C16/4486
    • Apparatus for vaporizing a particulate material, comprising a metering apparatus including: a reservoir; a housing having an internal volume and first and second openings for respectively receiving and discharging the particulate material; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove for receiving particulate material from the reservoir and for discharging the particulate material; the rotatable shaft and the internal volume cooperating such that the particulate material is transported by the circumferential groove and not along the remainder of the rotatable shaft; a scraper disposed in relation to the second opening, having at its end substantially the same cross section as the groove in the rotating shaft, the scraper cooperating with the groove to dislodge particulate material retained therein, and in response to the shaft rotating, delivers metered amounts of particulate material through the second opening; to the flash evaporator.
    • 用于蒸发颗粒材料的装置,包括计量装置,包括:储存器; 具有内部体积的壳体和用于分别接收和排出颗粒材料的第一和第二开口; 设置在所述内部容积中的可旋转轴,所述轴具有光滑表面和用于从所述储存器接收颗粒材料并用于排出所述颗粒材料的周向槽; 所述可旋转轴和所述内部容积协调使得所述颗粒材料由所述圆周凹槽而不是沿着所述可旋转轴的其余部分输送; 相对于第二开口设置的刮刀,其端部与旋转轴中的槽基本相同的横截面,刮刀与槽配合以移除保留在其中的颗粒材料,并且响应于轴旋转,传送计量 通过第二开口的颗粒材料的量; 到闪蒸器。
    • 5. 发明申请
    • METERING AND VAPORIZING PARTICULATE MATERIAL
    • 测量和蒸发颗粒材料
    • US20100122659A1
    • 2010-05-20
    • US12271277
    • 2008-11-14
    • Michael LongThomas W. Palone
    • Michael LongThomas W. Palone
    • C23C16/00
    • C23C14/246C23C14/12
    • Apparatus for metering and vaporizing a particulate material, includes: a metering device for metering particulate material having: a reservoir for receiving particulate material; a housing having first and second openings; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove; a rotating agitator with a plurality of tines disposed in the reservoir and cooperating with the rotating shaft for fluidizing particulate material and transporting it from the reservoir into the groove; cooperating such that particulate material is transported by the groove; a scraper cooperates with the groove to dislodge particulate material retained therein, and deliver metered amounts of particulate material through the second opening; a structure fluidizes the particulate material at the second opening; and a flash evaporator that receives and flash vaporizes the metered particulate material.
    • 用于计量和蒸发颗粒材料的装置包括:用于计量颗粒材料的计量装置,具有:用于接收颗粒材料的储存器; 具有第一和第二开口的壳体; 设置在所述内部容积中的旋转轴,所述轴具有光滑的表面和周向凹槽; 旋转搅拌器,其具有设置在容器中的多个尖齿,与旋转轴配合,用于使颗粒材料流化并将其从储存器输送到凹槽中; 配合使得颗粒材料由凹槽输送; 刮刀与槽配合以移除保留在其中的颗粒材料,并通过第二开口输送计量的颗粒材料; 结构在第二开口处使颗粒材料流化; 以及闪蒸蒸发器,其接收并闪蒸计量的颗粒材料。
    • 6. 发明授权
    • Controllably feeding powdered or granular material
    • 可控饲喂粉状或颗粒状材料
    • US07625602B2
    • 2009-12-01
    • US11121242
    • 2005-05-03
    • Michael LongNeil P. ReddenBruce E. KoppeThomas W. Palone
    • Michael LongNeil P. ReddenBruce E. KoppeThomas W. Palone
    • C23C16/00
    • C23C14/246C23C16/448
    • A method for metering powdered or granular material onto a heated surface to vaporize such material. The method comprises providing a rotatable auger d for receiving powdered or granular material and as the rotatable auger rotates, such rotatable auger translates such powdered or granular material along a feed path to a feeding location. The method also providing at least one opening at the feeding location such that the pressure produced by the rotating rotatable auger at the feeding location causes the powdered or granular material to be forced through the opening onto the heated surface in a controllable manner. The material is agitated or fluidized proximate to the feeding location.
    • 将粉末或颗粒材料计量到加热表面上以蒸发这种材料的方法。 该方法包括提供用于接收粉末或颗粒材料的可旋转螺旋钻d,并且当可旋转螺旋钻旋转时,这种可旋转螺旋钻将这种粉末状或颗粒状材料沿着进给路径转换到进给位置。 该方法还在进给位置处提供至少一个开口,使得由馈送位置处的旋转可旋转螺旋钻产生的压力导致粉末状或颗粒状材料以可控方式被迫穿过加热表面上的开口。 材料在靠近进料位置被搅动或流动。
    • 8. 发明授权
    • Particulate material metering and vaporization
    • 颗粒物料计量和蒸发
    • US08062427B2
    • 2011-11-22
    • US12271211
    • 2008-11-14
    • Michael LongThomas W. Palone
    • Michael LongThomas W. Palone
    • C23C16/448C23F1/00H01L21/306C23C16/06C23C16/22
    • C23C14/12C23C14/246
    • Apparatus for metering and vaporizing a particulate material, includes a metering device for metering particulate material including: a reservoir for receiving particulate material; a housing having an internal volume and having first and second openings; a rotatable shaft disposed in the internal volume, the shaft having a smooth surface and a circumferential groove; a structure disposed in the reservoir for delivery and cooperating with the rotating shaft for fluidizing particulate material and transporting it from the reservoir into the groove; the shaft and internal volume cooperating such that particulate material is transported by the groove; a scraper cooperates with the groove to dislodge particulate material retained therein and fluidize the scraped particulate material, and deliver metered amounts of particulate material through the second opening; and a flash evaporator that receives and flash vaporizes the metered particulate material.
    • 用于计量和蒸发颗粒材料的装置包括用于计量颗粒材料的计量装置,包括:用于接收颗粒材料的储存器; 具有内部容积并具有第一和第二开口的壳体; 设置在所述内部容积中的旋转轴,所述轴具有光滑的表面和周向凹槽; 设置在储存器中以用于输送并与旋转轴配合以用于使颗粒材料流化并将其从储存器输送到凹槽中的结构; 轴和内部体积协调使得颗粒材料由凹槽传送; 刮板与凹槽配合以移除保留在其中的颗粒材料并使刮掉的颗粒材料流化,并通过第二开口输送计量的颗粒材料; 以及闪蒸蒸发器,其接收并闪蒸计量的颗粒材料。