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    • 1. 发明授权
    • Positioning and socketing for semiconductor dice
    • 半导体芯片的定位和插槽
    • US08797053B2
    • 2014-08-05
    • US13114876
    • 2011-05-24
    • Michael L. RutiglianoEric J. M. MoretDavid Shia
    • Michael L. RutiglianoEric J. M. MoretDavid Shia
    • G01R31/00G01R1/073
    • G01R1/0735G01R31/2891
    • Devices and methods useful for testing bare and packaged semiconductor dice are provided. As integrated circuit chips become smaller and increasingly complex, the interface presented by a chip for connectivity with power supplies and other components of the system into which it is integrated similarly becomes smaller and more complex. Embodiments of the invention provide micron-scale accuracy alignment capabilities for fine pitch device first level interconnect areas. Embodiments of the invention employ air-bearings to effectuate the movement and alignment of a device under test with a testing interface. Additionally, testing interfaces comprising membranes supported by thermal fluids are provided.
    • 提供了用于测试裸机和封装的半导体晶片的器件和方法。 随着集成电路芯片变得越来越小,并且越来越复杂,与芯片的电源和系统的其他组件的连接的接口所呈现的接口也变得越来越小,越来越复杂。 本发明的实施例提供了用于细间距器件第一级互连区域的微米级精度对准能力。 本发明的实施例采用空气轴承来实现被测设备的移动和对准与测试界面。 另外,提供了包括由热流体支撑的膜的测试界面。